A piezoelectric ceramic diaphragm pump

A technology of piezoelectric ceramics and piezoelectric ceramic tubes, which is applied in the field of piezoelectric ceramic diaphragm pumps, can solve the problems of incompatibility of high-frequency characteristics of piezoelectric elements and low-frequency characteristics of valves, and achieve the requirements of simple structure and driving mode and low ideality , The effect of reducing the loss of vibration energy
CN103306951BActive Publication Date: 2015-11-25SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI

Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
Publication Date
2015-11-25

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Abstract

The invention discloses a piezoelectric ceramic diaphragm pump, which comprises an elastic film, a spherical shell, a vibrating tube, a piezoelectric element, a pump cavity roof cover, a sealing gasket, a pump cavity bottom cover, an inlet check valve, an outlet check valve and a diaphragm. The outer wall of one end of the vibrating tube is connected with the piezoelectric element; the end face of the other end of the vibrating tube is connected with the spherical shell; the opening of the spherical shell is sealed by the elastic film; the common end of the piezoelectric element and the vibrating tube is fixedly connected with the pump cavity roof cover; the diaphragm is arranged in the pump cavity roof cover; the pump cavity roof cover is fixedly connected with the sealing gasket and the pump cavity bottom cover; the pump cavity bottom cover is provided with the inlet check valve and the outlet check valve. By adopting the technical scheme provided by the invention, the piezoelectric ceramic diaphragm pump has the characteristics of simple structure, convenient control, high output efficiency and high-frequency drive, and also can achieve the goals of no pollution, corrosion resistance and high single flow rate of pumping solution. Moreover, the piezoelectric ceramic diaphragm pump has the characteristic that quantitative input liquid can be kept.
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Description

Technical field

[0001] The invention belongs to the technical field of fluid pumps in precision machinery, and specifically relates to a piezoelectric ceramic diaphragm pump. Background technique

[0002] Traditional valved piezoelectric ceramic displacement pumps (such as Chinese patents CN100392245C, CN102192135B, CN101589233B, CN1179127C) use the periodic bending deformation of the piezoelectric metal laminate structure to change the volume of the pump cavity, which causes the pressure of the pump cavity to change, and The directional flow of the liquid is realized by the cooperation of the opening and closing of the outlet check valve. The resonant frequency of the piezoelectric ceramic laminated structure is generally above several hundred hertz to give full play to the performance of piezoelectric ceramic materials. However, the traditional one-way valve has poor dynamic response characteristics and severe hysteresis when working with the piezoelectric laminate structure. ...

Claims

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