Resistor top-mounted type micro-thruster and manufacturing method thereof

A micro-propulsion and top-mounted technology, which is applied in the field of micro-propulsion technology and micro-electromechanical systems, can solve the problems of MEMS process incompatibility, low fuel energy utilization rate, and unstable device performance, so as to improve the air flow mode and increase fuel energy. Effect of Utilization, Parameter Sensitivity Reduction

Inactive Publication Date: 2014-01-15
NORTHWESTERN POLYTECHNICAL UNIV
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Problems solved by technology

[0004] In order to overcome the shortcomings of low fuel energy utilization rate caused by nozzles in the existing resistive top-mounted micro-propulsion technology, unstable device performance due to difficult control of nozzle film thickness, and incompatibility with MEMS technology, the present invention proposes a nozzle with a laval-like structure. Micro thrusters with ignition resistors arranged around

Method used

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  • Resistor top-mounted type micro-thruster and manufacturing method thereof
  • Resistor top-mounted type micro-thruster and manufacturing method thereof
  • Resistor top-mounted type micro-thruster and manufacturing method thereof

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Embodiment Construction

[0031] In this embodiment, a resistive top-mounted micro-propeller as shown in Figure 2 is provided, the propeller includes an upper structure 1 with a thickness of 500 μm, and the material is monocrystalline silicon; an intermediate structure 2 with a thickness of 1000 μm, The material is monocrystalline silicon; the lower layer structure 3 with a thickness of 500 μm is made of heat-resistant glass; it is characterized in that: in the middle of the upper layer structure 1, there is a nozzle 4 of a laval structure with contraction in the middle and expansion at both ends, and the expansion at both ends of the nozzle 4 The largest part is a square of 500μm*500μm, and the smallest part of the middle contraction is a square of 150μm*150μm. The ignition resistor 7 with a thickness of 300nm is distributed around the nozzle, and the ignition resistor 7 is connected to the upper transfer electrode 6 with a thickness of 300nm; the ignition resistor 7 It consists of 6 ring-shaped resist...

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Abstract

The invention discloses a resistor top-mounted type micro-thruster and a manufacturing method of the resistor top-mounted type micro-thruster, and belongs to the field of micro-thrusting technologies and MEMSs. Ignition resistors 7 of the micro-thruster are respectively composed of multiple sets of resistance wires, the width of each resistance wire and the length of each resistance wire are design to form a certain proportion so that the combustion of fuel can be adjusted and full combustion of the fuel can be facilitated. A spray nozzle 4 is of a laval-like structure with the middle contracted and the two ends expanded, and therefore the flowing mode of the air flow can be improved, and the fuel energy utilization rate can be effectively improved. The ignition resistors 7 are placed on the periphery of the spray nozzle 4 and can not be easily damaged in the gunpowder filling process, the assembly process and other processes. According to a manufacturing method of the resistor top-mounted type micro-thruster, stability and consistency of device machining can be easily achieved, and the batch machining can be easily achieved.

Description

technical field [0001] The invention relates to a resistive top-mounted micro-propeller and a preparation method thereof, belonging to the fields of micro-propulsion technology and micro-electromechanical systems (MEMS). Background technique [0002] With the development of micro-electro-mechanical systems (MEMS), modern satellites are increasingly miniaturized and miniaturized, and micro-satellites, nano-satellites and pico-satellites have emerged. Micro-thrusters are power systems that meet the propulsion requirements of the above-mentioned micro-spacecraft, and are used for position maintenance, attitude control, orbit adjustment and maneuvering, and gravitational compensation of micro-spacecraft such as micro-satellites. [0003] At present, there are many types of micro-propulsion based on MEMS technology, among which the micro-propulsion similar to the sandwich structure with nozzle-combustion chamber-sealing layer is a research hotspot. This kind of propeller is divi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F02K9/95
Inventor 谢建兵郝永存李小平申强
Owner NORTHWESTERN POLYTECHNICAL UNIV
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