Vacuum processing apparatus and control method of vacuum processing apparatus

Abstract

The invention belongs to the field of vacuum treatment equipment, and particularly relates to vacuum treatment equipment and a control method of the vacuum treatment equipment. The vacuum processing equipment comprises a support, a rotating assembly, a rotating shaft assembly, a distance measuring assembly and a monitoring assembly, the support is arranged in a vacuum processing cavity, and the rotating shaft assembly is rotatably connected to the support; the rotating assembly comprises a supporting piece, a first rotating disc and a second rotating disc, the first rotating disc and the second rotating disc are connected to the two ends of the supporting piece, a containing space is formed among the first rotating disc, the second rotating disc and the supporting piece, the workpiece assembly can be contained in the containing space and borne by the second rotating disc, and the first rotating disc is provided with a hollow area. The area, directly facing the hollow area, of the workpiece assembly is a detection area; the first rotating disc is connected to the rotating shaft assembly; the distance measuring assembly is used for detecting the distance of the detection area in the axis direction. The rotating shaft assembly and the distance measuring assembly are both in communication connection with the monitoring assembly. According to the vacuum treatment equipment, whether the workpiece assembly is horizontally placed in the rotating assembly or not can be detected, and the cost is saved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum processing equipment, and in particular to a vacuum processing equipment and a control method for the vacuum processing equipment. Background Art

[0002] In vacuum treatment processes such as vacuum coating and etching, it is usually necessary to place the workpiece to be processed on a workpiece rotating rack or rotating disk in the vacuum processing chamber; and whether the workpiece to be processed is placed in place in the workpiece rotating rack or rotating disk directly affects the effect of vacuum treatment. Especially for workpieces such as semiconductor wafers and precision optical components, their loading and unloading are usually completed by automated manipulators, and such workpieces usually have high requirements for the accuracy of vacuum coating and etching. Taking vacuum coating as an example, when coating such workpieces, it is necessary to place the workpiece assembly on the workpiece rotating disk for coating. After the coating is completed, the workpiece assembly needs to be taken out and then placed in a new workpiece assembly to be processed for coating. When using a manipulator to place a new workpiece assembly into the workpiece rotating disk assembly for coating, it is necessary to determine whether the workpiece assembly is placed horizontally in the workpiece rotating disk assembly to ensure the accuracy of vacuum treatment.

[0003] In the prior art, vacuum processing equipment for vacuum coating and other treatments on the aforementioned workpieces is usually unable to accurately detect whether the workpiece assembly is placed horizontally in the rotating assembly; if the workpiece assembly is not placed properly in the rotating disk, the accuracy of vacuum treatments such as coating may be reduced, which may cause the product to be scrapped. Summary of the invention

[0004] The object of the present invention is to provide a vacuum processing device, which can detect whether a workpiece component is placed horizontally in a rotating component, has a simple overall structure, a compact structure in a film forming chamber, and saves costs.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] Vacuum processing equipment, including:

[0007] A support, wherein the support is arranged in the vacuum processing chamber;

[0008] A rotating shaft assembly, the rotating shaft assembly is rotatably connected to the bracket;

[0009] The rotating assembly comprises a support and a first rotating disk and a second rotating disk connected to both ends of the support, a receiving space is formed between the first rotating disk, the second rotating disk and the support, a workpiece assembly can be received in the receiving space and carried on the second rotating disk, the first rotating disk is provided with a hollow area, and an area of ​​the workpiece assembly facing the hollow area is a detection area; the first rotating disk is connected to the rotating shaft assembly, and the rotating shaft assembly can drive the rotating assembly to rotate;

[0010] A distance measuring component, the distance measuring component is arranged outside the vacuum processing chamber, the distance measuring component is arranged on a side of the first rotating disk away from the second rotating disk, a light through hole is opened in the cavity wall of the vacuum processing chamber, and the distance measuring light of the distance measuring component can pass through the light through hole and the hollow area to detect the distance of the detection area;

[0011] The monitoring component, the rotating shaft component and the distance measuring component are both communicatively connected to the monitoring component.

[0012] As an optional solution for the vacuum processing equipment, the first rotating disk includes a circular ring, a central rotating disk and a connecting rod, the circular ring and the central rotating disk are spaced and concentrically arranged, the circular ring and the central rotating disk are connected to both ends of the connecting rod, the hollow area is formed between the circular ring, the connecting rod and the central rotating disk, the central rotating disk is connected to the rotating shaft assembly, and the circular ring is connected to the supporting member.

[0013] As an optional solution for the vacuum processing equipment, the second rotating disk includes an annular structure and a flange arranged on the inner wall of the annular structure, the surface of the flange facing the first rotating disk is a bearing surface, the workpiece assembly can be placed on the bearing surface, and the annular structure is connected to the support.

[0014] As an optional solution for the vacuum processing equipment, a positioning block is provided on the second rotating disk. The positioning block is arranged on the inner wall of the annular structure and is located on the side of the flange close to the first rotating disk, for positioning the workpiece assembly on the second rotating disk.

[0015] As an optional solution of the vacuum processing equipment, the first rotating disk further includes a detection boss, and the distance measuring light of the distance measuring component can pass through the light-through hole to detect the distance of the detection boss.

