Silicon sludge resource recycling device

Abstract

A silicon sludge resource recycling device comprises a feeding device, an inner furnace body, an outer furnace body, a discharging device and an exhaust device, the feeding device is provided with a feeding device and connected with one side of the outer furnace body, the inner furnace body is provided with a heating device and a rotating device and internally provided with a main heating chamber, and the outer furnace body is arranged outside the inner furnace body and internally provided with a heat insulation layer. A secondary combustion chamber is formed between the outer furnace body and the inner furnace body, a heating device is arranged, an exhaust hole penetrating through the secondary combustion chamber is formed in the upper end of the outer furnace body, the discharging device is connected with the other side of the inner furnace body, and the exhaust device is connected with the exhaust hole of the outer furnace body. The inner furnace body is rotated and heated by the aid of the rotating device and the heating device, so that impurities in solid substances in the silicon sludge to be treated are thermally cracked into gaseous substances, the impurities and steam generated by heating are induced to the secondary combustion chamber to be reheated, the gaseous impurities are combusted to meet regulatory standards and then are discharged by the exhaust device, and treated silicon powder is discharged by the discharging device. Therefore, the effect of reducing the resource recycling cost is achieved.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon mud waste resource recovery, and particularly refers to a new design of a silicon mud resource recovery device, which can not only achieve continuous and rapid removal of moisture and impurities in silicon mud, but also has the effect of reducing resource recovery costs. Background Art

[0002] Semiconductor or solar wafer factories cut and grind silicon ingots into silicon wafers of a certain thickness, which is a known standard process. In the process of cutting and grinding silicon ingots into silicon wafers, the cutting step uses cutting fluid to remove the silicon shavings generated during cutting or grinding, forming a slurry of waste silicon mud with extremely high turbidity. The current treatment method for waste silicon mud is to treat it in the same way as general waste, or to incinerate it with heavy oil and then bury it. However, the aforementioned treatment method is expensive, and the carbon dioxide generated during the incineration process and the oil sludge after burying will have a great impact on the environment. Furthermore, the main component of silicon wafers is silicon or silicon dioxide, and the waste silicon mud generated by the cutting or grinding process of semiconductor or solar wafer factories, as mentioned above, is mostly concentrated by wastewater treatment and entrusted to a cleaning and treatment agency for burial treatment. Burial treatment is easy to cause pollution to the environment, and the waste silicon mud contains a large amount of silicon or silicon dioxide, which is valuable, and direct burial is extremely wasteful of resources.

[0003] Taking the previous patents on silicon mud processing equipment as an example, the Chinese Taiwan Patent Announcement No. M548691 "Silicon Mud Recycling Equipment" discloses a silicon mud recycling equipment, which is mainly provided with a melting device, a door body is provided on one wall of the melting device, a graphite crucible is provided in the melting device, a valve is provided below the graphite crucible, a discharge port is provided at the bottom of the melting device, and the discharge port is aligned with the valve, a slag removal unit is provided above the graphite crucible in the melting device, and the slag removal unit can be extended into the graphite crucible to perform slag removal, and a material trough is provided on one side of the melting device. A hopper is provided on the trough, a conveying device is provided in the trough, the conveying device is connected to the upper part of the melting device, a feed port is provided at the lower part of the conveying device, a discharge port is provided at the upper part of the conveying device, the discharge port is located above the graphite crucible, a high-frequency heating device is provided on the other side of the melting device, a storage tank is provided below the melting device, a material taking port is provided on the storage tank, and a door body is provided on the material taking port, so that the dry silicon mud is melted by the device to form a metallic silicon product for use as raw material for aluminum smelting or steelmaking (reference to the patent announcement of Taiwan, China on September 11, 2017). Taiwan, China Patent Announcement No. M540867 "Silicon Mud Drying Treatment Device Suitable for Separating Oil and Gas from Silicon Mud and Recycling" discloses a silicon mud drying treatment device suitable for separating oil and gas from silicon mud and recycling it, which includes a shell, a microwave unit, a heat exchange unit and a carrier gas supply unit. The shell has a chamber, and the silicon mud is placed in the chamber. The microwave unit is disposed on the chamber and has a plurality of microwave heaters to perform microwave heating treatment on the silicon mud to separate the oil and gas from the silicon mud. The heat exchange unit is connected to one side of the chamber to receive and condense the oil and gas. The carrier gas supply unit is connected to the other side of the chamber to supply the carrier gas to the chamber. The carrier gas brings the oil and gas from the chamber to the heat exchange unit, so that the oil and gas are condensed into a liquid oil agent in the heat exchange unit (reference to the patent announcement of Taiwan, China on May 1, 2017).Taiwan Patent Publication No. IM527002 "Waste Silicon Mud Drying Treatment Equipment" discloses a waste silicon mud drying treatment equipment, which is provided with a vacuum furnace, a feeding hopper is provided on the vacuum furnace, an upper valve and a lower valve are provided in the feeding hopper, a feeding port is provided at the bottom of the vacuum furnace, a feeding port is provided at the feeding port, an upper valve and a lower valve are provided in the feeding seat, an oil collecting tank is provided at the bottom of the vacuum furnace, a vacuum pump is provided on the vacuum furnace, a microwave heating device is provided on the outer wall of the vacuum furnace, and a plurality of microwave heating units are provided at equal intervals, a conveying device is provided inside the vacuum furnace, and the conveying device is provided with a conveying belt, the conveying belt is flexible, and a plurality of bearing grooves are provided on the conveying belt, and the conveying belt is driven by at least two transmission shafts, and an oil collecting device is connected to the vacuum furnace. In this way, the waste silicon mud is dried by vacuum microwave drying, which can greatly shorten the drying time and achieve the best drying effect (reference to the Taiwan Patent Publication on August 11, 2016).

