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A Confocal Laser Measurement Method

A technology of laser measurement and measurement method, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of inconsistency and achieve the effect of measuring data

Active Publication Date: 2019-08-20
成都新成量工具有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, it is impossible to unify when measuring and tracing the source with a ball probe

Method used

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  • A Confocal Laser Measurement Method

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with accompanying drawing:

[0029] A confocal laser measurement method, the measurement method uses the confocal point to simulate the shape of the standard measurement ball head, the beam scans in layers along the spherical contour of the standard measurement ball head, from the inside to the outside, according to the concentric circles of different radii, etc. long measurements such as figure 1 As shown, a set of data is obtained: (x, y, d), and a three-dimensional graph is drawn;

[0030] Wherein, the light beam scans in layers along the spherical contour of the standard measuring ball head, and measures from the inside to the outside according to concentric circles with different radii and other step lengths to obtain a set of data: (x, y, d) specific The operation steps are:

[0031] S1. Set the value range of concentric circle radius r to [0, r max ], the origin coordinates (x, y) are set to ...

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Abstract

The invention discloses a con-focal laser measuring method. In the method, light beams are measured in equal step length along the ball head contact surface radius from the inner to the outer and according to the concentric circles of different radiuses. In this way, a group of data are obtained: (x,y, depth). Then, a three-dimensional simulation graph is drawn. According to the invention, through the use of the con-focal point to simulate the shape of a measuring ball head and through the adoption of ball surface contour line layered scanning method, a shape consistent with the standard measuring ball head can be formed to measure the surface of a workpiece so as to develop a measuring contact face completely consistent with the standard measuring ball head. The measuring method of the invention can be applied to a non-smooth surface and realizes consistency of measured data under the standards of baseline traceability.

Description

technical field [0001] The invention relates to the technical field of confocal laser measurement, in particular to a confocal laser measurement method. Background technique [0002] The existing confocal technology can only be applied to smooth surfaces, and when the measurement data is applied on a non-smooth surface, the data is not equal when compared with the traceable reference statically, so it brings reference traceability errors. The main reason is the influence of the roughness of the non-smooth surface. The diameter of the spot is too small, while the reference ball head is large. When the surface is not smooth, the data of the two forms a difference. The traditional probe is a ball head, usually ranging from 0.5-3mm. The contact surface is much larger than the confocal light spot during measurement. When measuring on a non-smooth surface, since the contact point of the ball head is a collection of surface peaks, the confocal The measurement spot is at U level, a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
Inventor 张晓岗吕守涛李凯谢永强
Owner 成都新成量工具有限公司
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