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Aerial camera focusing device and method based on Shack-Hartmann wavefront sensing

An aerial camera and focus detection technology, which is used in measurement devices, optical radiation measurement, instruments, etc., can solve the problems of limited focus detection accuracy, high requirements for installation and adjustment accuracy, and large image space, etc., and is conducive to the miniaturization of the structure. , Improve focus detection accuracy, solve the effect of compact image space

Active Publication Date: 2022-04-08
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In the field of focus detection of lithography machines, the patent application No. 201410479415.1 discloses a focus detection method based on the Hartmann wavefront detection principle, which is used to detect the position of the silicon wafer in the lithography machine system in real time. The focus detection system includes a light source and collimator beam expander system, front lens group, tested silicon wafer, rear lens group, microlens array and CCD detector. Poor; the patent application with application number 201910426968.3 discloses a large field of view image clearing device and method based on a focal plane Hartmann wavefront sensor. The measurement device described in the method includes a beam splitter, a focal plane Hartmann wavefront The sensor, image acquisition device and image processing module, the spectroscope divides the target information into two, and receives them respectively through the imaging detector and the Hartmann wavefront sensor, and restores each field of view through the information detected by the Hartmann wavefront sensor The wavefront information of the imaging detector is used to clear the image collected by the imaging detector through the image processing method. The application describes the characteristics of the aerial image in the background technology, but does not point out the specific implementation method of this method in the aerial camera. , according to the description of the solution in the patent application, the measurement device is arranged in the image space of the imaging lens, which requires the size of the image space of the aerial camera optical system to be large enough, and the application does not indicate how effective the solution is, and the timeliness is important for the aerial image Focusing is critical
[0005] In summary, the existing self-collimation focus detection method for aerial cameras needs to occupy a large image space of the optical system, and cannot achieve full-aperture detection of the optical system, and the focus detection accuracy is limited; the existing detection method based on the Hartmann sensor The measuring device of the focus method is relatively complicated, and has not been applied in the field of focus detection of aerial cameras.

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  • Aerial camera focusing device and method based on Shack-Hartmann wavefront sensing
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  • Aerial camera focusing device and method based on Shack-Hartmann wavefront sensing

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Embodiment 1

[0028] According to the imaging principle of geometric optics, the light emitted by a point light source on the focal plane will become a parallel beam after passing through the telescopic objective lens optical system, while the light emitted by a point light source on other image plane positions will no longer be parallel after passing through the optical system The Shack-Hartmann S-H (Shack-Hartmann) sensor can measure the wavefront quality of the incident light wave through the microlens array. When the incident light is parallel light (plane wavefront), the imaging spot of the microlens array in the specific area of ​​the detector The position is in a regular state of symmetrical distribution, and when the incident beam is no longer parallel, this regular state will be broken. By measuring the change of the spot position, the offset between the incident beam and the ideal parallel beam can be accurately restored, Shaker-Hart Mann sensors have a large number of applications...

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Abstract

The invention provides an aerial camera focusing device and method based on Shack-Hartmann wavefront sensing, which can realize the focal plane detection within the full aperture range of the optical system without introducing additional measuring elements, In addition, the installation position of the Shaker-Hartmann wavefront sensor and the control accuracy of the scanning mirror are not high, which is especially suitable for the aerial imaging environment. The Shaker-Hartmann wavefront sensor is placed in front of the entrance pupil of the optical system of the aerial camera, such as above the scanning mirror, which is conducive to the miniaturization of the structure of the aerial camera, and can also solve the problem of the compact image space of the optical system of the aerial camera, using traditional optoelectronics. The problem that the auto-collimation focusing method cannot put the focusing grating, the light source assembly and the photoelectric receiving device at the same time.

Description

technical field [0001] The invention belongs to the technical field of aerial camera testing and imaging, and in particular relates to an aerial camera focusing device and method based on Shack-Hartmann wavefront sensing. Background technique [0002] Aerial cameras will be affected by the natural environment (such as atmosphere, temperature, terrain) and the flight attitude of the carrier aircraft during the working process, causing the position of the photosensitive surface of the imaging detector to deviate from the ideal image plane, seriously affecting the clarity and resolution of the image. Therefore, in order to obtain high-definition images, it is necessary to check and adjust the focus before the aerial camera imaging. [0003] The commonly used focusing method for aerial cameras is the photoelectric self-collimation method. In this method, a Ronchi grating is placed on the image plane and illuminated by a light source. The path is returned and imaged on the recei...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J9/00
CPCG01J9/00
Inventor 刘学吉张洪文于春风陈志超远国勤
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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