A 10nm class liquid helium-free ultra-low temperature vibration damping system

Abstract

The invention relates to a 10nm-level liquid helium-free extremely low-temperature vibration reduction system, which includes a vibration-isolation foundation I, a vibration-isolation foundation II, an external circulation pipeline system, an internal circulation pipeline system, a refrigerator and a vacuum cavity. There is a gap between the vibration isolation foundation I and the vibration isolation foundation II; a support frame is provided on the vibration isolation foundation I, and the top flange of the vacuum chamber is fixed on the support frame; the top flange of the vacuum chamber is connected with the vacuum chamber, The vacuum chamber is equipped with a first-level cold screen; the first-level cold screen is equipped with a second-level cold screen, and the second-level cold screen is equipped with a regenerative heat exchanger, a helium pool, and a load test platform connected together; the vibration isolation foundation The refrigerating machine supporting frame is arranged on the Ⅱ, and the refrigerating machine mounting flange is fixed on the refrigerating machine supporting frame; The secondary cold screen is connected; the external circulation pipeline system is connected with the internal circulation pipeline system and the refrigerator. The invention can effectively reduce the vibration of the internal and external environments and meet the test requirements.

Description

technical field [0001] The invention relates to the field of 10nm level vibration extremely low temperature physical property measurement, in particular to a 10nm level liquid helium-free extremely low temperature vibration damping system. Background technique [0002] With the continuous development of science and technology, the demand for detection or testing of material properties is becoming stronger and stronger, especially in the extremely low temperature environment below 4.2K. [0003] At this stage, there are mainly two low-temperature refrigeration technologies that can achieve a low temperature below 4.2K. One is a system that decompresses and evacuates liquid helium as the working medium. Although the low-temperature system does not bring its own low-temperature vibration during operation, the operation and maintenance It is more complex and wastes helium resources more seriously; another is a liquid helium-free cryogenic system that uses a GM refrigerator or a ...

AI Technical Summary

Problems solved by technology

[0003] At this stage, there are mainly two low-temperature refrigeration technologies that can achieve a low temperature below 4.2K. One is a system that decompresses and evacuates liquid helium as the working medium. Although the low-temperature system does not bring its own low-temperature vibration during operation, the operation and maintenance It is more complex and wastes helium resources more seriously; another is a liquid helium-free cryogenic system that uses a GM refrigerator or a pulse tube refrigerator as a cold source. This system does not consume liquid helium during operation, and It is more convenient to operate and use in the later stage, and it has attracted more and more attention from researchers. However, the system uses a GM refrigerator or a pulse tube refrigerator as a cold source, and there is the influence of the vibration of the refrigerator itself during operation. For low-temperature system vibration Highly demanding systems, such as atomic force high-vacuum material friction measurement, laser target testing, etc. are difficult to adapt

[0004] At present, the vibration reduction of the ultra-low temperature system below 4.2K is mainly processed at the cold head of the refrigerator as the cold source, and the method of adding a flexible cold-conducting belt is used to achieve the purpose of vibration reduction, but this method does not apply to the entire low-temperature system. Analysis on the system can only reduce the vibration at the sample of the system to the micron level, which cannot meet the requirements of nano-level low-temperature vibration testing

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