Array substrate, preparation method thereof, and display panel

A technology for array substrates and equipment, applied in the fields of array substrates and their preparation methods, and display panels, can solve the problems of abnormal film layer shedding, poor adhesion, and affecting the production yield of display panels, so as to increase adhesion and improve production efficiency. Yield rate and the effect of reducing the risk of film peeling off

Pending Publication Date: 2020-11-27
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in the display panel, the insulating layer above the metal layer of the signal line usually needs to use a silicon dioxide film to ensure stable electrical characteristics of the device, but the stress of the copper film layer and the silicon dioxide film layer are opposite, and the stress between the two layers Mismatch leads to poor adhesion. After covering a large area of ​​metal area with a silicon dioxide film layer, it is prone to abnormal film peeling, which affects the production yield of display panels.

Method used

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  • Array substrate, preparation method thereof, and display panel
  • Array substrate, preparation method thereof, and display panel
  • Array substrate, preparation method thereof, and display panel

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Embodiment Construction

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0030] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " The orientation or positional relationship indicated by "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation shown in the drawings Or positional relationship is only for the convenience of describing the present invention and simpl...

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Abstract

The invention discloses an array substrate, a preparation method thereof, and a display panel. The array substrate comprises a grid electrode metal layer and a source-drain electrode metal layer. At least one of the gate metal layer and the source-drain metal layer comprises a conductive function layer and a combination improvement layer stacked on the conductive function layer, and the surface roughness of the upper surface of the combination improvement layer is greater than that of the upper surface of the conductive function layer. After an insulating layer is deposited on the combinationimprovement layer; the contact area between the insulating layer and the combination improvement layer is larger, and the insulating layer and the combination improvement layer are combined more tightly, so that the adhesive force between the metal layer and the insulating layer is greatly increased, the risk that a film layer is stripped and falls off due to stress mismatching between the metal layer and the insulating layer is reduced, and the preparation yield of the array substrate is increased.

Description

technical field [0001] The present application relates to the field of display technology, in particular to an array substrate, a manufacturing method thereof, and a display panel. Background technique [0002] With the development of display technology, consumers have higher and higher requirements for display quality. Correspondingly, major panel manufacturers are also conducting research and optimization. Of course, with structural innovation and improvement, there will be It will cause some new problems. [0003] For example, at present, in display panels, especially in large-sized display panels, the signal line (Data line) is usually made of metal copper. On the one hand, metal copper has low resistance, so it can effectively reduce RC Delay (Resistor- Capacitance Delay, resistor-capacitor circuit delay), to meet the needs of large size, high refresh rate, and high resolution. On the other hand, because copper has a lower resistivity than traditional signal line mater...

Claims

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Application Information

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IPC IPC(8): H01L29/45H01L29/49H01L27/12H01L21/77
CPCH01L29/45H01L29/4908H01L29/495H01L27/1259H01L27/1244H01L27/1248
Inventor李子然
OwnerSHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD