A Gradient Correction Method of Surface Shape Error Based on Gradient Elastic Polishing Tool

A surface error, grinding and polishing technology, applied in the direction of grinding tools, manufacturing tools, workpiece feed movement control, etc., can solve the problems of low processing efficiency and processing quality, avoid inconsistencies in removal and surface quality degradation, and prolong use. Longevity, the effect of reducing the difficulty of planning

CN110405621BActive Publication Date: 2021-02-09ZHEJIANG UNIV OF TECH
5 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2021-02-09

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses a surface shape error classification correction method based on a gradient elastic polishing tool, comprising the following steps: (1) determining the theoretical surface shape of the workpiece according to the processing requirements of the workpiece; (2) detecting the actual surface shape characteristics of the workpiece; (3) Fit the actual surface shape of the workpiece with the theoretical surface shape to determine the surface error of the workpiece, use the contour line processing method to obtain the residual error and grade the residual error; (4) select the appropriate one according to the material removal distribution A polishing tool with a combination of parameters; (5) According to the determined removal depth, select the appropriate process parameters from the removal function library, plan the appropriate path and the appropriate feed speed to achieve uniform removal of each single layer. The processing method of the present invention can better realize the quantitative removal on demand, and the material removal is predictable, so the processing efficiency and processing quality can be improved.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to the technical field of ultra-precision machining, and more specifically, to a method for grading and correcting surface shape errors based on gradient elastic polishing tools. Background technique

[0002] With the rapid development of high-tech industries, hard and brittle materials such as sapphire, silicon wafers, and optical glass have been widely used in the optical and electronic industries because of their high hardness, high melting point, and high wear resistance. The surface shape accuracy and surface quality of such materials have a key influence on the quality and life of the device.

[0003] At present, the processing methods for such hard and brittle materials mainly include stress disk, magneto-fluidic flow, ion beam, jet flow, etc. While making relevant technical breakthroughs, there are uneven material removal, poor processing efficiency and quality controllability, etc. The problem is that it is impossible to...

Examples

Embodiment Construction

[0025] The present invention will be further described below in conjunction with accompanying drawing:

[0026] like Figure 1~5 as shown, figure 2 It is a schematic diagram of the hierarchical modification method involved in the present invention, in which 1 is the actual surface shape of the workpiece to be processed, and 2 is the theoretical surface shape of the workpiece to be processed; the present invention proposes a surface error classification based on gradient elastic polishing tools Correction method, this modification method comprises the following steps:

[0027] (1) Determine the theoretical surface shape of the workpiece according to the processing requirements of the workpiece;

[0028] (2) Use a laser interferometer to detect the actual surface shape characteristics of the workpiece, determine the difference PV value between the maximum peak value and the valley value of the initial surface shape of the workpiece, and the root mean square value RMS value of...