A vertical interferometer standard mirror clamping device and method for surface shape detection of optical components

A clamping device and surface shape detection technology, which is applied in the direction of using optical devices, optical components, measuring devices, etc., can solve the problems of inability to precisely adjust the levelness of standard mirrors, and achieve the effect of simple device structure and guaranteed level accuracy.

Active Publication Date: 2021-06-08
CHINA WEAPON SCI ACADEMY NINGBO BRANCH
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The above clamping scheme helps to reduce the impact of different clamping methods and temperature changes on the surface shape of the standard mirror, but it cannot precisely adjust the levelness of the standard mirror

Method used

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  • A vertical interferometer standard mirror clamping device and method for surface shape detection of optical components
  • A vertical interferometer standard mirror clamping device and method for surface shape detection of optical components
  • A vertical interferometer standard mirror clamping device and method for surface shape detection of optical components

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Embodiment Construction

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0033] Such as Figure 1 to Figure 7 As shown, a vertical interferometer standard mirror clamping device for surface shape detection of optical components includes a leveling mechanism 1 , an auxiliary support 2 , a tray 3 and a base 4 . The leveling mechanism 1 and the auxiliary support 2 are installed on the base 4, and the tray 3 is used to place the standard mirror 5.

[0034] The leveling mechanism 1 includes a drive system and a support block 19 for supporting the pallet 3. The drive system can drive the support block 19 to move along the height direction, and the lowest value of the height that the support block 19 can reach is denoted as H min , the highest value is recorded as H max , the auxiliary support 2 includes a bracket 21 and a buffer pad 22 installed on the bracket 21, the buffer pad 22 is used to support the tray 3, and it...

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Abstract

The invention relates to a vertical interferometer standard mirror clamping device and method for optical element surface shape detection. The vertical interferometer standard mirror clamping device includes a leveling mechanism, an auxiliary support and a tray for placing the standard mirror , the number of the leveling mechanism is at least three, and is evenly distributed along the circumferential direction of the tray, each of the leveling mechanisms includes a drive system and a support block for supporting the tray, and the drive system can drive the support block along the Moving in the height direction, the lowest value of the height that the support block can reach is recorded as H min , the highest value is recorded as H max , the auxiliary support includes a bracket and a buffer pad installed on the bracket, the buffer pad is used to support the pallet, and its height is denoted as h, H min 、H max The relationship with h satisfies: H min <h<H max . Compared with the prior art, the present invention has the advantage that the levelness of the standard mirror can be precisely adjusted.

Description

technical field [0001] The invention relates to the technical field of optical element surface shape detection, in particular to a vertical interferometer standard mirror clamping device and method for optical element surface shape detection. Background technique [0002] Affected by the embargo of Western developed countries on China, large-caliber high-precision surface shape detection technology has become a bottleneck in the manufacture and application of large-caliber optical components, which seriously restricts the performance improvement of military weapons and equipment. With the improvement of the precision of optical instruments, the requirements for the surface shape detection of optical components are getting higher and higher. The interferometer is currently the main technical method used for surface shape detection of optical components. Interference detection is through the interference fringe processing formed by both the reflected light of the standard refe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/00G01B11/24
CPCG02B7/00G01B11/2441
Inventor 聂凤明张广平王大森裴宁郭海林李晓静
Owner CHINA WEAPON SCI ACADEMY NINGBO BRANCH
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