Use of a rolling-element bearing for bearing rotating components in vacuum devices and vacuum device
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- OERLIKON LEYBOLD VACUUM
- Publication Date
- 2013-09-04
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The present invention relates to the use of rolling element bearings for supporting rotating parts in vacuum installations and to such vacuum installations. Background technique
[0002] Vacuum devices such as vacuum pumps include a pumping element arranged in a suction chamber. For example, pumping elements are Rhodes pistons, screw rotors, etc. Typically, the pumping elements are each supported by a rotating shaft. Each shaft is usually supported by two bearing arrangements. The bearing arrangement usually comprises grease lubricated rolling element bearings. Use any rolling element bearings in vacuum pumps only if the pressure is not lower than 10 -3 It is beneficial in millibar (mbar) applications.
[0003] Therefore, rotating parts, especially the rotor shaft, are usually supported by grease-lubricated rolling element bearings. In this regard, according to the prevailing opinion of experts, the rolling bearing elements must be arranged so th...