Article conveying equipment
A technology for conveying items and equipment, which is applied in the direction of conveyors, mechanical conveyors, lifting devices, etc., and can solve problems such as the inability to set up a roof hanger shed, the increase in the vertical direction of the roof hanger shed, and the limitation of the location of the roof hanger shed
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[0040] First, the article conveying facility 10 according to the present invention will be described.
[0041] The article conveyance facility 10 is installed in, for example, a clean room or the like in a manufacturing plant of a semiconductor substrate. The article conveyance facility 10 is a facility for conveying a cassette 90 (an example of an "article") in which a semiconductor substrate is accommodated. The article conveyance facility 10 conveys the cassette 90 between a plurality of processing apparatuses that process semiconductor substrates. like Figure 1A as well as Figure 1B As shown, the article conveyance facility 10 mainly includes a travel guide 11 as a conveyance path, a roof conveyance vehicle 12 that travels along the travel guide 11 , and a roof storage shed 20 provided along the travel guide 11 .
[0042] The running rail 11 is provided on the roof 95 side above the plurality of processing apparatuses (not shown). The travel rail 11 is supported from ...
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Abstract
Description
Claims
Application Information
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