109results about How to "Fast pumping" patented technology

Integrated circuits, the key components in thousands of electronic and computer products, are generally built layer by layer on a silicon substrate. One common layer-formation technique, known as chemical-vapor deposition (CVD), produces uneven layers and covers vertical surfaces poorly. An emergent technique, atomic-layer deposition, overcomes these shortcomings, but has others, such as slow deposition rates and longer than desirable cycle times, particularly as applied to deposition of aluminum oxide. Accordingly, the inventors devised unique atomic-layer deposition systems, methods, and apparatus suitable for aluminum-oxide deposition. One exemplary system includes an outer chamber, a substrate holder, and a gas-distribution fixture that engages or cooperates with the substrate holder to form an inner chamber within the outer chamber. The inner chamber has a smaller volume than the outer chamber, which ultimately requires less time to fill and purge and thus promises to reduce cycle times for deposition of materials, such as aluminum oxide.

Integrated circuits, the key components in thousands of electronic and computer products, are generally built layer by layer on a silicon substrate. One common technique for forming layers is called chemical-vapor deposition (CVD.) Conventional CVD systems not only form layers that have non-uniform thickness, but also have large chambers that make the CVD process wasteful and slow. Accordingly, the inventor devised new CVD systems, methods, and apparatuses. One exemplary CVD system includes an outer chamber, a substrate holder, and a unique gas-distribution fixture. The fixture includes a gas-distribution surface having holes for dispensing a gas and a gas-confinement member that engages or cooperates with the substrate holder to form an inner chamber within the outer chamber. The inner chamber has a smaller volume than the outer chamber, which not only facilitates depositions of more uniform thickness, but also saves gas and speeds up the deposition process.

The present inventors devised unique atomic-layer deposition systems, methods, and apparatus suitable for aluminum-oxide deposition. One exemplary method entails providing an outer chamber enclosing a substrate, forming an inner chamber within the outer chamber, and introducing an oxidant into the inner chamber, and introducing an aluminum precursor into the inner chamber. The inner chamber has a smaller volume than the outer chamber, which ultimately requires less time to fill and purge and thus promises to reduce cycle times for deposition of materials, such as aluminum oxide.

The invention relates to a steam sterilizing process for the disinfection of medical appliances in hospital, and the steam sterilizer employing the steam sterilizing process, which comprises the steps of vacuumizing, preheating, sterilizing and cooling down. The steam sterilizer comprises a steam sterilizing box, a valve group, an air filter, a steam generator, a vacuum pump and an automatic control system.

The invention discloses a system and a method for checking the gas tightness of a soft package battery. According to the technical scheme, the checking method comprises the steps of (1) arranging a standard cavity and a to-be-checked sample, and placing the to-be-checked sample in a seal cavity; (2) performing a positive pressure amplification stage: amplifying the amount of gas discharged from aleakage hole of the soft package battery, and applying a pressure to a working cavity; (3) ending the positive pressure amplification stage, and immediately applying the negative pressure to the working cavity; (4) performing a negative pressure inflation stage: keeping that the standard cavity and the working cavity achieve the set negative pressure at the same time, and separating the cavities to ensure that the pressure in each cavity tends to be stable; and (5) performing a checkout stage: if leakage exists in the soft package battery, overflowing the gas through the leakage hole under thepressure of -10 to -99Kpa, increasing the pressure in the working cavity continuously, comparing the pressure of the working cavity with the pressure of the standard cavity, and calculating a leakageamount through a micro-difference sensor.

The invention discloses a mixed vacuum pump system comprising a vacuum chamber, wherein the outlet of a gas cooling and dust removing device is divided into two paths; one path is communicated with a steam jet (and water ring) type vacuum pump system through a third gas suction pipeline and is provided with a second vacuum shutdown valve; the other path is communicated with a mechanical vacuum pump system through a second gas suction pipeline and is provided with a first vacuum shutdown valve; a second exhaust pipeline of the steam jet (and water ring) type vacuum pump system and a first exhaust pipeline of the mechanical vacuum pump system extend out of a workshop after being converged in front of a flowmeter and passing through a third exhaust pipeline; the first exhaust pipeline is provided with a first gas check valve; the second exhaust pipeline is provided with a second gas check valve. The steam jet (and water ring) type vacuum pump system is combined with the mechanical vacuum pump system in an external refining treatment process of molten steel, so that the requirement of an external refining process is sufficiently met, and meanwhile, the requirements for high efficiency and energy saving are met.

