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A piezoelectric ceramic diaphragm pump

A technology of piezoelectric ceramics and piezoelectric ceramic tubes, which is applied in the field of piezoelectric ceramic diaphragm pumps, can solve the problems of incompatibility of high-frequency characteristics of piezoelectric elements and low-frequency characteristics of valves, and achieve the requirements of simple structure and driving mode and low ideality , The effect of reducing the loss of vibration energy

Active Publication Date: 2015-11-25
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem of incompatibility between the high-frequency characteristics of the piezoelectric element and the low-frequency characteristics of the valve in the piezoelectric positive displacement pump with a valve, the present invention provides a piezoelectric ceramic diaphragm pump

Method used

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  • A piezoelectric ceramic diaphragm pump
  • A piezoelectric ceramic diaphragm pump
  • A piezoelectric ceramic diaphragm pump

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Embodiment

[0069] The specific manufacturing process and driving method of the piezoelectric ceramic diaphragm pump of the present invention are described by using two piezoelectric chip vibrators and a circular metal tube as a typical example.

[0070] The piezoelectric sheet 501 has a length of 20 mm, a width of 5 mm, and a thickness of 1 mm. Use conductive glue or electric soldering iron to fix the wire on the electrode of the piezoelectric sheet 501, and the fixed position shall be as close to the edge of the fixed end of the piezoelectric sheet 501 as possible, so as not to affect the consolidation of the piezoelectric sheet and the metal tube and the system vibration Mainly. The piezoelectric sheet 501 is placed in 80-degree silicon oil for polarization, and the polarization voltage is 2000 V / mm for 20 minutes. The polarized piezoelectric sheet 501 is cleaned with alcohol or other cleaning agents. The rubber diaphragm 11 is adhered to the cavity of the upper cover 6 of the pump cavi...

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Abstract

The invention discloses a piezoelectric ceramic diaphragm pump, which comprises an elastic film, a spherical shell, a vibrating tube, a piezoelectric element, a pump cavity roof cover, a sealing gasket, a pump cavity bottom cover, an inlet check valve, an outlet check valve and a diaphragm. The outer wall of one end of the vibrating tube is connected with the piezoelectric element; the end face of the other end of the vibrating tube is connected with the spherical shell; the opening of the spherical shell is sealed by the elastic film; the common end of the piezoelectric element and the vibrating tube is fixedly connected with the pump cavity roof cover; the diaphragm is arranged in the pump cavity roof cover; the pump cavity roof cover is fixedly connected with the sealing gasket and the pump cavity bottom cover; the pump cavity bottom cover is provided with the inlet check valve and the outlet check valve. By adopting the technical scheme provided by the invention, the piezoelectric ceramic diaphragm pump has the characteristics of simple structure, convenient control, high output efficiency and high-frequency drive, and also can achieve the goals of no pollution, corrosion resistance and high single flow rate of pumping solution. Moreover, the piezoelectric ceramic diaphragm pump has the characteristic that quantitative input liquid can be kept.

Description

Technical field [0001] The invention belongs to the technical field of fluid pumps in precision machinery, and specifically relates to a piezoelectric ceramic diaphragm pump. Background technique [0002] Traditional valved piezoelectric ceramic displacement pumps (such as Chinese patents CN100392245C, CN102192135B, CN101589233B, CN1179127C) use the periodic bending deformation of the piezoelectric metal laminate structure to change the volume of the pump cavity, which causes the pressure of the pump cavity to change, and The directional flow of the liquid is realized by the cooperation of the opening and closing of the outlet check valve. The resonant frequency of the piezoelectric ceramic laminated structure is generally above several hundred hertz to give full play to the performance of piezoelectric ceramic materials. However, the traditional one-way valve has poor dynamic response characteristics and severe hysteresis when working with the piezoelectric laminate structure. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B43/04
Inventor 马玉婷王策严心涛钟金凤陈忠祥武晓东
Owner SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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