A kind of laser and its manufacturing method

A laser and confinement layer technology, applied in lasers, laser parts, semiconductor lasers, etc., can solve the problems of laser COMD failure, laser cavity easily interfered by reflected light, etc., achieve high COMD current threshold, be beneficial to heat dissipation performance, good The effect of reliability

Active Publication Date: 2021-10-29
DOGAIN LASER TECH (SUZHOU) CO LTD
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Problems solved by technology

For a high-power semiconductor laser with a ridge waveguide structure, although the output power of the laser can be increased by increasing the waveguide width, the increase in the waveguide width will cause an increase in the number of waveguide modes. A laser cavity with a high number of waveguide modes is more susceptible to interference from reflected light, making the laser more prone to COMD failure

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  • A kind of laser and its manufacturing method
  • A kind of laser and its manufacturing method
  • A kind of laser and its manufacturing method

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Embodiment Construction

[0029] The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.

[0030] In the description of the present application, the terms "first", "second" and the like are only used for distinguishing descriptions, and do not represent sequence numbers, nor can they be understood as indicating or implying relative importance.

[0031] In the description of the present application, the terms "horizontal", "vertical", "hanging" and the like do not mean that the components are required to be absolutely horizontal or hang, but may be slightly inclined. For example, "horizontal" only means that its direction is more horizontal than "vertical", and it does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0032] In the description of the present application, the orientation or positional relationship indicated by the terms "upper", "low...

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Abstract

An embodiment of the present application provides a laser and a manufacturing method thereof. The laser includes: a substrate on which a first confinement layer, a quantum well, and a second confinement layer are sequentially arranged from bottom to top; a ridge formation layer, Set on the second confinement layer, the ridge-forming layer includes a plurality of waveguide structures distributed in an array; an ohmic contact layer, set on the upper surface of the ridge region of the ridge-forming layer; an insulating layer , disposed on the side of the ridge region of the ridge-forming layer and the groove region of the ridge-forming layer; and a metal layer, disposed on the ohmic contact layer and the insulating layer. The present application realizes increasing the COMD current threshold of the laser without reducing the output optical power of the laser.

Description

technical field [0001] The present application relates to the technical field of semiconductors, in particular, to a laser and a manufacturing method thereof. Background technique [0002] High-power semiconductor lasers have the advantages of small size, high efficiency, and easy integration, and have been widely used in ranging, lighting, printing, material processing, mechanical processing, and medical and health fields. Catastrophic optical mirror damage (Catastrophic optical mirror damage, COMD) is a major failure mode of high-power lasers. Increasing the COMD current threshold can effectively improve the output optical power and reliability of semiconductor lasers. [0003] The failure of COMD is mainly caused by the thermal effect caused by the absorption of laser light by the end of the chip, and the disturbance caused by the reflected light entering the laser cavity will increase the probability of COMD failure. For a high-power semiconductor laser with a ridge wav...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/223H01S5/024H01S5/34
CPCH01S5/02461H01S5/223H01S5/34
Inventor 杨国文唐松赵卫东
Owner DOGAIN LASER TECH (SUZHOU) CO LTD
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