A kind of substrate and its preparation method, display device

A substrate and hydroxyl technology, applied in the manufacture of semiconductor/solid-state devices, semiconductor devices, electrical components, etc., can solve the problems of disconnection and affect the display effect of the display device, so as to increase the etching time, improve the display effect, and improve the disconnection. Effect
CN110797303BActive Publication Date: 2022-05-06BOE TECH GRP CO LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BOE TECH GRP CO LTD
Publication Date
2022-05-06

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Abstract

Embodiments of the present invention provide a substrate, a manufacturing method thereof, and a display device. In the field of display technology, the slope angle of the second via hole can be reduced to improve the display effect of the display device. A method for preparing a substrate, comprising: sequentially forming a first flat film and a second flat film on a substrate, the hardness of the first flat film is greater than that of the second flat film; The second planar film and the first planar film are etched to obtain a first planar layer and a second planar layer sequentially disposed on the substrate; the first planar layer includes a first via hole, and the first planar layer includes The second planar layer includes a second via hole, at least part of the orthographic projection of the second via hole on the substrate overlaps with the orthographic projection of the first via hole on the substrate.
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Description

technical field

[0001] The invention relates to the field of display technology, in particular to a substrate, a preparation method thereof, and a display device. Background technique

[0002] With the rapid development of display technology, in order to bring better experience to users, display devices such as mobile phones are also constantly updated and iterated.

[0003] The display device includes a plurality of conductive film layers, an insulating layer is arranged between the plurality of conductive film layers, and some conductive film layers need to be electrically connected through via holes on the insulating layer. If the slope angle of the via holes is large (85°~ 90°), the conductive film layer passing through the via hole is easily disconnected in the via hole, thereby affecting the display effect of the display device. Contents of the invention

[0004] Embodiments of the present invention provide a substrate, a manufacturing method thereof, and a display ...

Claims

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