The invention discloses a water-vapor mixing system of a super pressing and suction combined pumping system and a working method thereof. The water-vapor mixing system includes a pumping device and anair supply device, the pumping device includes a water outlet pipe and a vacuum pump, one end of the water outlet pipe communicates to the vacuum pump, the other end of the water outlet pipe penetrates through a sealed manhole cover on a precipitation well to reach the bottom of the precipitation well, the air supply device includes an air supply pipe and an air compressor, one end of the air supply pipe is in communication with the air compressor, and the other end of the air supply pipe penetrates through the sealed manhole cover on the precipitation well to reach the bottom of the precipitation well and communicates with the lower portion of the water outlet pipe. According to the water-vapor mixing system, air is pressed in through the air compressor, a water column in the water outlet pipe bears upward rising force, a water-vapor mixture is formed to reduce the specific gravity of the rising water column in the water outlet pipe, and the purpose of rapid pumping is achieved. Thewater-vapor mixing system has the advantages that the water-vapor mixing system greatly breaks through the height limit of the water column pumped by the vacuum pump, pressing and suction are combinedto speed up the pumping efficiency, and the equipment cost is saved.

The invention discloses an evacuating device. It is used to evacuate tanks, cavities, etc., wherein a mechanical vacuum booster pump is provided on the upstream side of an external vacuum pump; wherein the mechanical booster pump has vent holes for discharging low-compressed gases and vent holes for discharging high-compressed gases Exhaust holes; wherein, when the external vacuum pump starts to discharge gas, the gas is sent to the external vacuum pump through all the vent holes for discharging low-compression gas and for discharging high-compression gas, when the pressure of the discharged gas is subsequently reached by the external vacuum pump At final pressure (medium vacuum), the gas is only delivered to the external vacuum pump through the vent hole for discharging highly compressed gas.

A novel Chinese stewing pot device comprises a stewing pot body. The stewing pot body comprises a drum body at the upper portion and a pot bottom connected with the bottom of the drum body, an upper interlayer and a lower interlayer are arranged in the drum body and the pot bottom respectively, an upper interlayer cover is arranged in the upper interlayer, a lower interlayer cover is arranged in the lower interlayer, and steam pipelines are arranged in the upper interlayer cover and the lower interlayer cover. An upper circulating port is formed in the upper portion of the drum body, a stewing tray support is arranged on the inner side of the bottom of the drum body in the annular direction, and a plurality of layers of stewing trays are arranged on the stewing tray support. Stacked-up stewing tray frames form a drum shape from top to bottom, namely a stewing tray vertical drum. The stewing tray support seals the position between the bottom of the outer wall of the stewing tray vertical drum and the bottom of the inner wall of the drum body, and an annular cavity with the upper side open is formed by the outer wall of the stewing tray vertical drum, the inner wall of the drum body and the stewing tray support located at the bottom. The novel Chinese stewing pot device can ensure that materials stewed and boiled in the drum body are heated uniformly and the cooking degree and taste of the stewed and boiled materials are identical, control stewing temperature and progress accurately, and utilize internal space to increase the processing amount to the maximum extent.

The invention discloses a deep sea water pressure energy power generation device, relates to the field of machinery, and mainly relates to a device which for converting deep sea pressure energy into mechanical energy and utilizing the generated mechanical energy to generate power. The device comprises a hydraulic energy motor, a normal pressure converter and a power generator, wherein the normal pressure converter is connected with the hydraulic energy motor through a pipeline; and the power generator is connected with the kinetic energy output end of the hydraulic energy motor. The deep sea water pressure energy and wave energy in the natural world are fully utilized by the device, any pollution can not caused; and the device is positioned in the deep sea, i.e., the normal pressure converter utilizing the wave energy is positioned in the deep sea, the working device can not be damaged because of the changes of the waves, and great loss is avoided.

The invention discloses an automatic stop controller and an air pump using the automatic stop controller. The air pump comprises a housing, a blower device, a microswitch and an automatic stop controller. The automatic stop controller comprises an outer housing, a moving part, a gear part, a swinging part, a moving ejector rob, a deformable air pressure sensing thin film and a knob, wherein the air pressure sensing thin film deforms to enable the moving ejector rob to move by using the change of the air pressure, the swinging part is enabled to swing due to the movement of the moving ejector rob, the gear part is enabled to rotate due to the swinging of the swinging part, the moving part is enabled to move due to the rotation of the gear part, and the microswitch is triggered due to the movement of the moving part, so that the aim of automatic stop can be realized. The invention further has the inventive step and the use convenience, the product has the characteristics of being intelligent and humanized, and reasonable in structural configuration, the structure of the product can be preferably simplified, each parts in the product is convenient to manufacture and assemble, and the effects of production efficiency improving and production cost reducing can be achieved.

