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Non-contact complex optical surface shape high-precision three-dimensional measurement method and measurement device

A non-contact, three-dimensional measurement technology, used in measuring devices, optical devices, instruments, etc., can solve the problems of low precision, high measurement cost, three-dimensional measurement of optical components, and achieve low-cost, easy-to-operate Effect

Active Publication Date: 2018-01-05
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to solve the problems of high measurement cost, low precision and inability to realize three-dimensional measurement of the surface shape of the optical element in the existing method for measuring the surface shape of the optical element, the present invention provides a non-contact complex optical surface shape high-precision three-dimensional measurement method and measuring device

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  • Non-contact complex optical surface shape high-precision three-dimensional measurement method and measurement device

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specific Embodiment approach 1

[0018] Specific Embodiments 1. A non-contact complex optical surface shape high-precision three-dimensional measurement method, which is implemented by the following steps:

[0019] 1. Use the autocollimation theodolite to aim at the spectral confocal sensor 3, the miniature three-beam interferometer 4, and the standard flat mirror 5, respectively, and adjust the attitude of the three so that they point in the same direction;

[0020] 2. Install the optical element 6 to be tested on the test platform, use a level to assist in adjusting the attitude of the sample, and eliminate errors such as tilt; according to the measurement requirements and the size of the optical element to be tested, determine the scanning parameters such as the number of scanning measurement points N and the spacing d; Set the three-dimensional translation stage 2 to move to the scanning start point (x 0 ,y 0 ), moving in the front-back direction z makes the spectral confocal sensor 3 focus on this point...

specific Embodiment approach 2

[0025] Specific embodiment two, combine figure 1 Describe this embodiment, this embodiment is the measurement device of the non-contact complex optical surface shape high-precision three-dimensional measurement method described in the first embodiment, the device includes a measurement platform 1, a spectral confocal sensor 3, a three-dimensional translation stage 2, Miniature three-beam interferometer 4 and standard plane reflector 5; Described spectral confocal sensor 3 and miniature three-beam interferometer 4 are fixed on three-dimensional translation stage 2; Described three-dimensional translation stage 2 and standard plane reflector 5 are fixed on measurement on platform 2.

[0026] The measuring platform 1 described in this embodiment adopts a stainless steel air-floating platform, and the surface of the standard plane mirror 5 is coated with an aluminum film.

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Abstract

The non-contact complex optical surface shape high-precision three-dimensional measurement method and measurement device relate to the technical field of optical surface shape detection, and solve the problems of high measurement cost, low precision and inability to realize the optical element surface shape in existing methods for measuring the surface shape of optical elements. For issues such as three-dimensional measurement, the two-dimensional distribution of the height information of the optical surface is obtained based on non-contact three-dimensional coordinate position scanning, and the surface shape or contour information is measured. Scan the optical surface point by point through the translation of the three-dimensional translation stage in the x-y direction, and measure the change of the height h of the optical surface profile at each point; during the scanning process, move the three-dimensional translation stage in the Z direction as the height of the optical surface changes. , so that the spectral confocal sensor is always fixed on the surface of the optical element to be tested, the micro three-beam interferometer is aligned with the standard plane mirror, and the change of the distance between the two is measured in real time to obtain the surface shape information of the optical surface; the invention has low cost , Easy to operate and so on.

Description

technical field [0001] The invention relates to the technical field of optical surface shape detection, in particular to a non-contact high-precision three-dimensional measuring device and method for complex optical surface shape. Background technique [0002] Driven by urgent needs and technological progress, more and more optical components with complex surface shapes are used in optical systems. Complex surface optical elements have more degrees of freedom, which can effectively correct various advanced aberrations, simplify the structure of the optical system, and improve the performance of the optical system. Complex surface optical components are of great significance to the development of modern optical systems, and are widely used in various types of optical imaging, optical detection, and photoelectric countermeasure systems. [0003] Optical surface shape measurement methods are divided into interferometry and profile scanning measurement. Compensation mirrors an...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 何玲平陈波刘世界
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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