High-speed precise laser drilling platform and control method thereof

A laser drilling and precision technology, applied in laser welding equipment, manufacturing tools, welding equipment, etc., can solve the problems of small flexible hinge travel and difficult precise control, so as to ensure working performance, fatigue life, and eliminate design and manufacturing errors Effect
CN110253160AActive Publication Date: 2019-09-20FOSHAN HUADAO SUPER PRECISION TECH CO LTD
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
FOSHAN HUADAO SUPER PRECISION TECH CO LTD
Publication Date
2019-09-20

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Abstract

The invention relates to a high-speed precise laser drilling platform and a control method thereof. The high-speed precise laser drilling platform comprises a macro XY motion platform, a micro XY motion platform and a working sucker, wherein the micro XY motion platform is arranged on the macro XY motion platform, the micro XY motion platform comprises a supporting base, a connecting frame, a micro-bearing platform, an X-axis flexible hinge piece and a Y-axis flexible hinge piece, the two ends of the X-axis flexible hinge piece are correspondingly fixed on the connecting frame and the supporting base, the two ends of the Y-axis flexible hinge piece are correspondingly fixed on the connecting frame and the micro-bearing platform, the micro-bearing platform is further provided with a micro X-axis encoder and a micro Y-axis encoder which are used for measuring the motion information of the micro-bearing platform in the X / Y direction respectively, and the working sucker is installed on the micro-bearing platform of the micro XY motion platform. According to the high-speed precise laser drilling platform and the control method thereof, high-speed interpolation is realized by means of elastic deformation of flexible hinges, and high-speed precise positioning among holes is realized.
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Description

technical field

[0001] The present invention relates to the technical field of laser drilling platforms, and more specifically, to a high-speed and precise laser drilling platform and a control method thereof. Background technique

[0002] The motion platform of the existing laser microhole array processing equipment mainly adopts the mechanical guide rail type linear motor platform, which can only process 2-3 holes per second due to the influence of friction. Foreign countries use cross ball guide rail platforms, which have low friction and can reach 10 holes per second, but the price is expensive, and the efficiency is still far below the technological limit of hundreds of holes per second. The main movement of laser microhole array processing is high-speed precision positioning between hole centers + high-speed precision interpolation movement of microholes. If the interpolation movement adopts a frictionless flexible hinge mechanism, an interpolation frequency of tens o...

Claims

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