Evaporation source of vacuum evaporation equipment

Abstract

The invention discloses an evaporation source of a vacuum evaporation equipment. The evaporation source of the vacuum evaporation equipment comprises a crucible and a heating part, and the heating part is evenly arranged on the outer periphery of the crucible; the crucible is arranged on the side upper part of an evaporation source body, and a small hole is formed in the bottom of the crucible; aflow guiding beam is arranged between the small hole in the bottom of the crucible and an evaporation part; and one end of the flow guiding beam is arranged on the evaporation part, and the other endof the flow guiding beam penetrates through the small hole in the bottom of the crucible and extends into the crucible. According to the evaporation source of the vacuum evaporation equipment, since an evaporation raw material is gradually transported along the flow guiding beam in a liquid state, and the evaporation raw material is quickly evaporated when reaching the evaporation part, so that the component deviation caused by heating and evaporating all the raw materials at the same time is reduced. Meanwhile, the evaporation source has low requirements on the shape of the evaporation raw material, and the evaporation raw material does not need to be prepared into special shapes such as powder or filiform, so that the cost of raw materials is reduced.

Description

technical field

[0001] The invention belongs to the technical field of vacuum deposition, and in particular relates to an evaporation source of vacuum evaporation equipment. Background technique

[0002] Vacuum evaporation, referred to as evaporation, refers to the process of evaporating and vaporizing the coating material (or film material) by using a certain heating and evaporation method under vacuum conditions, and the particles fly to the surface of the substrate to condense into a film. Evaporation is an earlier and widely used gas phase deposition technology, which has the advantages of simple film forming method, high film purity and compactness, unique film structure and performance, etc.

[0003] Vacuum evaporation is the key technology of vacuum evaporation, nano-material preparation and other processes, and the evaporation source is the core component of vacuum evaporation equipment. The evaporation raw material is heated in the evaporation source and evaporated...

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