[0004] Waste silicon mud generated by the cutting or grinding process in semiconductor or solar wafer factories consists of liquid (such as alcohols, water) and solid (such as silicon, chemical abrasives, etc.). The above-mentioned previous cases cannot continuously and quickly remove moisture and impurities in silicon mud, and cannot effectively reduce the cost of silicon mud resource recovery. Landfill treatment is easy to pollute the environment, and waste silicon mud contains a large amount of silicon or silicon dioxide. Direct burial is extremely wasteful of resources. The above-mentioned lack of known silicon mud resource recovery technology has become a problem that the industry needs to overcome urgently. Utility Model Content

[0005] In view of the lack of known technologies, the creator of this case has accumulated his professional knowledge in the design and manufacture of scientific and technological industrial products such as precision ceramics, biotechnology and environmental protection for many years. After continuous research and improvement, he finally successfully developed this utility model and made it public.

[0006] The main purpose of the utility model is to provide a silicon mud resource recovery device, which mainly includes:

[0007] A feeding device, the feeding device having a feeding device to feed silicon mud into the inner furnace body;

[0008] The inner furnace body is made of heat-conducting metal and has a hollow main heating chamber inside. One side of the inner furnace body is connected to the aforementioned feeding device. The inner furnace body has a heating device to heat the main heating chamber and a rotating device to rotate the inner furnace body.

[0009] The outer furnace body is arranged outside the inner furnace body, the outer furnace body has a heat-insulating layer inside, and a secondary combustion chamber is formed between the outer furnace body and the inner furnace body, the secondary combustion chamber is provided with a heating device, and the upper end of the outer furnace body has an exhaust hole penetrating the secondary combustion chamber;

[0010] A discharge device connected to the other side of the inner furnace body to deliver the silicon powder that has been thermally cracked out of the inner furnace body;

[0011] An exhaust device connected to the exhaust hole of the outer furnace body to treat the input gas to meet the emission regulations and standards before discharging it;

[0012] The aforementioned feeding device delivers the silicon mud to be processed into the main heating chamber of the inner furnace body, rotates the inner furnace body by means of the rotating device, and heats the inner furnace body by means of the heating device of the inner furnace body, so that chemical abrasives and other impurities in the solid matter in the silicon mud to be processed are thermally cracked into gaseous state, and the water vapor formed by the heated liquid moisture in the silicon mud to be processed is induced into the secondary combustion chamber, and then the gaseous chemical abrasives and other impurities are burned to meet the regulatory standards by means of the heating device of the secondary combustion chamber, and then discharged from the exhaust device, while the processed silicon powder is delivered out of the inner furnace body by the discharging device, thereby enabling the silicon mud resource recovery device to continuously and quickly remove moisture and impurities in the silicon mud, and since the secondary combustion chamber is located at the outer edge of the inner furnace body, the heat of the main heating chamber of the inner furnace body can be transferred to the secondary combustion chamber, which can effectively reduce the power of the heating device of the secondary combustion chamber, thereby having the effect of reducing the resource recovery cost.

