Detection system and method for automatic adjustment of grey level

An automatic adjustment, grayscale technology, applied in the photoengraving process of the pattern surface, the original for photomechanical processing, optics, etc., can solve the problems of shrinking coating range, low degree of automation, and high alignment error rate, Achieve the effect of improving accuracy and automation, increasing automation and reducing costs

Active Publication Date: 2015-06-17
BOE TECH GRP CO LTD +1
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Problems solved by technology

[0004] During the above-mentioned alignment process of the mask plate 6 and the glass substrate 7, if the grayscale of the substrate alignment image 11 in the four detection systems is inconsistent in a certain alignment process, the detection system will consider the mask plate 6 and the glass substrate 7 to be Without alignment, manual adjustment is required, resulting in low automation of the detection system and affecting production capacity
In the prior art, the photoresist is often applied to all the areas of the four substrate alignment marks 9 on the glass substrate 7 to ensure that the gray scale is consistent. It cannot be guaranteed that the area of ​​the alignment mark 9 of the substrate is completely coated, so the detection system of the prior art has a high alignment error rate and a low degree of automation

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  • Detection system and method for automatic adjustment of grey level
  • Detection system and method for automatic adjustment of grey level

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Embodiment Construction

[0030] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0031] The detection system for automatically adjusting the gray scale provided by the first aspect is as follows: figure 2 As shown, the detection system includes a detection lens 1, and the detection lens 1 is used to collect images of the mask alignment mark 8 on the mask plate 6 and the mask alignment mark 9 on the glass substrate 7 to form a mask. The film alignment image 10 and the substrate alignment image 11 are also provided with an automatic filter device 4 on the optical path where the detection lens 1 forms the substrate alignment image 11, and the automatic filter device 4 includes a grayscale detection module and a control module and an optical filter; the grayscale detection module is used to detect the grayscale of the substrate alignment image 11 formed by the detection lens 1; the control module is used to detect the grayscale of th...

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Abstract

Provided are a detection system and method for automatically adjusting grayscale. The detection system comprises a detection lens (1), wherein the detection lens (1) is configured to collect a mask alignment image (10) and a substrate alignment image (11) which are formed by images of a mask alignment mark (8) on a mask plate (6) and a substrate alignment mark (9) on a glass substrate (7); and an automatic filter device (4) arranged on an optical path of the detection lens (1) where the substrate alignment image (11) is formed, wherein the automatic filter device (4) comprises an automatic grayscale detecting module (12), a control module (14) and an optical filter (13). The detection system and method for automatically adjusting grayscale can automatically change the grayscale of the substrate alignment image (11), thereby improving the degree of automation of the detection system.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a detection system and method for automatically adjusting gray levels. Background technique [0002] Such as figure 1 As shown, at present, in the exposure process of the RGB film layer of the color filter of the liquid crystal panel, a four-point alignment method is often used to align the mask plate 6 and the glass substrate 7, that is, by aligning the mask plate 6 The alignment marks at the four corners and the alignment marks at the four corners of the glass substrate 7 are used to align the mask plate 6 and the glass substrate 7 , and only when the four points are aligned at the same time can the automatic exposure be performed. [0003] The above-mentioned alignment of each point is completed through a detection system, which includes a detection lens 1, a semi-transparent mirror 2 and a light source 3, and the light emitted by the light source 3 passes through the semi-t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/13
CPCG03F1/42H04N1/407G09G3/3607G09G2320/0626
Inventor 王耸苏九端吴洪江方群
Owner BOE TECH GRP CO LTD
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