Capacitive two-dimensional force sensor

A sensor and capacitive technology, applied in the field of sensors, can solve the problems of time-consuming and labor-intensive production, and achieve the effects of improving sensitivity and accuracy, preventing measurement errors, and facilitating detection

Pending Publication Date: 2022-04-12
航天南洋(浙江)科技有限公司
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Problems solved by technology

[0004] In this patent, it is necessary to provide a separate fixed pole plate corresponding to each movable pole plate for the movable pole plate at the end of each cross beam, and it is necessary to consider the relationship between each movable pole plate and the corresponding pole plate during manufacture. Fix the positional relationship between the plates to ensure the accuracy of the detection, which is time-consuming and labor-intensive to make

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[0030] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Unless otherwise defined, all terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that commonly used terms should be interpreted to have a meaning consistent with their meaning in the relevant art and this disclosure. This disclosure is to be considered as an example of the invention and is not intended to limit the invention to the particular embodiments.

[0031] This embodiment provides a capacitive two-dimensional force sensor, such as figure 1 , figure 2 ,, Figure 5 , including a strain structure 1, the strain structure 1 includes a fixed shell 1-1 arranged at the periphery, a strain table 1-2 located at the center, connected between the strain table 1-2 and the fixed shell 1- The elastic member 1-3 between 1 al...

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Abstract

The invention belongs to the technical field of sensors, and particularly relates to a capacitive two-dimensional force sensor which is mainly used for increasing the response speed and achieving digital output of the sensor by detecting capacitance. The device comprises a strain structural body, the strain structural body comprises a fixed shell arranged on the periphery, a strain table arranged in the center and a plurality of elastic pieces connected between the strain table and the fixed shell, the device further comprises a circuit integrated board arranged at the lower ends of the elastic pieces, and the circuit board comprises a conductive plane. The plurality of elastic pieces and the single conductive plane form a plurality of groups of detection capacitors; the circuit board is integrated with a capacitance detection module which is used for detecting a capacitance change value of a detection capacitor; the processing module is used for processing the capacitance change value into a digital signal; and the communication module is used for outputting the digital signal to a client. The operation of arranging a plurality of fixed polar plates for a plurality of elastic pieces serving as movable polar plates in a matched manner is reduced, and the manufacturing is time-saving and labor-saving.

Description

technical field [0001] The invention belongs to the technical field of sensors, and specifically relates to a capacitive two-dimensional force sensor, which is mainly used to improve the response speed and realize digital intelligence of the sensor by detecting capacitance changes and digital output. Background technique [0002] According to different strain test methods, force sensors are divided into resistance strain, capacitive strain, piezoelectric and other measurement methods. Resistance strain and piezoelectric sensors have simple structures and high measurement accuracy, but have slow dynamic response and difficult patch connection. problem, not conducive to mass production. At the same time, with the continuous development of industrial digitization and intelligence, the requirements for digital intelligence of sensors are further improved. [0003] The patent with the publication number CN109974916B discloses a variable pole pitch capacitive three-dimensional fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L5/165
Inventor 吴志文嵇治刚张冬孙亮亮夏冬冬董婷陈帆
Owner 航天南洋(浙江)科技有限公司
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