[0013] The feeding device of the aforementioned feeding device in the utility model is a spiral feeding device, so as to continuously and evenly feed the untreated silicon mud into the inner furnace body.

[0014] The aforementioned discharging device in the utility model is a spiral discharging device, which can continuously and evenly deliver the processed silicon powder out of the inner furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a front cross-sectional view of the silicon mud resource recovery device of the utility model;

[0016] Figure 2 This is a cross-sectional view of the upper end of the silicon mud resource recovery device of the utility model;

[0017] Figure 3 This is a side view of the silicon mud resource recovery device of the utility model;

[0018] Figure 4 This is a cross-sectional view showing the implementation state of the silicon mud resource recovery device of the utility model;

[0019] Figure 5 It is a cross-sectional schematic diagram of the silicon mud resource recovery device of the utility model.

[0020] Explanation of symbols in the accompanying drawings:

[0021] 1: feeding device;

[0022] 10: feeding device;

[0023] 2: Inner furnace body;

[0024] 20: main heating chamber;

[0025] 21: heating device;

[0026] 22: Rotating device;

[0027] 3: outer furnace body;

[0028] 30: thermal insulation layer;

[0029] 31: secondary combustion chamber;

[0030] 32: heating device;

[0031] 33: exhaust hole;

[0032] 4: discharging device;

[0033] 5: Exhaust device;

[0034] A: Silica mud;

[0035] B: displacement direction of silicon mud;

[0036] C: water vapor direction;

[0037] D: airflow induction direction;

[0038] E: Appropriate angle. DETAILED DESCRIPTION

[0039] In order to achieve the technical means for the aforementioned purpose of the present utility model, an embodiment is listed herewith and illustrated as follows, so as to obtain a better understanding of the structure, features and effects achieved by the present utility model.

[0040] The silicon mud resource recovery device of the utility model is aimed at the waste silicon mud (hereinafter referred to as silicon mud) generated by the cutting or grinding process of semiconductor or solar wafer factories, which is composed of liquid substances (such as alcohols and water) and solid substances (such as silicon, chemical abrasives, etc.). The utility model heats the liquid substances (such as alcohols and water) in the silicon mud into gaseous state for discharge, thermally decomposes the impurities such as chemical abrasives in the solid substances (such as silicon, chemical abrasives, etc.) into gaseous state for discharge, and recovers silicon powder.

[0041] See also Figure 1 The front cross-sectional view of the silicon mud resource recovery device of the utility model is shown, Figure 2 The upper end cross-sectional view of the silicon mud resource recovery device of the utility model is shown, Figure 3 The side view of the silicon mud resource recovery device of the utility model is shown and Figure 4The cross-sectional view of the implementation state of the silicon mud resource recovery device of the utility model is shown. As can be seen from the figure, the silicon mud resource recovery device of the utility model mainly includes:

[0042] The material feeding device 1 has a feeding device 10 for feeding silicon mud A into the inner furnace body 2.

[0043] The inner furnace body 2 is made of heat-conducting metal and has a hollow main heating chamber 20 (see also Figure 5 The cross-sectional schematic diagram of the silicon mud resource recovery device of the utility model is shown in FIG. 1 ), one side of the inner furnace body 2 is connected to the aforementioned feeding device 1, and the inner furnace body 2 has a heating device 21 to heat the main heating chamber 20 (see FIG. 1 ). Figure 3 , 4 ), and also has a rotating device 22 (see Figure 1 ) to rotate the inner furnace body 2, and the rotation of the inner furnace body 2 can evenly heat the silicon mud.

[0044] The outer furnace body 3 is arranged outside the inner furnace body 2. The outer furnace body 3 has a heat insulation layer 30 inside, and a secondary combustion chamber 31 is formed between the outer furnace body 3 and the inner furnace body 2. The secondary combustion chamber 31 is provided with a heating device 32. The upper end of the outer furnace body 3 has an exhaust hole 33 that passes through the secondary combustion chamber 31. The inner furnace body 2 and the outer furnace body 3 are tilted downward from the feeding device 1 to the discharging device 4 at an appropriate angle E, so as to facilitate the inner furnace body 2 to rotate and discharge more smoothly (please refer to Figure 1 ).