[0016] As an optional solution for the vacuum processing equipment, the vacuum processing equipment also includes a clamping assembly, which is arranged on one side of the rotating assembly. The clamping assembly includes a manipulator that can pick up and place the workpiece assembly. The manipulator can extend and retract in a direction toward or away from the rotating assembly to place the workpiece assembly into or remove it from the rotating assembly.

[0017] As an optional solution of the vacuum processing device, the support members are provided with two, and an inlet and outlet are formed between the two support members, and the manipulator can pass through the inlet and outlet to put the workpiece assembly into or remove the rotating assembly;

[0018] The manipulator is communicatively connected to the monitoring component.

[0019] As an optional solution for the vacuum processing equipment, a lifting assembly is provided on the side of the second rotating disk facing away from the first rotating disk, and the output end of the lifting assembly can pass through the annular structure. The output end is used for the workpiece-carrying assembly to move the workpiece assembly to the transporting station and the film forming processing station. When the lifting assembly moves the workpiece assembly to the transporting station, the output end is docked with the robot arm. When the lifting assembly moves the workpiece assembly to the film forming processing station, the output end is docked with the flange.

[0020] As an optional solution of the vacuum processing equipment, the distance measuring component includes a distance measuring sensor, and the distance measuring sensor is electrically connected to the monitoring component.

[0021] The object of the present invention is to provide a control method for a vacuum processing equipment, which can detect whether a workpiece component is placed horizontally in a rotating component, has simple steps, simplifies the process, has high reliability, and saves costs.

[0022] To achieve this object, the present invention adopts the following technical solutions:

[0023] A control method for a vacuum processing device, applied to the above-mentioned vacuum processing device, comprises:

[0024] Check whether the workpiece assembly is horizontal in the rotating assembly:

[0025] Control the rotating shaft assembly to drive the rotating assembly to rotate to at least two positions;

[0026] The control shaft assembly drives the rotating assembly to rotate to a first position, the distance measuring assembly detects the distance value PV1 of the workpiece assembly, and the distance measuring assembly feeds back the distance value PV1 to the monitoring assembly;

[0027] The rotating shaft assembly is controlled to drive the rotating assembly to rotate to a second position, the distance measuring assembly detects the distance value PV2 of the workpiece assembly, and the distance measuring assembly feeds back the distance value PV2 to the monitoring assembly;

[0028] The rotating shaft assembly is controlled to drive the rotating assembly to rotate to the Nth position, the distance measuring assembly detects the distance value PV n of the workpiece assembly, and the distance measuring assembly feeds back the distance value PV n to the monitoring assembly;

[0029] The monitoring component determines whether PV1, PV2, ... PVn are consistent with the preset SV1, SV2, ... PVn, respectively, where SV1, SV2, ... PVn are the first group of preset ranges;

[0030] If so, it is determined that the workpiece assembly is placed horizontally in the rotating assembly.

[0031] As an optional solution of the control method of the vacuum processing equipment, the second rotating disk includes an annular structure and a flange arranged on the inner wall of the annular structure, the surface of the flange facing the first rotating disk is a bearing surface, the workpiece assembly can be placed on the bearing surface, and the annular structure is connected to the support member; when the workpiece assembly is arranged on the bearing surface, the distance measured by the distance measuring assembly is a first preset range SV, and before detecting whether the workpiece assembly is placed horizontally in the rotating assembly, it also includes:

[0032] Detecting whether the workpiece assembly is placed in the rotating assembly:

[0033] When the rotating component is controlled to rotate to the first position, the distance measuring component detects the distance value PV1' and feeds the distance value PV1' back to the monitoring component;

[0034] The monitoring component determines whether PV1' is consistent with SV1;

[0035] If so, it is determined that the workpiece assembly is placed in the rotating assembly.

[0036] As an optional scheme of the control method of the vacuum processing equipment, the first rotating disk includes a ring, a center rotating disk and a connecting rod, the ring and the center rotating disk are spaced and concentrically arranged, the ring and the center rotating disk are connected to both ends of the connecting rod, the hollow area is formed between the ring, the connecting rod and the center rotating disk, the center rotating disk is connected to the rotating shaft assembly, and the ring is connected to the support member; the first rotating disk also includes a detection boss, the detection boss is arranged on the connecting rod, the ranging light of the ranging assembly can pass through the light hole to detect the distance of the detection boss, and the distance of the detection boss is a second preset range; before detecting whether the workpiece assembly is placed horizontally in the rotating assembly, it also includes:

[0037] Detect the origin of the rotating component:

[0038] The rotating component is controlled to rotate, and the distance measuring component detects a distance value A and feeds it back to the monitoring component;

[0039] The monitoring component determines whether A is within a second preset range;

[0040] If so, the origin is determined to be the current position.

