Piezoelectric pump based on secondary resonance

Abstract

The invention discloses a piezoelectric pump based on secondary resonance. The piezoelectric pump comprises a first vibrating body, a second vibrating body, a pump cavity and a base, wherein the outer wall of the bottom end of a vibrating pipe is connected with a piezoelectric element to form the first vibrating body; the pump cavity consists of a film, a pump cavity plate, a valve plate, a one-way valve and an inlet and outlet flow orifice plate; the bottom end of the first vibrating body is fixed by the base, and the other end thereof is sleeved and connected with the second vibrating body; the second vibrating body, the film and the pump cavity plate are sequentially connected; the pump cavity plate, the valve plate and the inlet and outlet flow orifice plate are fixedly connected with the base; and an inlet one-way valve part and an outlet one-way valve part are mounted on the valve plate. With the adoption of the technical scheme, the problem that the high frequency characteristic of a piezoelectric sheet and the low frequency characteristic of the one-way valve in the piezoelectric pump are not compatible is solved. In addition, the piezoelectric pump has a recyclable driving structure and a replaceable pump cavity body, so that the cost is reduced, and liquid cross contamination is avoided.

Description

Technical field [0001] The invention belongs to the technical field of fluid pumps in precision machinery, and specifically relates to a piezoelectric ceramic pump. Background technique [0002] The traditional valved piezoelectric ceramic displacement pump (such as Chinese patents CN100392245C, CN102192135B, CN101589233B) uses the periodic bending deformation of the piezoelectric metal laminate structure to change the volume of the pump cavity, which causes the pressure of the pump cavity to change. The directional flow of liquid is realized under the cooperation of opening and closing of the valve. The resonant frequency of the piezoelectric ceramic laminated structure is generally above several hundred hertz to give full play to the performance of piezoelectric ceramic materials. However, the traditional one-way valve has poor dynamic response characteristics and severe hysteresis when working with the piezoelectric laminate structure. As a result, the best operating frequenc...

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Problems solved by technology

[0006] Another purpose of the present invention is to propose a new type of piezoelectric ceramic pump based on the principle of second resonance, which will use frequency conversion to solve the incompatibility between the high-frequency characteristics of the piezoelectric element and the low-frequency characteristics of the valve in the valved piezoelectric positive displacement pump. It has the characteristics of high-frequency drive and large single pumping volume

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