Device and method for measuring plate resistance

Abstract

The invention, which belongs to the technical field of resistance measurement, particularly relates to a measuring device for the sheet resistance and a method thereof. The measuring device comprisesa measuring instrument, measuring ends and connecting lines. Two groups of connecting lines are arranged; each group includes two connecting lines; each connecting line includes a main line and at least two branch lines extending from one end of the main line; the branch lines of one connecting line in the same group correspond to one measuring end one by one and are connected with clamping piecesof the corresponding measuring end; the branch lines of the other connecting line in the same group are connected to the other clamping pieces of the corresponding measuring end; and the main lines of the two groups of connecting lines are connected with connecting ports of the measuring instrument respectively. Besides, the invention also provides a method for measuring the sheet resistance by using the measuring device. The measuring device and the method thereof have the following beneficial effects: the multiple measuring heads are connected to a sheet test sample for sheet resistance measurement, so that the influence of the skin effect is reduced and the resistance measurement accuracy of the sheet test sample is improved; and the changes are minimized while the previous measuring instruments and materials are used.

Description

technical field [0001] The invention belongs to the technical field of resistance measurement, and in particular relates to a measuring device and method for plate resistance. Background technique [0002] The previous measuring device for plate resistance such as figure 1 As mentioned above, the four-terminal test method is used to directly clamp the two measuring terminals 2 that come with the measuring instrument 1 to the two ends of the plate sample 4 respectively. Connecting portion 22, the two clips 21 are respectively connected to the upper and lower surfaces of the plate sample 4, the clips 21 are connected to the corresponding ports of the measuring instrument 4 through the connection line 3, when the plate sample 4 is wider, There is a large difference in the resistance results measured in this way, which is caused by the existence of the skin effect or the skin effect after analysis. The so-called skin effect phenomenon (skin effect), or the skin effect phenomen...

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the problems existing in the prior art, when measuring the resistance of the board, the influence of the skin effect is relatively obvious, which causes the measurement result of the resistance of the board to be unstable, and to provide a method with the least change on the basis of previous measuring instruments and materials, A measuring device for plate resistance with relatively accurate plate resistance measurement results, and a method for measuring plate resistance

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