[0041] As an optional solution of the control method of the vacuum processing equipment, the vacuum processing equipment further includes a clamping assembly, the clamping assembly is arranged at one side of the rotating assembly, and is used to move the workpiece assembly out of or into the rotating assembly, the clamping assembly includes a manipulator, and the manipulator can be extended and retracted in a direction toward the rotating assembly to put the workpiece assembly into or out of the rotating assembly; the support member is provided with at least one to form an inlet and outlet, and the manipulator can enter and exit the rotating assembly through the inlet and outlet to put the workpiece assembly into or out of the rotating assembly;

[0042] The manipulator is communicatively connected with the monitoring component;

[0043] A lifting assembly is provided on a side of the second rotating disk away from the first rotating disk, and an output end of the lifting assembly can pass through the annular structure to move the workpiece assembly to the transporting station and the film forming processing station, and the output end is used to carry the workpiece assembly. When the lifting assembly moves the workpiece assembly to the transporting station, the output end is docked with the manipulator, and when the lifting assembly is lifted to the film forming processing station, the output end is docked with the flange; after detecting the origin of the rotating assembly, it also includes:

[0044] Workpiece loading:

[0045] Control the rotating assembly to rotate to the avoidance position so that the inlet and outlet face the position of the manipulator;

[0046] Control the output end of the lifting assembly to pass through the annular structure and be lifted to the handling station;

[0047] Controlling the manipulator to extend so as to place the workpiece assembly onto an output end;

[0048] Control the output end of the lifting assembly to descend to the film forming processing position, place the workpiece assembly on the bearing surface, and retract the manipulator;

[0049] Workpiece unloading:

[0050] Control the rotating assembly to rotate to the avoidance position so that the inlet and outlet face the position of the manipulator;

[0051] Control the output end of the lifting assembly to pass through the annular structure to lift the workpiece assembly at the film forming processing position to the transporting position;

[0052] Controlling the manipulator to extend to remove the workpiece assembly on the output end;

[0053] The manipulator is controlled to retract and the workpiece assembly is moved out of the rotating assembly.

[0054] Beneficial effects:

[0055] The vacuum processing equipment provided by the present invention includes a bracket, a rotating assembly, a rotating shaft assembly, a distance measuring assembly and a monitoring assembly. The bracket is arranged in a vacuum processing chamber, and the rotating shaft assembly can be rotatably connected to the bracket; the rotating assembly includes a support member and a first rotating disk and a second rotating disk connected to both ends of the support member, and a storage space is formed between the first rotating disk, the second rotating disk and the support member. The workpiece assembly can be accommodated in the storage space and carried by the second rotating disk. The first rotating disk is provided with a hollow area, and the area of ​​the workpiece assembly facing the hollow area is a detection area; the first rotating disk is connected to the rotating shaft assembly, and the rotating shaft assembly can drive The rotating assembly rotates, thereby driving the workpiece assembly to rotate; the distance measuring assembly is arranged outside the vacuum processing chamber, and the distance measuring assembly is arranged on the side of the first rotating disk away from the second rotating disk. The distance measuring assembly is used to detect the distance of the detection area along the axis direction; the shaft assembly and the distance measuring assembly are both connected to the monitoring assembly in communication; by driving the first rotating disk to rotate one circle, the distance measuring assembly is used to detect the distance of the detection area along the axis direction when the first rotating disk rotates to at least three different angles, and by comparison, it can be determined whether the workpiece is placed horizontally in the second rotating disk, so as to prevent the workpiece from being not placed in place, resulting in deviations in the film forming process and product scrapping. The distance measuring assembly is arranged outside the vacuum processing chamber, and the light passes through the light holes and the hollow area, so that the structure is simple and compact.

[0056] The control method of the vacuum processing equipment provided by the present invention is applied to the above-mentioned vacuum processing equipment, and detects whether the workpiece component is placed horizontally in the rotating component; controls the rotating shaft component to drive the rotating component to rotate to the first position, the distance measuring component detects the distance value PV1 of the workpiece component, and the distance measuring component feeds back the distance value PV1 to the monitoring component; controls the rotating shaft component to drive the rotating component to rotate to the second position, the distance measuring component detects the distance value PV2 of the workpiece component, and the distance measuring component feeds back the distance value PV2 to the monitoring component; controls the rotating shaft component to drive the rotating group to rotate to the third position, the distance measuring component detects the distance value PV3 of the workpiece component, and the distance measuring component feeds back the distance value PV3 to the monitoring component; the monitoring component respectively determines whether PV1, PV2, and PV3 are consistent with preset SV1, SV2, and SV3, wherein SV1, SV2, and SV3 are the preset ranges of the first group; if so, according to the principle that three non-collinear points form a plane, if the three points are all within a predetermined height, it is determined that the workpiece component is placed horizontally in the rotating component, and the overall detection steps are simple, the process is simplified, the reliability is high, and the cost is saved. Among them, the preset range, that is, the distance value, is roughly equal, and the specific range value is determined according to actual needs, and a certain error is allowed. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] Figure 1 is a top view of the vacuum processing equipment provided by the present invention;

[0058] Figure 2 is a cross-sectional view of a vacuum processing device provided by the present invention;

[0059] Figure 3 It is a structural schematic diagram of the rotating assembly and the distance measuring assembly provided by the present invention;

[0060] Figure 4 is a top view of the second rotating disk provided by the present invention;

[0061] Figure 5 It is a flow chart of the control method of the vacuum processing equipment provided by the present invention.