[0045] The discharging device 4 is connected to the other side of the inner furnace body 2 to deliver the silicon powder A after thermal cracking out of the inner furnace body 2 .

[0046] The exhaust device 5 is connected to the exhaust hole 33 of the outer furnace body to treat the input gas to meet the emission regulations and standards before discharging it.

[0047] The aforementioned feeding device 1 feeds the silicon mud to be processed into the main heating chamber 20 of the inner furnace body 2, and the inner furnace body 2 is rotated by the rotating device 22, and the inner furnace body heating device 21 heats the inner furnace body 2, so that the impurities such as chemical abrasives in the solid matter of the silicon mud to be processed are thermally cracked into gaseous ( Figure 4As shown, B is the displacement direction of silicon mud, C is the direction of water vapor, and D is the direction of air flow induction), the liquid water in the silicon mud to be treated is heated into water vapor and induced to the secondary combustion chamber 31, and then the gaseous chemical abrasives and other impurities are burned to meet the regulatory standards by the heating device 32 of the secondary combustion chamber 31 and discharged from the exhaust device 5, and the treated silicon powder is sent out of the inner furnace body 2 by the discharge device 4. In this way, the silicon mud resource recovery device has the ability to continuously and quickly remove moisture and impurities in the silicon mud, and because the secondary combustion chamber 31 is located outside the inner furnace body 2, the heat of the main heating chamber 20 of the inner furnace body 2 can be transferred to the secondary combustion chamber 31, which can effectively reduce the power of the heating device 32 of the secondary combustion chamber 31, thereby reducing the cost of resource recovery.

[0048] The feeding device 10 of the aforementioned feeding device 1 of the present invention is a spiral feeding device, which is used to continuously and evenly feed the untreated silicon mud into the inner furnace body.

[0049] The discharging device 4 of the present invention is a spiral discharging device, which can continuously and evenly deliver the processed silicon powder out of the inner furnace body.

[0050] The above is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. Any equivalent structural changes made by a person familiar with the art using the present invention specification and the scope of the patent application should be included in the patent scope of the present invention.

Claims

1. A silicon mud resource recovery device, characterized in that: Mainly include: A feeding device, the feeding device having a feeding device to feed silicon mud into the inner furnace body; The inner furnace body is made of heat-conducting metal and has a hollow main heating chamber inside. One side of the inner furnace body is connected to the aforementioned feeding device. The inner furnace body has a heating device to heat the main heating chamber and a rotating device to rotate the inner furnace body. The outer furnace body is arranged outside the inner furnace body, the outer furnace body has a heat-insulating layer inside, and a secondary combustion chamber is formed between the outer furnace body and the inner furnace body, the secondary combustion chamber is provided with a heating device, and the upper end of the outer furnace body has an exhaust hole penetrating the secondary combustion chamber; A discharge device connected to the other side of the inner furnace body to deliver the silicon powder that has been thermally cracked out of the inner furnace body; An exhaust device connected to the exhaust hole of the outer furnace body to treat the input gas to meet the emission regulations and standards before discharging it; The aforementioned feeding device delivers the silicon mud to be processed into the main heating chamber of the inner furnace body, and the inner furnace body is rotated by the rotating device, and the heating device of the inner furnace body heats the inner furnace body, so that the impurities in the solid matter in the silicon mud to be processed are thermally cracked into gaseous state, and the water vapor generated by the heated liquid moisture in the silicon mud to be processed is induced into the secondary combustion chamber, and then the gaseous impurities are burned to meet the regulatory standards by the heating device of the secondary combustion chamber and discharged from the exhaust device, and the processed silicon powder is delivered out of the inner furnace body by the discharging device.

2. The silicon mud resource recovery device according to claim 1, characterized in that: The feeding device of the feeding device is a spiral feeding device, which can continuously and evenly feed the untreated silicon mud into the inner furnace body.

3. The silicon mud resource recovery device according to claim 1, characterized in that: The discharging device is a spiral discharging device, which can continuously and evenly deliver the processed silicon powder out of the inner furnace body.

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