Vacuum inner film coating machine and using method thereof

Abstract

This invention relates to a vacuum internal film-plating machine used in small spherical or cup devices and its application method including a vacuumizing system set with an air pipe connected with a pump controlling the vacuum system and an electric system controlling the valve, said vacuum system is connected with an evaporation system via the pipe, which includes a supply switch and resistance evaporation source composed of a vacuum cavity, a base with a pump-nozzle and tungsten filament for evaporation, in which, Mo positive and negative are fixed on the base, one end of the filament is fixed on the Mo positive and the other end is fixed on the negative and both electrodes pass the base to connect with the supply switch by lead.

Description

Technical field: [0001] The invention relates to an inner coating machine, in particular to a vacuum inner coating machine for spherical or cup-shaped small devices and its application method. Background technique: [0002] Due to the complex structure and bulky appearance of the current general vacuum inner coating machine, the cost of the machine is very high, and because these vacuum inner coating machines have many operating steps, and the time to complete the inner coating is long, the production efficiency is low. In mass production, the production capacity will be insufficient. Generally, the operation steps of the vacuum internal coating machine are: first turn on the diffusion pump to heat for 1.5 to 2 hours, then turn on the rough pump to start the air extraction process, and then turn on the Roots pump, followed by Open the rough pumping valve and the fine pumping valve, and then start the evaporation process. After the evaporation is completed, rotate the workpie...

AI Technical Summary

Problems solved by technology

[0002] Due to the complex structure and bulky appearance of the current general vacuum inner coating machine, the cost of the machine is very high, and because these vacuum inner coating machines have many operating steps, and the time to complete the inner coating is long, the production efficiency is low. In mass production, the production capacity will be insufficient. Generally, the operation steps of the vacuum internal coating machine are: first turn on the diffusion pump to heat for 1.5 to 2 hours, then turn on the rough pump to start the air extraction process, and then turn on the Roots pump, followed by Open the rough pumping valve and the fine pumping valve, and then start the evaporation process. After the evaporation is completed, rotate the workpiece, take out the workpiece that has been coated, and then continue the deflation process

[0003] The general vacuum internal coating machine needs to turn on the diffusion pump to heat for 1.5 to 2 hours, and then turn on the rough pump, Roots pump and other operations in turn. The operation steps are cumbersome and the working cycle is relatively long. The maintenance pump and the diffusion pump must be turned on all the time, which wastes electric energy and is prone to dangerous accidents

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