A piezoelectric ceramic diaphragm pump
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
- Publication Date
- 2015-11-25
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Abstract
Description
Technical field
[0001] The invention belongs to the technical field of fluid pumps in precision machinery, and specifically relates to a piezoelectric ceramic diaphragm pump. Background technique
[0002] Traditional valved piezoelectric ceramic displacement pumps (such as Chinese patents CN100392245C, CN102192135B, CN101589233B, CN1179127C) use the periodic bending deformation of the piezoelectric metal laminate structure to change the volume of the pump cavity, which causes the pressure of the pump cavity to change, and The directional flow of the liquid is realized by the cooperation of the opening and closing of the outlet check valve. The resonant frequency of the piezoelectric ceramic laminated structure is generally above several hundred hertz to give full play to the performance of piezoelectric ceramic materials. However, the traditional one-way valve has poor dynamic response characteristics and severe hysteresis when working with the piezoelectric laminate structure. ...