The invention discloses an accurate PEG (polyethylene glycol) liquid pumping device which comprises a vehicle body, a liquid storage tank, a liquid conveying pump and a liquid outgoing pipeline. Traveling wheels are mounted at the bottom of the vehicle body, a controller is mounted on one side of the vehicle body, the liquid storage tank is arranged on the vehicle body, the liquid conveying pump is mounted at the bottom of one end of the liquid storage tank, a liquid outgoing end of the liquid conveying pump is connected with the liquid outgoing pipeline, a flowmeter is arranged on the liquid outgoing pipeline, and the controller is in communication connection with both the flowmeter and the liquid conveying pump. By accurate feedback of the flowmeter and automatic control of the controller, manual intervention in the process of operation can be reduced, multiple pumping vehicles can be operated by one person simultaneously, and working efficiency and metering accuracy are high. The automatic controller can effectively avoid artificial operation errors. In addition, the accurate PEG liquid pumping device is compact in overall structure and convenient in moving on a working site.

The invention discloses a super-hydrophilic copper-based MOF photo-thermal fabric, a preparation method and application thereof, and belongs to the technical field of photo-thermal material preparation. The preparation method comprises the following steps: carrying out plasma etching treatment and deposition treatment by taking a polymer fabric film as a substrate to prepare a copper-coated polymer fabric film; and carrying out Cu(OH)2 nanowire growth treatment on the obtained copper-coated polymer fabric film, and then carrying out hydrothermal treatment to prepare the super-hydrophilic copper-based MOF photo-thermal material. According to the invention, the super-hydrophilic copper-based MOF photo-thermal material has excellent super-hydrophilicity and ultrahigh evaporation efficiency due to a unique metal organic porous carbon skeleton structure, so that a brand new photo-thermal conversion material is provided for a solar-driven interface seawater desalination technology; and the preparation process is simple, large-scale production can be achieved, and the preparation method can be well applied to the field of preparation and application of portable solar evaporators.

The invention discloses a multifunctional wardrobe. The multifunctional wardrobe comprises a cabinet body, wherein a semi-open clothes placing chamber and a shoe placing chamber are arranged on the cabinet body, two sides of the inner wall of the clothes placing chamber are provided with elevators, a clothes hanging rod is arranged between the elevators, a clothes hanger is arranged on the clotheshanging rod, a drying device is arranged in the clothes placing chamber, a shoe drying device is arranged in the shoe placing chamber, an air extraction channel is arranged in the cabinet body, the clothes placing chamber and the shoe placing chamber are communicated with the outside of the cabinet body through the air extraction channel, the air outlet end of the air extraction channel is communicated with air extraction equipment, room doors are movable arranged outside the clothes placing chamber and the shoe placing chamber, the movable position of the room door is provided with a travelswitch which is respectively communicated with the drying device and the circuit of the shoe drying device; as to achieve the purposes that the use of a user can be more integrated, and dry clothes and dry shoes can be taken out of the wardrobe without excessive movement.

The invention discloses a vacuumizing system. The vacuumizing system is used for vacuumizing a vacuum chamber and comprises a backing pump, a main pump, a pre-pumping valve and a main valve, wherein the main valve is provided with an inlet, a pre-pumping port and an outlet; the inlet of the main valve communicates with a vacuumizing port of the vacuum chamber; the pre-pumping port of the main valve communicated with an inlet of the pre-pumping valve; the outlet of the main valve communicates with an extraction opening of the main pump; and an extraction opening of the backing pump simultaneously and directly communicates with an exhaust port of the main pump and an outlet of the pre-pumping valve through a tee coupling. Through the vacuumizing system, the vacuum chamber can reach the required vacuum degree in a quite short time.