[0062] In the figure:

[0063] 1. Rotating shaft assembly; 2. Rotating assembly; 3. Distance measuring assembly; 4. Clamping assembly;

[0064] 21. Support member; 22. First rotating disk; 221. Ring; 222. Center rotating disk; 223. Connecting rod; 224. Detection boss; 23. Second rotating disk; 231. Positioning block;

[0065] 41. Robotic arm. DETAILED DESCRIPTION

[0066] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0067] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0068] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0069] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0070] like Figures 1 to 4 As shown, the present embodiment provides a vacuum processing device, which includes a bracket, a rotating shaft assembly 1, a rotating assembly 2, a distance measuring assembly 3 and a monitoring assembly. The bracket is arranged in a vacuum processing chamber, the rotating shaft assembly 1 can be rotatably connected to the bracket, the rotating assembly 2 includes a support 21 and a first rotating disk 22 and a second rotating disk 23 connected to both ends of the support 21, a receiving space is formed between the first rotating disk 22 and the support 21, the workpiece assembly can be received in the receiving space and carried on the second rotating disk 23, the first rotating disk 22 is provided with a hollow area, and the area of ​​the workpiece assembly facing the hollow area is the detection area; the first rotating disk 22 is connected to the rotating shaft assembly 1, and the rotating shaft assembly 1 can drive the rotating assembly 2 to rotate, thereby driving the workpiece assembly to rotate. The component assembly rotates; the distance measuring component 3 is arranged outside the vacuum processing chamber, and the distance measuring component 3 is arranged on the side of the first rotating disk 22 away from the second rotating disk 23. The cavity wall of the vacuum processing chamber is provided with a light hole, and the distance measuring optical fiber of the distance measuring component 3 can pass through the light hole to detect the distance of the detection area; the shaft assembly 1 and the distance measuring component 3 are both connected to the monitoring component for communication, so that the monitoring component can control the shaft assembly 1 and the distance measuring component 3; according to the principle of three points forming a plane, by driving the rotating component 2 to rotate one circle, the distance along the axis direction of the detection area when the first rotating disk 22 rotates to at least three different angles is detected by using the distance measuring component 3, and compared. If the distance values ​​are equal, it can be determined that the workpiece is placed horizontally in the second rotating disk 23. In this embodiment, the workpiece can be a wafer, a substrate, or other workpiece that needs to be detected horizontally; wherein the surface to be detected of the wafer, substrate, or other workpiece that needs to be detected horizontally can be a horizontal surface, a surface with a centrally symmetrical protrusion or depression, or the like.

[0071] Specifically, the first rotating disk 22 includes a connecting rod 223 and a ring 221 and a center rotating disk 222 connected to both ends of the connecting rod 223, the center rotating disk 222 is connected to the rotating shaft assembly 1, the ring 221 is connected to the support 21, the ring 221 and the center rotating disk 222 are spaced and concentrically arranged, and a hollow area is formed between the ring 221, the connecting rod 223 and the center rotating disk 222, so that the ranging light of the ranging assembly 3 can pass through the first rotating disk 22 to detect the distance of the detection area. Specifically, multiple connecting rods 223 can be provided, and the multiple connecting rods 223 are divergently spaced and arranged between the center rotating disk 222 and the ring 221, so as to form multiple hollow areas.

[0072] In the vacuum processing equipment of the present embodiment, a plurality of rotating components 2 are arranged in the film forming chamber, and each rotating component 2 is respectively provided with a corresponding shaft component 1, so that each rotating component 2 can rotate under the drive of the corresponding shaft component 1, and a revolution bracket and a revolution shaft are also arranged in the film forming chamber, the revolution shaft can be rotatably connected to the revolution bracket, and a plurality of connecting parts are arranged at circumferential intervals of the revolution shaft, and a plurality of shaft components 1 are respectively connected to the plurality of connecting parts, and the rotation of the revolution shaft can drive the plurality of shaft components 1 to rotate around the revolution bracket, so as to drive the plurality of rotating components 2 to rotate around the revolution bracket, and rotate the plurality of rotating components 2 to the film forming processing position for processing in turn, so as to realize the simultaneous placement of a plurality of workpiece components in the film forming chamber, thereby improving the film forming processing efficiency.

[0073] In order to allow the surface of the workpiece assembly facing away from the first rotating disk 22 to be subjected to film forming treatment, the second rotating disk 23 includes an annular structure and a flange arranged on the inner wall of the annular structure, the surface of the flange facing the first rotating disk 22 is a bearing surface, the workpiece assembly can be placed on the bearing surface, and the annular structure is connected to the support 21, so that when the workpiece assembly is placed on the second rotating disk 23, the surface of the workpiece assembly facing away from the first rotating disk 22 can be exposed to the outside world and can be subjected to film forming treatment. At the same time, when the workpiece assembly is not placed in the second rotating disk 23, the distance measuring light of the distance measuring assembly 3 can pass through the second rotating disk 23, and the distance detected by the distance measuring assembly 3 can intuitively determine whether the workpiece assembly is placed in the second rotating disk 23.

[0074] In order to facilitate the positioning of the workpiece assembly on the second rotating disk 23, in the vacuum processing equipment of the present embodiment, a positioning block 231 is provided on the second rotating disk 23, and the positioning block 231 is provided on the inner wall of the annular structure, and the positioning block 231 is located on the side of the flange close to the first rotating disk 22, and is used to position the workpiece assembly on the second rotating disk 23. When the workpiece assembly needs to be placed on the second rotating disk 23, the positioning structure on the workpiece assembly is aligned with the positioning block 231 on the second rotating disk 23, and then the workpiece assembly is placed on the second rotating disk 23, which can achieve accurate placement of the workpiece assembly on the second rotating disk 23 and prevent the position of the workpiece assembly on the second rotating disk 23 from deviating. At the same time, by cooperating the positioning structure on the workpiece assembly with the positioning block 231, the workpiece assembly can be prevented from moving during the rotation process, resulting in deviations when the workpiece assembly is subjected to film forming treatment, and the workpiece is scrapped.

