Gas sensor
a technology of gas sensors and sensors, applied in the field of gas sensors, can solve the problems of large laboratory tools with spectroscopic sensitivity, relative cost,
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[0021]In a first embodiment, a sensor-structure is constructed by fabricating a multilayer stack. The multilayer stack is made by deposition of a lower and an upper layer of ferromagnetic metal, separated by a ruthenium layer, the upper ferromagnetic layer in one embodiment being made of cobalt. This multilayer structure exhibits a giant magneto resistive effect as described in the textbook Giant Magneto-Resistance Devices, Springer Series in Surface Sciences, Vol. 40, Hirota, E., Sakakima, H., Inomata, K., 2002, IX, ISBN: 978-3-540-41819-1. That is, electrical resistance of the multilayer structure is low or high when the magnetization directions of the upper and the lower magnetic layers are parallel or at an angle, respectively. The lower magnetic layer is fabricated in such a manner (e.g. multiple mono layers) that its magnetization direction remains the same, while the upper layer is fabricated in such a manner (as will be subsequently explained) that its magnetization directio...
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