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Control system and method for crystal constant composition growth in pulling single crystal furnace

A control system and growth control technology, which is applied in the field of crystal constant component growth control system of pulling single crystal furnace, can solve problems such as uneven crystal distribution, achieve the effect of solving axial uneven distribution and improving influence

Active Publication Date: 2017-10-20
CHINA ELECTRONICS TECH GRP NO 26 RES INST +1
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Problems solved by technology

[0004] In view of the above-mentioned deficiencies in the prior art, the object of the present invention is to propose a crystal constant component growth control system and method in a pulling single crystal furnace to solve the uneven distribution of crystals along the axial direction caused by the "segregation phenomenon" of crystals. to achieve high-efficiency and high-quality growth of large-size constant-component crystals

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  • Control system and method for crystal constant composition growth in pulling single crystal furnace
  • Control system and method for crystal constant composition growth in pulling single crystal furnace
  • Control system and method for crystal constant composition growth in pulling single crystal furnace

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Embodiment Construction

[0014] The present invention improves and optimizes the design on the basis of the original pulling single crystal furnace, and is mainly composed of two major parts: the crystal automatic growth control system and the material bar automatic replenishment control system, such as figure 1 shown.

[0015] Crystal automatic growth control system

[0016] The crystal automatic growth control system consists of a scale I1, a lifting system, a rotating system, and an induction heating module 6 (i.e. figure 1 Induction coil) and other components. The scale I1, the lifting system, the rotating system and the induction heating module 6 are respectively connected with the control module. Scale Ⅰ1 measures the weight G of the growing crystal 4 in real time 1 ;The lifting system generates a certain lifting speed v through the stepping motor 1 The crystal grows continuously; the rotation system generates a certain rotation speed ω through the torque motor to realize the stability of th...

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Abstract

The invention discloses a crystal constant component growth control system and method for a pulling single crystal furnace. The invention synergistically controls the crystal growth speed and the raw material replenishment speed to ensure that the weight of the grown crystal is consistent with the weight of the replenished raw material, so that the crystal crystallization liquid The height of the surface remains unchanged; the composition of the supplementary raw material is consistent with the composition of the grown crystal after analysis and theoretical calculation, thereby ensuring that the composition of the liquid in the crucible remains unchanged. The invention effectively solves the problem of non-uniform distribution of crystals along the axial direction caused by crystal "segregation phenomenon", and also greatly improves the influence of the downward movement of the crystal interface caused by the continuous growth of crystals on the shape of the crystal growth interface.

Description

technical field [0001] The invention relates to crystal growth, specifically refers to a crystal constant component growth control system and method in a pulling single crystal furnace. The invention can grow crystals with constant component and high uniformity, and belongs to the technical field of crystal growth. Background technique [0002] At present, the pulling single crystal furnace is the most widely used crystal growth equipment, and the pulling method is also a crystal growth method with the longest research history, the most mature technology and the widest range of applications. However, the existence of macroscopic defects in crystals still affects the quality and utilization of crystals, so the significance of studying macroscopic defects in crystals is very important. [0003] When growing crystals by the pulling method, multi-component materials are melted and crystallized to synthesize a new type of material. Since the dissolved concentrations of each solut...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/20C30B15/02
Inventor 何晔叶宁武欢颜涛母江东邓力宋晓佳王旭光
Owner CHINA ELECTRONICS TECH GRP NO 26 RES INST
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