[0075] Specifically, the workpiece assembly includes a workpiece and a workpiece pallet. The workpiece is placed in the workpiece pallet. The workpiece pallet is provided with a cross-section. By engaging the cross-section of the workpiece pallet with the positioning block 231 of the second rotating disk 23, the workpiece assembly can be positioned on the second rotating disk 23. At the same time, the workpiece assembly can be prevented from shifting during rotation.

[0076] In order to realize the picking up and transfer of the workpiece assembly on the rotating assembly 2, the vacuum processing equipment also includes a clamping assembly 4, which is arranged on one side of the rotating assembly 2 and is used to move the workpiece assembly out of or into the rotating assembly 2; the clamping assembly 4 includes a manipulator 41, and the manipulator 41 can be extended and retracted in the direction toward the rotating assembly 2 to place the workpiece assembly into or move it out of the rotating assembly 2.

[0077] Specifically, two support members 21 are provided, and an inlet and outlet are formed between the two support members 21. The manipulator 41 can enter the rotating assembly 2 through the inlet and outlet to place the workpiece assembly into or remove the rotating assembly 2. The manipulator 41 is communicatively connected with the monitoring assembly to move the processed workpiece assembly out of the rotating assembly 2 and place the workpiece assembly to be processed into the rotating assembly 2 for film forming treatment.

[0078] In order to determine the reference point of the rotating component 2 through the ranging component 3 and prevent the robot 41 from interfering with the support 21 when picking up the workpiece component, the first rotating disk 22 also includes a detection boss 224, and the detection boss 224 is arranged on the connecting rod 223. The ranging optical fiber of the ranging component 3 can pass through the light-through hole to detect the distance of the boss 224. When the distance detected by the ranging component 3 is the distance of the detection boss 224, the position can be determined as the reference point position.

[0079] Furthermore, the detection boss 224 is arranged directly above the support member 21. By detecting the reference point through the distance measuring component 3, the position of the support member 21 can be determined, thereby preventing the manipulator 41 from touching the support member 21 when placing the workpiece component in or out of the rotating component 2, thereby hindering the placement or removal of the workpiece component.

[0080] In order to more conveniently place the workpiece assembly into or out of the rotating assembly 2, a lifting assembly is provided on the side of the second rotating disk 23 facing away from the first rotating disk 22. The output end of the lifting assembly can pass through the annular mechanism, and the output end is used to carry the workpiece assembly to move the workpiece assembly to the transporting station and the film forming processing station. When the lifting assembly moves the workpiece assembly to the transporting station, the output end docks with the manipulator 41. When the lifting assembly moves the workpiece assembly to the film forming processing station, the output end docks, so that when the workpiece assembly is transferred, the manipulator 41 and the workpiece assembly are in the same horizontal plane, so that the manipulator 41 can transfer the workpiece assembly.

[0081] Specifically, the lifting component may be a telescopic ejector pin, and of course may also be another telescopic rod-shaped structure or a liftable platform.

[0082] In the vacuum processing equipment of this embodiment, the distance measuring component 3 includes a distance measuring sensor, which is electrically connected to the monitoring component to detect the distances of different areas under different circumstances and transmit the detected data to the monitoring component. The monitoring component processes the collected data to better control the vacuum processing equipment.

[0083] like Figure 5 As shown, this embodiment also provides a control method for a vacuum processing device, which is applied to the above-mentioned vacuum processing device, and includes the following steps: detecting whether the workpiece component is placed horizontally in the rotating component 2, including the following steps:

[0084] Control the rotating shaft assembly 1 to drive the rotating assembly 2 to rotate to at least two positions;

[0085] S101, controlling the rotating shaft assembly 1 to drive the rotating assembly 2 to rotate to a first position, the distance measuring assembly 3 detects the distance value PV1 of the workpiece assembly, and the distance measuring assembly 3 feeds back the distance value PV1 to the monitoring assembly;

[0086] S102, controlling the rotating shaft assembly 1 to drive the rotating assembly 2 to rotate to the second position, the distance measuring assembly 3 detects the distance value PV2 of the workpiece assembly, and the distance measuring assembly 3 feeds back the distance value PV2 to the monitoring assembly;

[0087] S103, controlling the rotating shaft assembly 1 to drive the rotating assembly 2 to rotate to the Nth position, the distance measuring assembly 3 detects the distance value PVn of the workpiece assembly, and the distance measuring assembly 3 feeds back the distance value PVn to the monitoring assembly;

[0088] S104, the monitoring component determines whether PV1, PV2 ... PVn are consistent with the preset SV1, SV2 ... SVn, where SV1, SV2 ... SVn are the first group of preset ranges; wherein n is greater than or equal to 2;

[0089] S105 , if yes, determine that the workpiece assembly is placed horizontally in the rotating assembly 2 .

[0090] Among them, SV1, SV2...SVn can be the allowable ranges of distance values ​​PV1, PV2...PVn at the first position, second position...N position of the workpiece assembly detected by the ranging component 3 when the workpiece assembly is placed horizontally in the rotating component 2; SV1, SV2...SVn can be obtained by actual measurement and adding tolerance based on the placement position and measurement configuration of the workpiece assembly in the rotating component 2.