The invention discloses an axial magnetic fluid dynamic seal structure. The axial magnetic fluid dynamic seal structure is characterized in that a shaft is arranged in a hollow shell; at least three permanent magnets are fixed between the excircle of the shaft and the inner wall of the shell in parallel; two sides of each permanent magnet are each provided with a pole shoe; a flow choking piece is only arranged at the center of the inner circular surface of at least one of two adjacent pole shoes of the permanent magnet in the middle position, and a first preset gap is formed between the flow choking piece and the shaft; first sealing elements are only arranged on the outer circular surfaces of the two pole shoes on the outermost side in the plurality of pole shoes; a magnetic fluid accommodating sealed space is formed between the pole teeth and the shaft, and a second preset gap is formed between each pole tooth and the shaft; magnetism isolating pieces are fixed to the axial outer sides of the two pole shoes on the outermost side in the plurality of pole shoes correspondingly; end covers are arranged at two ends of the hollow shell correspondingly; second sealing elements are arranged between the end covers and the shaft in a covering manner; and when the shell is vacuumized, the magnetic fluid accommodating sealed space is filled with a magnetic fluid, so that sealing is formed between the shaft and the pole teeth, and the first preset gap is smaller than the second preset gap.

The invention discloses a road surface accumulated water cleaning device and a road surface accumulated water cleaning vehicle, belongs to the technical field of municipal environmental sanitation, and aims to solve the problems of low road surface accumulated water cleaning efficiency and poor effect in the prior art. The road surface accumulated water cleaning device comprises a water diversion mechanism, a water pumping mechanism, a water storage mechanism, an adjusting mechanism and a sweeping mechanism, the water diversion mechanism is used for guiding road surface accumulated water to the water pumping mechanism, the water pumping mechanism is connected with the water storage mechanism, and the adjusting mechanism is arranged below the water pumping mechanism and used for adjusting the height of the water pumping opening of the water pumping mechanism. The sweeping mechanism is arranged behind the water pumping mechanism and used for sweeping and pumping ground water which cannot be pumped by the water pumping mechanism; the device is simple in structure, convenient to use and capable of rapidly cleaning accumulated water on the pavement. Meanwhile, the invention provides a road surface accumulated water cleaning vehicle applying the road surface accumulated water cleaning device.

A self-coupling type through-flow submersible electric pump comprises a through-flow submersible electric pump body, a concrete separation pier and a retention wall. The retention wall is provided with guide rail assemblies extending in the same direction as the retention wall, an embedded pipe is arranged on the bottom of the retention wall, and the concrete separation pier is arranged vertical to the bottom end of the retention wall. The through-flow submersible electric pump body is provided with a guide rod assembly. Locating frames are symmetrically arranged on the two sides of the embedded pipe, and a guiding suspension part is arranged at the tail end of each locating frame. A trapezoid cloth-inserted O-shaped rubber seal ring is arranged on the flange surface of the water outlet end of the through-flow submersible electric pump body. The tail ends of the two guide rail assemblies are located on the top of the integrated body formed by the locating frames, the guiding suspension parts and the embedded pipe. The self-coupling type through-flow submersible electric pump has the advantages that the stability of self-coupling sealing is improved, it can be fast completed to lift and wash the pump and prevent the pump from being rusted during the operation interval period when water taking stops, and operation management can be reinforced to improve the adaptability and the reliability and prolong the service life.

The invention discloses a conveying device used between mask body making and welding processes. The conveying device comprises a mask body and a conveying mechanism, wherein the conveying mechanism isarranged between a mask body making machine used for the body making process and an ear band welding machine used for the welding process; the conveying mechanism comprises a primary turning part forturning the mask body from a horizontal direction to a vertical direction; the primary turning part is connected to a selection part; the selection part is connected to secondary turning parts for turning the mask body from the vertical direction to the horizontal direction; each secondary turning part is connected to a belt mechanism; the selection part comprises a connecting flat tube; the connecting flat tube is connected to a connecting soft flat tube; the connecting soft flat tube is connected to a selection flat tube; the selection flat tube is connected to a steering engine; the connecting flat tube is provided with an in-tube mask driving mechanism; and the in-tube mask driving mechanism comprises driving rollers and a driving motor. By means of the arrangement, the mask body dispensed from one mask body making machine can be simultaneously conveyed into a plurality of ear band welding machines, so that the production efficiency of a mask is greatly improved.

