In-situ transport property measurement method

Abstract

The invention discloses an in-situ transport property measurement method. The in-situ transport property measurement method comprises the following steps: preparing a membrane-shaped structure on a substrate in a first vacuum environment; arranging an electrode on the surface away from the substrate, of the membrane-shaped structure, carrying out micro-cutting treatment on the surface away from the substrate, of the membrane-shaped structure, cutting a micro-cutting area, and locating the electrode in the micro-cutting area in a second vacuum environment; enabling a probe array to contact with the electrode, and carrying out measurement on transport property in a third vacuum environment, wherein the first vacuum environment, the second vacuum environment and the third vacuum environment are a continuous vacuum environment, the continuous vacuum environment means that the membrane-shaped structure directly enters the second vacuum environment from the first vacuum environment, and directly enters the third vacuum environment from the second vacuum environment, and the membrane-shaped structure is out of contact with air. The invention further relates to an in-situ transport property measurement device.

Description

technical field [0001] The invention relates to a method for measuring in-situ transport properties. Background technique [0002] Low-dimensional quantum matter is one of the richest research areas in physics. Two-dimensional electron gas at the semiconductor heterojunction interface, graphene, copper-based and iron-based superconductors, topological insulators, oxide interfaces, and transition metal chalcogenide layered materials all belong to this type of system. These systems show some of the most amazing quantum states in nature, involving major scientific issues in condensed matter physics, and are the key systems to reveal the most challenging problem of strong electron correlation in low-dimensional physics. They are likely to lead to future information, clean A type of system that has undergone major technological innovations or even revolutions such as energy, electric power, and precision measurement is currently the research focus of the world. The study of suc...

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Problems solved by technology

[0003] At present, the transportation test of low-dimensional materials still mainly stays in the ex-situ measurement, that is, the low-dimensional materials grown in the vacuum environment are taken out of the vacuum system, and then put into the test system for testing. The test system is based on the Quantum Design company. As a representative of the products, it can perform fine measurements at low temperature and magnetic field, but the ex-situ measurement will inevitably pollute the low-dimensional materials, making the measured transport properties not the most intrinsic properties of low-dimensional materials

[0004] In addition, in the prior art, the probes are generally used to directly contact the low-dimensional materials to measure the transport properties. The structure of the low-dimensional materials will inevitably be damaged by the probes, which will affect the accuracy of the transport properties measurement.

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