[0091] It can be understood that the first position, the second position...the Nth position are all within the detection area of ​​the workpiece assembly; and the first position, the second position...the Nth position can be determined by controlling the rotation angle of the workpiece assembly; when describing controlling the rotating shaft assembly 1 to drive the rotating assembly 2 to rotate to a certain position, the position here can refer to a certain rotation angle.

[0092] For a flat-plate-shaped workpiece, within its detection area, SV1, SV2...SVn can be equal or approximately equal. There are many ways to determine whether a certain position of the workpiece assembly detected by the ranging component 3 can be used as the first position or the second position...or the Nth position. An implementation method is given below. Take the first position as an example to illustrate how to determine whether a certain position of the workpiece assembly detected by the ranging component 3 can be used as the first position. Assuming that QVx is the range of possible distance values ​​at a certain position X on the workpiece assembly detected by the ranging component 3 when the workpiece assembly is placed in a possible position in the rotating component 2, QVx can be measured according to the possible placement position and measurement configuration of the workpiece assembly in the rotating component 2, and the tolerance is increased to obtain. If the distance value of the workpiece assembly actually detected by the ranging component 3 at the aforementioned position X is PVx, and PVx is within the range of QVx, it means that position X can be used as the first position. On the contrary, if PVx is not within the range of QVx, it means that position X cannot be used as the first position. At this time, the workpiece assembly can be rotated and PVy can be measured at another position Y, and then QVy and PVy can be compared, and so on, until PVn falls within the corresponding range of QVn, then the first position can be found.

[0093] It can be understood that the greater the relative distance between the first position, the second position ... the Nth position, the higher the sensitivity of detecting whether the workpiece assembly is horizontal. When only the first position and the second position are detected, and these two positions are on a certain diameter passing through the rotation center of the workpiece assembly, the sensitivity of detecting whether the workpiece assembly is horizontal is higher. When only the first position, the second position and the third position are detected, and these three positions equally divide the circumference of a certain circumference passing through the rotation center of the workpiece assembly, the sensitivity of detecting whether the workpiece assembly is horizontal is higher.

[0094] The control method of the vacuum processing equipment provided in this embodiment drives the rotating component 2 to rotate to at least two different angles through the rotating shaft component 1, uses the distance measuring component 3 to respectively detect the distance values ​​of the workpiece component, and feeds back at least two distance values ​​to the monitoring component. The monitoring component determines whether the at least two distance values ​​are consistent with the first set of preset ranges, and can determine whether the workpiece component is placed horizontally. The entire detection step is simple, highly reliable, and cost-saving. Specifically, the distance values ​​of the workpiece component at three, four or more angles can be detected without limitation. The more detections, the higher the accuracy, and the fewer detections, the faster. In particular, multiple angle positions are evenly spaced, so that the detection accuracy can be further improved.

[0095] In the control method of the vacuum processing equipment of this embodiment, before detecting whether the workpiece assembly is horizontally placed in the rotating assembly 2, the method further includes:

[0096] Detecting whether a workpiece assembly is placed in the rotating assembly 2 includes the following steps:

[0097] S201, when the rotating component 2 is controlled to rotate to the first position, the distance measuring component 3 detects the distance value PV1' and feeds the distance value PV1' back to the monitoring component;

[0098] S202, the monitoring component determines whether A is consistent with SV1;

[0099] S203: If yes, determine whether a workpiece assembly is placed in the rotating assembly 2.

[0100] In the control method of the vacuum processing equipment of the present embodiment, by controlling the rotating component 2 to rotate to the first position, the distance value is detected by the distance measuring component 3 and fed back to the monitoring component, and the monitoring component determines whether the distance value is within the first preset range, so as to determine whether a workpiece component is placed in the rotating component 2. The whole detection step is simple, and the information on whether the workpiece component is placed in the rotating component 2 can be quickly obtained before the film forming process is performed on the workpiece component, so as to prevent the rotating component 2 without the workpiece component being placed from being directly subjected to the film forming process, thereby damaging the vacuum processing equipment and increasing the cost.

[0101] In order to prevent the manipulator 41 from touching the support 21 during the process of transferring the workpiece assembly, before detecting whether the workpiece assembly is placed horizontally in the rotating assembly 2, it also includes: detecting the origin of the rotating assembly 2; controlling the rotating assembly 2 to rotate, the distance measuring assembly 3 detects the distance value A, and feeds it back to the monitoring assembly; the monitoring assembly determines whether A is within the second preset range; if so, the origin is determined to be the current position. When the workpiece assembly needs to be transferred, the inlet and outlet between the support 21 are directed toward the manipulator 41, so that the manipulator 41 can enter and exit the rotating assembly 2 through the inlet and outlet to put the workpiece assembly in or out of the rotating assembly 2, avoiding touching the support 21, and the manipulator 41 cannot enter the rotating assembly 2.

[0102] After detecting the origin of the rotating assembly 2, it also includes: when loading the workpiece, controlling the rotating assembly 2 to rotate to the avoidance position, so that the inlet and outlet are facing the position of the manipulator 41, so that the manipulator 41 can enter the rotating assembly 2 without hindrance to pick up the workpiece assembly; controlling the output end of the lifting assembly to pass through the annular structure, and moving the workpiece assembly to the handling station; controlling the manipulator 41 to put the workpiece assembly on the output end, and controlling the output end of the lifting assembly to descend to the film forming processing position, and placing the workpiece assembly on the bearing surface; when unloading the workpiece, controlling the rotating assembly 2 to rotate to the avoidance position, so that the inlet and outlet are facing the position of the manipulator 41; controlling the output end of the lifting assembly to pass through the annular structure, and moving the workpiece assembly at the film forming processing position to the handling station; controlling the manipulator 41 to clamp the workpiece assembly on the output end, and controlling the manipulator 41 to shorten, and moving the workpiece assembly out of the rotating assembly 2. The above control method can simply and conveniently realize the loading and unloading of the workpiece assembly, and the overall steps are simple and reliable.