The invention discloses a spring external type perfume pump structure. The spring external type perfume pump structure comprises a pump body which extends into a bottle body, wherein a pump chamber isarranged on the pump body; a suction assembly is arranged in the pump chamber; a locking cover is connected to the pump body, and an aluminum oxide bayonet is connected to the locking cover; the lower end of the pump chamber is provided with a one-way valve; the upper end of the suction assembly is connected with a pressing part; the suction assembly comprises an upper pump rod, wherein a main spring is arranged between the upper pump rod and the locking cover; the upper pump rod is provided with a liquid inlet, and the upper pump rod is connected with a lower pump rod; the outer side of theupper pump rod is sleeved with a suction plug; an auxiliary spring is arranged between the upper pump rod and the suction plug; and a liquid inlet channel capable of communicating the pump chamber below the lower pump rod and the liquid inlet is formed between the lower pump rod and the suction plug. The spring external type perfume pump structure is simple in structure, adopts the spring externalstructure, avoids direct contact between the spring and the liquid in the pump chamber, and caused liquid pollution is prevented; and the main spring is arranged between the upper pump rod and the locking cover, the auxiliary spring is further arranged between the upper pump rod and the suction plug, and the double-spring structure is adopted, so that the pumping speed is high.

An engagement system (10) for a fluid-coupling device (9) may include a first engagement member (31) and a second engagement member (15) that is in operation with the first engagement member (31). A working chamber (33) is disposed between and at least partially defined by the first engagement member (31) and the second engagement member (15). The working chamber (33) has an inlet port (118) and an outlet port (120). A fluid reservoir (35) is fluidically-coupled to the working chamber (33). A scavenge valve (11) is coupled between the working chamber (33) and the fluid reservoir (35) and adjusts the fluid flow through the outlet port (120). An engagement system (10) for a fluid-coupling device (9) may in addition to or alternatively include a working chamber (33) that includes a working chamber inlet port (118) that is along an outer perimeter (126) of the first engagement member (31). A valve (11) is coupled between the working chamber (33) and the fluid reservoir (35) and adjusts the fluid flow through the working chamber inlet port (118).

The invention discloses a movable grain elevator. The grain elevator is characterized in that the interior of a bracket is provided with a motor, a vacuum bin is arranged on the motor and is fixedly arranged in the bracket, the bottom of the bracket is provided with wheels, a grain suction port of the vacuum bin is provided with a suction pipe, the other end of the suction pipe is provided with a suction cylinder, a handle and a control switch are respectively arranged above the suction cylinder, the other end of the suction cylinder is provided with a suction head, a grain outlet is connected with a grain outlet pipe, the right side of the bracket is provided with a cart handrail, and the bottom of the bracket is provided with a power distribution box. By adopting the structure, the grain can be quickly sucked to the designated location, so a large amount of labor is saved, and the efficiency is doubled.

The invention relates to the technical field of daily chemical products, and discloses a pump head, a pump core with the pump head and a palm pressure type building block pump tank with the pump core. The pump head comprises a pump shell, a material pumping assembly is arranged in the pump shell, the material pumping assembly comprises a material pumping cavity located in the pump shell and communicating with an external structure used for containing materials in a one-way manner, a piston body in sliding sealing fit with the inner circumferential wall of the material pumping cavity and a gland located at the outer side of the material pumping cavity and driving the piston body to slide in the material pumping cavity, and an inlet and an outlet of the material pumping cavity are arranged in an opposite manner. According to the pump head, the inlet and the outlet of the material pumping cavity are arranged in an opposite manner so that the materials entering the material pumping cavity from the inlet can be directly pumped out from the outlet, the material pumping cavity does not need to be filled with the materials, and the pumping speed is increased.

The invention relates to an intermittent microwave vacuum laundry drying device. The device comprises a vacuum drying sealed cavity, a vacuum pump, an air pumping pipe, a central control unit and a microwave generation device, wherein the vacuum pump is connected to the vacuum drying sealed cavity through the air pumping pipe having an air pumping valve, and an air exhaust hole having an air exhaust valve is formed in the vacuum drying sealed cavity. An intermittent microwave vacuum laundry drying method includes the following specific steps that the inner cavity of the vacuum drying sealed cavity filled with to-be-dried laundry is evacuated to vacuum, and the microwave generation device is used for moderately heating as an assistant; when the water on the to-be-dried laundry is fully boiled, the air pumping valve and the microwave generation device are closed; the air exhaust valve is opened, and the dry air from the outside enters into the inner cavity of the vacuum drying sealed cavity, the air humidity in the inner cavity of the vacuum drying sealed cavity is neutralized, and after completion in a short time, the air exhaust valve is closed again. The device and the method canprovide a low-cost, high-efficiency and low-energy drying solution for a microwave vacuum drying apparatus which processes high concentration moisture.

