Flat plate type totally-sealed low-temperature plasma excitation source

A low-temperature plasma, fully-sealed technology, applied in the direction of plasma, electrical components, etc., can solve the problems affecting the mechanism research and detection sensitivity of target components, unfavorable qualitative and quantitative analysis of target components, interference with characteristic excitation lines, etc. Achieve the effect of improving excitation efficiency, improving detection sensitivity, and increasing discharge area

Inactive Publication Date: 2012-01-18
QINGDAO JIAMING MEASUREMENT & CONTROL TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when working under large atmosphere conditions, the DBD excitation source excites the target components as well as the N in the air. 2 and O 2 (especially N 2 ), the resulting atmospheric background signal covers or interferes with the characteristic excitation lines of the target substance, thus affecting the mechanism research and detection sensitivity of the target component
Additionally ionized atmospheric N 2 and O 2 It will also generate a large number of highly active free radicals, resulting in plasma chemical reactions with the target components, which is also not conducive to the qualitative and quantitative analysis of the target components

Method used

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  • Flat plate type totally-sealed low-temperature plasma excitation source
  • Flat plate type totally-sealed low-temperature plasma excitation source
  • Flat plate type totally-sealed low-temperature plasma excitation source

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Embodiment Construction

[0011] figure 1 Among them, the flat-plate fully sealed low-temperature plasma excitation source is composed of an upper ceramic sheet 1, a lower ceramic sheet 2 and a peripheral side 3, and the upper ceramic sheet 1 and the lower ceramic sheet 2 are bonded together through the peripheral side 3 in parallel to form a The hollow discharge chamber 8, the upper ceramic sheet 1 and the lower ceramic sheet 2 are respectively pasted with tin foil 4 as discharge electrodes, and the surrounding side surfaces 3 are respectively provided with quartz windows 5, air inlets 6 and exhaust ports 7 (see figure 2 ).

[0012] The hollow discharge chamber 8 is in the shape of a cuboid, the quartz window 5 is attached to the front end of the surrounding side 3, the air inlet 6 is arranged on the rear end opposite to the quartz window 5, and the exhaust port 7 is arranged on the other side.

[0013] The working principle of the present invention is as follows: a flat-plate fully sealed low-tempe...

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Abstract

The invention provides a flat plate type totally-sealed low-temperature plasma excitation source based on a dielectric barrier discharge technology, wherein the flat plate type totally-sealed low-temperature plasma excitation source is both capable of eliminating air background interferences and improving the detection sensitivity of a target component. In a technical solution, the flat plate type totally-sealed low temperature plasma excitation source is characterized by being composed of upper ceramic pieces (1), lower ceramic pieces (2) and surrounding side faces (3); the upper ceramic pieces (1) and the lower ceramic pieces (2) are adhered in parallel through the surrounding side faces (3) to form a hollow discharge chamber (8); tin foil paper (4) is respectively adhered on the upper ceramic pieces (1) and the lower ceramic pieces (2) to be used as discharge electrodes; and quartz window pieces (5), air inlets (6) and exhaust ports (7) are respectively arranged on the surrounding side faces (3).

Description

technical field [0001] The invention belongs to the field of dielectric barrier discharge (Dielectric-Barrier Discharge, DBD) excitation source devices, in particular to a flat-plate fully-sealed low-temperature plasma excitation source that can not only eliminate air background interference, but also improve the detection sensitivity of target components . Background technique [0002] The low-temperature plasma excitation source based on the dielectric barrier discharge technology has the advantages of low operating temperature, low energy consumption, and small size, which is very beneficial to the miniaturization of the instrument. As the excitation source of atomic emission spectroscopy, this type of device has become a research hotspot in the analysis of environmental trace pollutants, especially the analysis of heavy metals. However, when working in a large atmosphere, the DBD excitation source not only excites the target components, but also excites N in the air. 2...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/24
Inventor 武中臣高心岗邢祥举曹勇赵东
Owner QINGDAO JIAMING MEASUREMENT & CONTROL TECH
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