[0103] The vacuum processing equipment in this embodiment realizes three types of detection by setting up one distance measuring sensor, thus overcoming the technical defect of the prior art that three distance measuring sensors need to be set up simultaneously to realize the three types of detection, thereby saving costs.

[0104] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. Vacuum processing equipment, It is characterized in that include: A support, wherein the support is arranged in the vacuum processing chamber; A rotating shaft assembly (1), wherein the rotating shaft assembly (1) is rotatably connected to the bracket; The rotating assembly (2) comprises a support (21) and a first rotating disk (22) and a second rotating disk (23) connected to both ends of the supporting assembly (21); a receiving space is formed between the first rotating disk (22), the second rotating disk (23) and the supporting assembly (21); a workpiece assembly can be received in the receiving space and carried by the second rotating disk (23); the first rotating disk (22) is provided with a hollow area, and an area of ​​the workpiece assembly facing the hollow area is a detection area; the first rotating disk (22) is connected to the rotating shaft assembly (1), and the rotating shaft assembly (1) can drive the rotating assembly (2) to rotate; A distance measuring component (3), the distance measuring component (3) being arranged outside the vacuum processing chamber, the distance measuring component (3) being arranged on a side of the first rotating disk (22) away from the second rotating disk (23), a light through hole being opened in a cavity wall of the vacuum processing chamber, and the distance measuring light of the distance measuring component (3) being able to pass through the light through hole and the hollow area to detect the distance of the detection area; A monitoring component, wherein the rotating shaft component (1) and the distance measuring component (3) are both communicatively connected to the monitoring component.

2. The vacuum processing device according to claim 1, It is characterized in that The first rotating disk (22) comprises a circular ring (221), a central rotating disk (222) and a connecting rod (223); the circular ring (221) and the central rotating disk (222) are spaced apart and concentrically arranged; the circular ring (221) and the central rotating disk (222) are connected to two ends of the connecting rod (223); a hollow area is formed between the circular ring (221), the connecting rod (223) and the central rotating disk (222); the central rotating disk (222) is connected to the rotating shaft assembly (1); and the circular ring (221) is connected to the supporting member (21).

3. The vacuum processing equipment according to claim 2, It is characterized in that The second rotating disk (23) comprises an annular structure and a flange arranged on the inner wall of the annular structure, the surface of the flange facing the first rotating disk (23) is a bearing surface, the workpiece assembly can be placed on the bearing surface, and the annular structure is connected to the support member (21).

4. The vacuum processing apparatus according to claim 3, It is characterized in that A positioning block (231) is provided on the second rotating disk (23), and the positioning block (231) is arranged on the inner wall of the annular structure. The positioning block (231) is located on a side of the flange close to the first rotating disk (22), and is used to position the workpiece assembly on the second rotating disk (23).

5. The vacuum processing equipment according to claim 3, It is characterized in that The first rotating disk (22) also includes a detection boss (224), and the distance measuring light of the distance measuring component (3) can pass through the light-through hole to detect the distance of the detection boss (224).

6. The vacuum processing apparatus according to claim 5, It is characterized in that The vacuum processing equipment further comprises a clamping assembly (4), wherein the clamping assembly (4) is arranged on one side of the rotating assembly (2), and the clamping assembly (4) comprises a manipulator (41) capable of taking and placing the workpiece assembly, and the manipulator (41) can be extended and retracted in a direction toward or away from the rotating assembly (2) so as to place the workpiece assembly into or remove the workpiece assembly from the rotating assembly (2).

7. The vacuum processing apparatus according to claim 6, It is characterized in that Two support members (21) are provided, an inlet and an outlet are formed between the two support members (21), and the manipulator (41) can pass through the inlet and outlet to put the workpiece assembly into or remove the workpiece assembly from the rotating assembly (2); The manipulator (41) is communicatively connected to the monitoring component.

8. The vacuum processing apparatus according to claim 6, It is characterized in that A lifting assembly is provided on the side of the second rotating disk (23) facing away from the first rotating disk (22), and the output end of the lifting assembly can pass through the annular structure. The output end is used to carry the workpiece assembly to move the workpiece assembly to the transport station and the film forming processing station. When the lifting assembly moves the workpiece assembly to the transport station, the output end is docked with the robot (41). When the lifting assembly moves the workpiece assembly to the film forming processing station, the output end is docked with the flange.

9. The vacuum processing apparatus according to claim 1, It is characterized in that The distance measuring component (3) comprises a distance measuring sensor, and the distance measuring sensor is electrically connected to the monitoring component.

