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A high-bonding high-light-absorption AlN-based composite coating, a preparation method and application thereof

The application provides a high-bonding high-light-absorption AlN-based composite coating and a preparation method and application thereof. The composite coating comprises a bottom dense support layer and a top loose light-absorption layer, and the two layers are homomorphous. The preparation method comprises the following steps: adopting an arc ion locking technology to deposit the bottom dense support layer on an ion etching activated metal base, the bottom dense support layer has a first columnar crystal structure with dense arrangement; and then adopting a high-power pulse magnetron sputtering technology to deposit the top loose light-absorption layer on the bottom dense support layer, the top loose light-absorption layer has a second columnar crystal structure with loose arrangement. The composite coating provided by the application has high light-absorption anti-reflection performance and excellent high-temperature oxidation resistance in a wide wave band, the bonding force with the metal base reaches 28 N, the scratch resistance is strong, the chemical stability is high, and the preparation method is simple.
Owner:NINGBO INST OF MATERIALS TECH & ENG CHINESE ACAD OF SCI