Coolant-cooled linear motor

A technology of linear motors and electric motors, applied in the direction of electric components, cooling/ventilation devices, electrical components, etc., can solve problems such as heat increase, achieve the effects of suppressing temperature rise, avoiding cooling efficiency decline, and improving performance and thrust density

Inactive Publication Date: 2011-07-27
YASKAWA DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This results in increased heat generation in the armature

Method used

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  • Coolant-cooled linear motor
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  • Coolant-cooled linear motor

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0059] figure 1 is a perspective view showing a coolant-cooled linear motor according to a first embodiment of the present invention. exist figure 1 Among them, the reference numeral "1" indicates the armature, the reference numeral "2" indicates the base, the reference numeral "3" indicates the armature winding, the reference numeral "8" indicates the cooling jacket unit, and the reference numeral "15" denotes a field magnet unit, reference numeral "16" denotes a yoke, reference numeral "16a" denotes a yoke fixing plate, and reference numeral "17" denotes a field generating permanent magnet.

[0060] refer to figure 1 , the coolant-cooled linear motor includes an armature 1 (so-called flat-type linear motor armature) and a field magnet unit 15 . The armature 1 includes a base plate 2 , an armature winding 3 fixed to the base plate 2 , and a cooling jacket unit 8 arranged to surround the armature winding 3 . The field magnet unit 15 is arranged to surround the cooling jack...

no. 2 approach

[0073] image 3 is along figure 1 A sectional view taken along line III-III in , which shows an armature of a coolant-cooled linear motor according to a second embodiment of the present invention.

[0074] Each of the first to fourth cooling jackets 8a, 8b, 8c, and 8d has a coolant flow passage 11 defined therein. And, each of the first to fourth cooling jackets 8a, 8b, 8c, and 8d includes a first reinforcement member 12 provided on its own inner wall and a second reinforcement member 13 provided on its own outer wall. The first reinforcement part 12 is higher in thermal conductivity than the walls of the cooling jackets 8a, 8b, 8c and 8d. The second reinforcing member 13 is lower than the first reinforcing member 12 in thermal conductivity.

[0075] The first reinforcing member 12 and the second reinforcing member 13 are fixed to the cooling jackets 8a, 8b, 8c, and 8d by bonding or other fixing methods. Therefore, the first reinforcing member 12 is made of a material havi...

no. 3 approach

[0079] Figure 5 is an enlarged side sectional view showing the structure of fixing each of the first reinforcing members 12 to each of the first to fourth cooling jackets 8a, 8b, 8c, and 8d according to the third embodiment of the present invention , the cooling jacket 8a is representatively illustrated in this figure.

[0080] The third embodiment differs from the second embodiment in that each of the first reinforcement members 12 is provided with a flange portion 12a located at a peripheral portion of the reinforcement member, at a side opposite to the coolant flow passage 11. Sides are fixed to insert nuts 14a on the inner wall of the cooling jacket 8a and screws 14b are screwed to the corresponding nuts 14a through the flange portion 12a to fix each of the first reinforcement members 12 to the inner wall of the cooling jacket 8a. The outer walls of the first reinforcement member 12, the second reinforcement member 13, and the cooling jacket 8a are adhesively bonded to e...

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Abstract

The present invention discloses a coolant-cooled linear motor which includes an armature including armature windings and a cooling jacket arranged to surround the armature windings, the cooling jacket unit includes four cooling jackets defining four side faces parallel to the extension direction of the armature and two end blocks defining two opposite end faces in the extension direction of the armature, the cooling jackets and the end blocks being connected to one another in a box shape. Each of the cooling jackets has an internal space to be supplied with a coolant; and a field magnet unit includes a yoke made of a ferromagnetic material and permanent magnets arranged in the yoke, one of the armature and the field magnet unit making relative movement with respect to the other.

Description

technical field [0001] The invention relates to coolant cooled linear electric motors. Background technique [0002] Conventionally, there has been proposed a linear motor used in factory automation equipment to drive a stage of a semiconductor exposure apparatus or a liquid crystal exposure apparatus or a table of a feeding machine tool. In order to achieve improvements in speed and accuracy of feeding operations or handling operations, a linear motor includes a permanent magnet constituting a field magnet and an armature having an armature winding facing a pole surface of the permanent magnet in a magnetic space. [0003] An armature of a linear motor includes armature windings, a base plate for placing and fixing the armature windings in place, a frame for fixing the base plate in place, and a cover for sealing the frame. The frame includes large coolant channels formed in its central area. Armature windings are housed within this coolant tank. The side surface of the ...

Claims

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Application Information

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IPC IPC(8): H02K41/02H02K9/19
CPCH02K5/20H02K9/19H02K41/031H02K9/22H02K9/223H02K9/227H02K5/203
Inventor吉田秀作山岸俊幸渡边和也田边政彦
OwnerYASKAWA DENKI KK