10. A method for controlling a vacuum processing device, applied to the vacuum processing device according to any one of claims 1 to 9, It is characterized in that include: Check whether the workpiece assembly is placed horizontally in the rotating assembly (2): Controlling the rotating shaft assembly (1) to drive the rotating assembly (2) to rotate to at least two positions; The rotating shaft assembly (1) is controlled to drive the rotating assembly (2) to rotate to a first position, the distance measuring assembly (3) detects a distance value PV1 of the workpiece assembly, and the distance measuring assembly (3) feeds back the distance value PV1 to the monitoring assembly; The rotating shaft assembly (1) is controlled to drive the rotating assembly (2) to rotate to a second position, the distance measuring assembly (3) detects a distance value PV2 of the workpiece assembly, and the distance measuring assembly (3) feeds back the distance value PV2 to the monitoring assembly; The rotating shaft component (1) is controlled to drive the rotating component (2) to rotate to the Nth position, the distance measuring component (3) detects the distance value PVn of the workpiece component, and the distance measuring component (3) feeds back the distance value PVn to the monitoring component; The monitoring component determines whether PV1, PV2, ... PVn are consistent with the preset SV1, SV2, ... SVn, respectively, where SV1, SV2, ... SVn are the first group of preset ranges; If so, it is determined that the workpiece assembly is placed horizontally in the rotating assembly (2).

11. The method for controlling a vacuum processing apparatus according to claim 10, It is characterized in that The second rotating disk (23) comprises an annular structure and a flange arranged on the inner wall of the annular structure, the surface of the flange facing the first rotating disk (22) being a bearing surface, the workpiece assembly being able to be placed on the bearing surface, and the annular structure being connected to the support member (21); when the workpiece assembly is arranged on the bearing surface, the distance measuring assembly (3) measures a distance of a first preset range SV, and before detecting whether the workpiece assembly is placed horizontally in the rotating assembly (2), the distance measuring assembly (3) further comprises: Detecting whether the workpiece assembly is placed in the rotating assembly (2): When the rotating component (2) is controlled to rotate to a first position, the distance measuring component (3) detects a distance value PV1' and feeds the distance value PV1' back to the monitoring component; The monitoring component determines whether PV1' is consistent with SV1; If so, it is determined that the workpiece assembly is placed in the rotating assembly (2).

12. The method for controlling a vacuum processing apparatus according to claim 11, It is characterized in that The first rotating disk (22) comprises a circular ring (221), a central rotating disk (222) and a connecting rod (223); the circular ring (221) and the central rotating disk (222) are spaced apart and arranged concentrically; the circular ring (221) and the central rotating disk (222) are connected to two ends of the connecting rod (223); the hollow area is formed between the circular ring (221), the connecting rod (223) and the central rotating disk (222); the central rotating disk (222) is connected to the rotating shaft assembly (1 ), the ring (221) is connected to the support member (21); the first rotating disk (22) further comprises a detection boss (224), the detection boss (224) is arranged on the connecting rod (223), the distance measuring light of the distance measuring component (3) can pass through the light hole to detect the distance of the detection boss (224), and the distance of the detection boss (224) is within a second preset range; before detecting whether the workpiece component is horizontally placed in the rotating component (2), it also comprises: Detecting the origin of the rotating component (2): The rotating component (2) is controlled to rotate, and the distance measuring component (3) detects a distance value A and feeds it back to the monitoring component; The monitoring component determines whether A is within a second preset range; If so, the origin is determined to be the current position.

13. The control method of the vacuum processing equipment according to claim 12, It is characterized in that The vacuum processing equipment further comprises a clamping assembly (4), the clamping assembly (4) being arranged at one side of the rotating assembly (2) and being used for moving the workpiece assembly out of or into the rotating assembly (2), the clamping assembly (4) comprising a manipulator (41), the manipulator (41) being capable of extending and retracting in a direction toward the rotating assembly (2) so as to move the workpiece assembly into or out of the rotating assembly (2); the support member (21) is provided with at least one inlet and outlet so as to form an inlet and outlet, and the manipulator (41) is capable of moving into and out of the rotating assembly (2) through the inlet and outlet so as to move the workpiece assembly into or out of the rotating assembly (2); The manipulator (41) is communicatively connected to the monitoring component; A lifting assembly is provided on the side of the second rotating disk (23) facing away from the first rotating disk (22); the output end of the lifting assembly can pass through the annular structure to move the workpiece assembly to the transporting position and the film forming processing position; the output end is used to carry the workpiece assembly; when the lifting assembly moves the workpiece assembly to the transporting position, the output end docks with the manipulator (41); when the lifting assembly moves the workpiece assembly to the film forming processing position, the output end docks with the flange; After detecting the origin of the rotating component (2), the method further comprises: Workpiece loading: Controlling the rotating assembly (2) to rotate to an avoidance position so that the inlet and outlet face the position of the manipulator (41); Control the output end of the lifting assembly to pass through the annular structure and be lifted to the handling station; Controlling the manipulator (41) to extend so as to place the workpiece assembly onto an output end; Controlling the output end of the lifting assembly to descend to the film forming processing position, placing the workpiece assembly on the carrying surface, and retracting the manipulator (41); Workpiece unloading: Controlling the rotating assembly (2) to rotate to an avoidance position so that the inlet and outlet face the position of the manipulator (41); Controlling the output end of the lifting assembly to pass through the annular structure to move the workpiece assembly at the film forming processing position to the transporting position; Controlling the manipulator (41) to extend so as to remove the workpiece assembly on the output end; The robot arm (41) is controlled to retract, and the workpiece assembly is moved out of the rotating assembly (2).

Images