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Use of a rolling-element bearing for bearing rotating components in vacuum devices and vacuum device

A technology of vacuum equipment and rolling elements, which can be used in parts of pumping devices for elastic fluids, rotating parts against centrifugal force, bearings, etc., and can solve the problems of expensive magnetic suspension bearings

Inactive Publication Date: 2011-06-22
OERLIKON LEYBOLD VACUUM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the magnetic levitation bearing is an expensive component, and additionally, it must be combined with a safety bearing in order to guarantee emergency operability in case of failure

Method used

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  • Use of a rolling-element bearing for bearing rotating components in vacuum devices and vacuum device
  • Use of a rolling-element bearing for bearing rotating components in vacuum devices and vacuum device
  • Use of a rolling-element bearing for bearing rotating components in vacuum devices and vacuum device

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Embodiment Construction

[0033] Such as figure 1 Illustrated, in a first embodiment of the rolling element bearing, rolling elements 10 in the form of balls are arranged between an inner bearing element or inner bearing race 12 and an outer bearing element or outer bearing race 14 . The rolling elements 10 are held by a cage 16 . On both sides 18 , 20 respectively delimiting the vacuum section, corresponding sealing elements 22 , 24 are provided. The two sealing elements 22, 24 delimit between them a bearing space 26, which accommodates the rolling elements 10 and is filled with a lubricating oil, such as grease. The two sealing elements 22 , 24 , which in the illustrated embodiment are crank-shaped, are fixedly connected to the outer bearing race by a retaining element, such as a safety ring 28 .

[0034]The sealing elements are designed such that they have a distance s from the inner bearing race 12 , wherein the gap width or the distance s of the sealing element 22 and the sealing element 24 can ...

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Abstract

A rolling-element bearing for bearing rotating components in vacuum devices comprises a plurality of rolling elements (10) arranged between bearing elements (12, 14). A bearing compartment (26) is for example closed by sealing elements (22, 24) on both sides. Said sealing elements (22, 24) have a minor sealing gap (s). The rolling-elements bearing according to the invention are used in vacuum sections in which a pressure of less than 10-3 mbar prevails.

Description

technical field [0001] The present invention relates to the use of rolling element bearings for supporting rotating parts in vacuum installations and to such vacuum installations. Background technique [0002] Vacuum devices such as vacuum pumps include a pumping element arranged in a suction chamber. For example, pumping elements are Rhodes pistons, screw rotors, etc. Typically, the pumping elements are each supported by a rotating shaft. Each shaft is usually supported by two bearing arrangements. The bearing arrangement usually comprises grease lubricated rolling element bearings. Use any rolling element bearings in vacuum pumps only if the pressure is not lower than 10 -3 It is beneficial in millibar (mbar) applications. [0003] Therefore, rotating parts, especially the rotor shaft, are usually supported by grease-lubricated rolling element bearings. In this regard, according to the prevailing opinion of experts, the rolling bearing elements must be arranged so th...

Claims

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Application Information

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IPC IPC(8): F01C21/02F04C25/02F04D17/16F04D19/04F04D29/059
CPCF16C33/80F16C33/7846F16C33/78F01C21/02F04D29/059F04C25/02F04D19/042F04D17/168F16C33/782F16C2300/62F16C2360/45F16C2240/46
Inventor 拉尔夫·阿达米茨赖纳·赫尔策马库斯·亨利
Owner OERLIKON LEYBOLD VACUUM
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