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Article conveying equipment

A technology for conveying items and equipment, which is applied in the direction of conveyors, mechanical conveyors, lifting devices, etc., and can solve problems such as the inability to set up a roof hanger shed, the increase in the vertical direction of the roof hanger shed, and the limitation of the location of the roof hanger shed

Pending Publication Date: 2022-06-21
DAIFUKU CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the installation place of the roof hanger is limited, and the roof hanger itself becomes larger in the vertical direction.
[0006] According to such a situation, there will be a problem that it is impossible to install a roof hanger in a place where the installation space of the roof hanger is limited.

Method used

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  • Article conveying equipment
  • Article conveying equipment
  • Article conveying equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0040] First, the article conveying facility 10 according to the present invention will be described.

[0041] The article conveyance facility 10 is installed in, for example, a clean room or the like in a manufacturing plant of a semiconductor substrate. The article conveyance facility 10 is a facility for conveying a cassette 90 (an example of an "article") in which a semiconductor substrate is accommodated. The article conveyance facility 10 conveys the cassette 90 between a plurality of processing apparatuses that process semiconductor substrates. like Figure 1A as well as Figure 1B As shown, the article conveyance facility 10 mainly includes a travel guide 11 as a conveyance path, a roof conveyance vehicle 12 that travels along the travel guide 11 , and a roof storage shed 20 provided along the travel guide 11 .

[0042] The running rail 11 is provided on the roof 95 side above the plurality of processing apparatuses (not shown). The travel rail 11 is supported from ...

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PUM

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Abstract

The invention provides an article transport facility (10). The article transport facility (10) is provided with a roof transport vehicle (12) and a roof storage shed (20). The roof transport vehicle (12) transports the magazine (90) along a transport path formed on the roof (95) side. The roof storage shed (20) is arranged along the conveying path. The roof storage shed (20) stores the magazine (90) transported by the roof transport vehicle (12). The roof storage shed (20) is provided with an upper-layer placing part (21) and a lower-layer placing part (22) on which the magazine (90) is placed. The upper-layer placement section (21) and the lower-layer placement section (22) can be moved up and down with reference to a position (T) at which the magazine (90) is transferred between the upper-layer placement section (21) and the lower-layer placement section (22) and the roof transport vehicle (12).

Description

technical field [0001] The present invention relates to an article conveyance facility including: a roof conveyance vehicle that conveys articles along a conveyance path formed on the roof side; and a roof storage shed that is installed along the conveyance path and that is conveyed by the roof conveyance vehicle items are stored. Background technique [0002] Conventionally, as such an article conveying facility, there is an article conveying facility disclosed in Japanese Patent Application Laid-Open No. 2020-66499. The article conveyance facility of Japanese Patent Laid-Open No. 2020-66499 includes: a roof conveyance vehicle that travels along guide rails provided on the roof of a building to convey articles; and a roof hanger that is suspended from the roof and provides Items transported by rooftop transport vehicles are temporarily placed. [0003] The article conveyance facility of Japanese Patent Application Laid-Open No. 2020-66499 is provided with a fixed shed and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G35/00B66F7/06B66F7/28
CPCB65G35/00B66F7/065B66F7/28H01L21/67733H01L21/67736H01L21/67769H01L21/67706H01L21/6773B65G1/10B65G2201/0297B65G1/0457B65G2811/0621B65G1/127
Inventor 高原史雄石井里奈东慎一郎
Owner DAIFUKU CO LTD
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