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A two-degree-of-freedom piezoelectric drive device and its excitation method

A technology of piezoelectric drive and degree of freedom, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problems of small travel and high cost, and achieve low cost, Easy processing and assembly, high precision effect

Active Publication Date: 2019-11-08
HARBIN INST OF TECH
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Problems solved by technology

[0004] In order to solve the technical problems of high cost and small stroke of the existing two-degree-of-freedom piezoelectric drive device, the present invention proposes a two-degree-of-freedom piezoelectric drive device and its excitation method

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  • A two-degree-of-freedom piezoelectric drive device and its excitation method
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  • A two-degree-of-freedom piezoelectric drive device and its excitation method

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Embodiment Construction

[0042] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0043] Combine Figure 1-Figure 10 The present invention proposes a two-degree-of-freedom piezoelectric driving device, which includes four groups of piezoelectric beams 1, a driving foot base 2, a driving foot 3, and a base body 4; the four groups of piezoelectric beams 1 include piezoelectric beams 1 -6. Piezoelectric beam two 1-5, piezoelectric beam three 1-4 and piezoelectric beam four 1-3; and the four groups of piezoelectric beams 1 have the sa...

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Abstract

The invention provides a two-degree-of-freedom piezoelectric driving device and an excitation method thereof, and belongs to the field of piezoelectric driving. The two-degree-of-freedom piezoelectricdriving device comprises four groups of identical piezoelectric beams, a substrate, a driving foot base and a driving foot. The two-degree-of-freedom piezoelectric driving device is simple in structure, and easy to manufacture. Each piezoelectric beam comprises two piezoelectric ceramic pieces and a metal baseplate. When a voltage excitation signal is applied to the piezoelectric beams, bending motion of the piezoelectric beams along the thickness direction can be realized. Through design of the voltage excitation signal for the four groups of piezoelectric beams, the direction and time sequence of the bending motion of the piezoelectric beams are controlled, and the driving foot is excited to realize two-degree-of-freedom swinging. Furthermore, friction force is taken as driving force for driving a mover to realize two-degree-of-freedom motion. The two-degree-of-freedom piezoelectric driving device provided by the invention has the advantages of simple structure, low cost, high displacement resolution and large stroke, and has wide application prospects in the fields of ultra-precision driving, positioning and the like.

Description

Technical field [0001] The invention belongs to the technical field of piezoelectric driving, and particularly relates to a two-degree-of-freedom piezoelectric driving device and an excitation method thereof. Background technique [0002] In recent years, two-degree-of-freedom precision drive devices have played an increasingly important role in the fields of biomedicine, optical scanning, and high-precision intelligent processing. They are required to have high displacement resolution, simple structure, and large stroke characteristics. Piezoelectric drive technology uses the inverse piezoelectric effect to convert electrical energy into mechanical energy to achieve the drive purpose. This technology has the advantages of high accuracy, immunity to electromagnetic interference, and fast response; the two-degree-of-freedom piezoelectric drive device using piezoelectric drive technology has output displacement The advantages of high resolution, simple structure, and easy realizati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00H02N2/02H02N2/10
CPCH02N2/0015H02N2/0055H02N2/0075H02N2/0095H02N2/028H02N2/108
Inventor 刘英想邓杰陈维山刘军考
Owner HARBIN INST OF TECH
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