Detachment device and detachment method

Abstract

Given an adhesive sheet (S) attached to a substrate (13), the disclosed detachment device (10) detaches a separator (11) from an adhesive layer (12). Said device is provided with: a table (15) that supports the substrate (13); a needle (16) that pierces the separator (11) from the top surface thereof; a support means (18) that moves the needle (16) to form a detachment-starting region (11A); and a suction pad (35) that applies suction to the separator (11). When forming the detachment-starting region (11A), the suction pad (35) applies suction to the separator (11), and then with the detachment-starting region (11A) formed, the suction pad (35) is rotated away from the substrate to detach the separator (11).

Description

technical field [0001] The present invention relates to a peeling device and a peeling method, in particular to a peeling method suitable for peeling off an adhesive sheet in which one surface of an adhesive layer is covered by a separator to an adherend. A peeling device and a peeling method for peeling the separator from the adhesive layer. Background technique [0002] It is well known that, in order to laminate plate-shaped or sheet-shaped workpieces such as organic EL substrates and display panels, adhesive sheets are sandwiched between these workpieces for bonding. [0003] As the adhesive sheet, for example, a substrate sheet in which an adhesive layer is sandwiched between a pair of film-like separators is used, and the exposed adhesive surface of one of the separators is first bonded to the workpiece. Then peel off the other release sheet to expose the adhesive surface, so that the workpiece can be bonded on the exposed adhesive surface. [0004] It is known that,...

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Problems solved by technology

[0005] However, the peeling device that uses the cellophane tape every time it is peeled has a disadvantage that the running cost increases and is uneconomical because the cellophane tape that must be disposed of must exist.

[0009] However, the peeling device described in Patent Document 1 has the problem that since the peeling is carried out while the needle is inserted into the protective film, the needle may be detached from the protective film due to deflection and deformation of the protective film during the peeling process. The film is pulled out, and the reliability of the peeling cannot be guaranteed

This problem will be more significant when the rigidity of the protective film is high, or when the protective film is extremely thin.

[0010] In addition, since the peeled protective film is in a state of hanging on the tip side of the needle, it must be actively separated.

Therefore, it is necessary to blow air on the surface of the protective film to remove the protective film from the needle, which causes the problem that the film is blown to an unintended direction.

[0011] Furthermore, since the needle is used until the final stage of the peeling operation, there is a problem that it takes a long time to transfer to the next peeling operation and the peeling efficiency is low.

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