Digital image detection and analysis system for micro mechanical structure

A technology of micro-mechanical structure and analysis system, which is applied in the direction of analyzing materials, electrical digital data processing, and material analysis through optical means, etc., to achieve a wide range of applications

Inactive Publication Date: 2005-09-14
NORTHWESTERN POLYTECHNICAL UNIV
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AI Technical Summary

Problems solved by technology

[0004] In order to overcome the shortcomings that the existing image measurement and analysis system cannot complete the comprehensive measurement and analysis tasks of the three-dimensional surface of the micro-mechanical structure, the present invention establishes an image measurement and analysis system from two aspects of measurement hardware and processing software. , surface defect area and defect ratio, surface topography parameters such as surface roughness, skewness and flatness, fully complete the three-dimensional surface measurement and analysis function of micro-mechanical structures

Method used

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  • Digital image detection and analysis system for micro mechanical structure
  • Digital image detection and analysis system for micro mechanical structure
  • Digital image detection and analysis system for micro mechanical structure

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Embodiment Construction

[0033] We have carried out specific tests and applications for this entire system. The 753×582 pixel area array CCD camera, fluorescent light source (35W) / parallel light source (20W~50W), microscope objective lens (Na0.5) / ordinary objective lens (f6mm) and Pentium II 300MHz processor were used for implementation. Use this software system for data processing and display.

[0034] 1. Examples of depth measurement and 3D reconstruction

[0035] The system is used to measure the depth parameters of the microstructure of the microcantilever beam, and to reconstruct it in three dimensions. The structure of the micro-cantilever beam is shown in Figure 6 shown.

[0036] In the case of matching the calibration and measurement conditions, we carried out experimental tests and least square linear fitting of the data on five groups of samples, and used the optical section method (accuracy 1 μm) for system calibration. Table 1. The experimental calibration and measurement results are ...

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Abstract

The invention relates to a micromachine construction digital picture detection and analysis system, which belongs to optical electromechanical integration field.The characteristics of this system are as follows: light source supplies brightness needed by the detected object; CCD lens ingests visual signal of the detected object picture information through microscope 2; picture gathering card transforming digital signal D / A; then picture digital signal entering detection and analysis system. The said detection and analysis system comprises three-dimensional physical dimension measurement modular, surface defects measurement modular and surface roughness, skewness degree and flattening measurement modular.

Description

technical field [0001] The invention relates to a digital image detection and analysis system of a micromechanical structure, which is an optical-mechanical-electrical integrated image detection and analysis system utilizing digital image processing technology, and belongs to the technical field of optical-mechanical-electrical integration. Background technique: [0002] At present, known measurement and analysis systems using digital image processing technology, such as SimplePCI from Compix Corporation in the United States, Image-Pro from MediaCybernetics Corporation in the United States, etc., have functions such as image acquisition, image processing, image measurement and analysis, and image database. They are widely used in biology, medicine, scientific research and other fields mainly by completing particle counting and quantification, area morphology analysis, etc.; at the same time, they can also measure geometric dimensions, thereby completing the measurement and an...

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): G01N21/84G06F19/00
Inventor苑伟政李晓莹马炳和邓进军王小伟王永强
OwnerNORTHWESTERN POLYTECHNICAL UNIV