The invention relates to an emptying device of a cool fan submersible pump and a control method, the device comprises a machine body and a water circulating system which is arranged in the machine body, the water circulating system is provided with a submersible pump which is electrically connected with an electronic control board, the electric control board is provided with an emptying program which controls the submersible pump to work intermittently, and air in the submersible pump is rapidly expelled under the control of the emptying program. The control method is as follows: after each power-off, when the machine is started again, the submersible pump is energized and works for 1-30 seconds and then stops working for 1-30 seconds, and then after repeating 2-10 times, the submersible pump works continuously. The control program which is set in the electronic control board can control the submersible pump to work intermittently, and after repeating power-on and power-off for several times, the air in the submersible pump can be rapidly expelled within 10 seconds. The emptying device has the advantages of having simple and reasonable structure, working safely, pumping water rapidly, having low cost and high efficiency and saving energy.

The invention relates to a potential-deprived hydropower cogeneration method and device used in the fields of seawater desalination, sewage treatment, new energy power, ship driving and other fields: in a hydropower cogeneration device of vacuum pressure steam distillation, normal temperature seawater is cooled to 0 The potential of seawater released at ℃ is the main water production energy. The steam compressor is used to compress the steam and force the seawater to continuously evaporate. The suction force of the water pump is used to draw and force the steam to exchange heat with the seawater to be steamed. The operating heat of the water pump and motor is The magnetron cools and heats the seawater to be steamed. The flow energy of the waste water is used to generate electricity and is heated by microwave to promote evaporation, so that normal temperature distillation is automatically converted into thermal distillation. The energy accumulated by continuously depriving seawater of its own potential is used to drive the steam turbine to generate electricity with high-temperature and high-pressure steam. Output power, break through the cost bottleneck of seawater desalination, realize oil-free high-speed driving of ships, obtain cheap, environmentally friendly and highly effective power output, and solve problems such as power shortage and energy shortage.

The invention discloses a rear-stage pump control system and control method for a vacuum system. The rear-stage pump control system comprises a vacuum chamber, a rear-stage pump, a front-stage pump, an electric control valve, a vacuum sensor and a control unit, wherein a gas pumping port of the rear-stage pump communicates with the vacuum chamber, and a gas exhausting port of the rear-stage pump communicates with a gas pumping port of the front-stage pump through the electric control valve; and a signal input interface of the control unit is connected with the vacuum sensor and a built-in temperature sensor of the rear-stage pump, and a control output interface of the control unit is connected with a front-stage pump controller, a rear-stage pump controller and an input interface of an electric control valve controller. According to the rear-stage pump control system and control method for the vacuum system, by arranging the control unit, the front-stage pump and the rear-stage pump can be controlled to be started / stopped in real time conveniently, the rotating speed of the rear-stage pump can be adjusted conveniently, the vacuum degree of the vacuum chamber and the working temperature of the rear-stage pump are measured in time, the pumping speed of the rear-stage pump can be adjusted conveniently, the service life of the rear-stage pump is guaranteed, the working stability ofthe rear-stage pump is guaranteed, and power consumption is reduced; and the whole vacuum system has the advantages of being small in size and high in pumping speed, integration of the whole vacuum system is facilitated, and compared with a front-stage pump peripheral mode, the gas circuit structure is simplified.

The present invention proposes an evacuation apparatus including a mechanical booster pump 5 , a back pump 3 placed at a down-stream side of the mechanical booster pump in series, the booster pump 5 having discharge openings 27 a and 27 b for discharging a low compression gas and a discharge opening 29 for discharging a high compression gas, and, in a stage where gas-discharging is started, the gas is discharged toward the ambient side through the discharge opening 29 for discharging a high compression gas with the operation of the mechanical booster pump and, in a stage where the discharged gas pressure reaches afterward a medium vacuum, the back pump starts operation and the gas is sent to the back pump through the discharge openings 27 a and 27 b for discharging a low compression gas.

This invention relates to a vacuum internal film-plating machine used in small spherical or cup devices and its application method including a vacuumizing system set with an air pipe connected with a pump controlling the vacuum system and an electric system controlling the valve, said vacuum system is connected with an evaporation system via the pipe, which includes a supply switch and resistance evaporation source composed of a vacuum cavity, a base with a pump-nozzle and tungsten filament for evaporation, in which, Mo positive and negative are fixed on the base, one end of the filament is fixed on the Mo positive and the other end is fixed on the negative and both electrodes pass the base to connect with the supply switch by lead.