Evaporation equipment anti-corrosion cold shield for preparing perovskite material by full-dry method

Abstract

The invention belongs to the technical field of photovoltaic power generation, and discloses an anti-corrosion cold shield of evaporation equipment for preparing a perovskite material by a full-dry method, the evaporation equipment comprises an evaporation source, and perovskite material molecules are evaporated by the evaporation source; the anti-corrosion cold shield comprises a vacuum cavity, a cold shield plate, a cold shield plate fixing column, a vapor chamber, a low-temperature pump, a refrigerant pipe, a vapor chamber fixing column and a cold trap. The cold shield plate comprises a plate main body, the edge of the cold plate main body is provided with a bending part, and the bending part is bent towards the low-temperature pump. The low-temperature pump is protected through the anti-corrosion cold shield plate, maintenance of the low-temperature pump is reduced, cost is saved, and efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic power generation, and in particular to an anti-corrosion cold shield for preparing perovskite material evaporation equipment by a full dry method. Background Art

[0002] In the photovoltaic field, the development of perovskite technology is accelerating. Perovskite is regarded as one of the new generation photovoltaic technologies with the most commercial prospects due to its high conversion efficiency, low cost and easy preparation.

[0003] Perovskite cells are a type of solar cell that uses perovskite-type organic metal halide semiconductors as light-absorbing materials. They belong to the third generation of solar cells and have the advantages of high light absorption, low cost and easy preparation, good weak light effect, strong light transmittance and flexibility. The perovskite technology route mainly includes crystalline silicon / perovskite stacked cells, all-perovskite stacked cells, thin-film cells (such as copper indium gallium selenide) / perovskite stacked cells, etc. There are various technical routes for perovskite solar cells, and each route has its own unique advantages and challenges. The crystalline silicon / perovskite stacked cell technology route stacks the perovskite layer on top of the traditional crystalline silicon solar cell to form a "tandem" cell that can absorb a wider solar spectrum. The conversion efficiency of this technology has reached 33.2%, showing its great potential in improving the efficiency of photoelectric conversion.

[0004] The fully dry method is used in the preparation of crystalline silicon / perovskite tandem cells. The fully dry method for preparing perovskite uses a vacuum coating method, which has the advantages of better control of large-area thickness and uniformity, and has lower requirements for substrate flatness. As a new thin-film solar technology, perovskite is still in the stage of moving out of the laboratory and entering the industrialization stage, and the mass production process equipment in various stages is not yet mature. Among them, the above-mentioned vacuum evaporation process equipment is particularly immature.

[0005] In the fully dry preparation of perovskite solar cells, it is common practice to configure a cryopump as a high vacuum component of the exhaust system on the evaporation equipment. The cryopump plays an indispensable role in the vacuum system through its unique low-temperature condensation and adsorption mechanism. Cryopumps are used in both environments that require high-purity vacuum and for the control and analysis of specific gases.

[0006] Although an anti-fouling plate is installed inside the vacuum chamber for protection, some perovskite materials will still enter the cryopump, which may cause the cryopump's pumping capacity to decrease at best and directly damage it at worst.

[0007] Since perovskite materials are corrosive, the perovskite materials adsorbed into the cryopump will corrode the parts and even the pump body inside the cryopump, resulting in a decrease in the pumping capacity of the cryopump, thereby affecting the vacuum degree of the entire vacuum coating system. The reduced vacuum degree affects the uniformity of film formation and reduces the life of the device. In addition, this problem will lead to frequent maintenance or even replacement of the cryopump, increasing equipment maintenance costs and overall machine operating efficiency. The current practice is mainly to install a filter at the pump port to reduce the amount of perovskite material entering the pump body and extend the maintenance time, but this will affect the pumping efficiency of the cryopump, and does not fundamentally eliminate the corrosion of the material to the cryopump, and the problem has not been fundamentally solved. Summary of the invention

[0008] The object of the present invention is to provide a fully dry method for preparing a corrosion-resistant cold shield for a perovskite material evaporation device, so as to solve the problem that a cryopump is easily corroded by the perovskite material.

[0009] The purpose of the present invention can be achieved by the following technical solutions: an anti-corrosion cold shield for perovskite evaporation equipment, the evaporation equipment includes an evaporation source, the evaporation source evaporates perovskite material molecules, the anti-corrosion cold shield includes a vacuum cavity, a cold shield plate, a cold shield plate fixing column, a heat spreader, a cryogenic pump, a refrigerant pipe, a heat spreader fixing column and a cold trap;

[0010] The evaporation source is arranged in the vacuum chamber, the vacuum chamber is connected to the cryopump, the cryopump is used to provide a vacuum environment for the vacuum chamber, the cold shield plate is arranged at the connection between the cryopump and the vacuum chamber, the cold shield plate is mounted inside the vacuum chamber through the cold shield plate fixing column, the heat spreader is mounted inside the vacuum chamber through the heat spreader fixing column, the heat spreader is located on the side of the cold shield plate facing the cryopump, the refrigerant pipe is arranged on the heat spreader, and the refrigerant pipe is connected to the cold trap.

[0011] Preferably, the cold shield plate comprises a plate body, an edge of the cold plate body is provided with a bending portion, and the bending portion is bent toward the cryopump.

[0012] The working principle of the present invention is to deposit the perovskite material onto the cold shield cover plate through the cooperation of components such as the refrigerant pipe, the heat spreader and the cold shield plate under the condition of continuous production, so as to prevent the perovskite material from entering the cryopump, so as to achieve the ultimate goal of protecting the cryopump from being corroded by the perovskite material.

[0013] The beneficial effects of the present invention are:

[0014] 1. The present invention can prevent the perovskite material from corroding the cryogenic pump;

[0015] Second, the present invention can reduce maintenance costs and improve efficiency;

[0016] Third, the preparation cost of the present invention is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1It is a schematic diagram of the present invention.

[0018] In the figure, 1. vacuum chamber; 2. cold shield plate; 3. cold shield plate fixing column; 4. heat spreader; 5. cryopump; 6. refrigerant pipe; 7. heat spreader fixing column; 8. cold trap; 9. evaporation source; 10. perovskite material. DETAILED DESCRIPTION

[0019] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0020] like Figure 1 As shown, the present invention is a fully dry method for preparing an anti-corrosion cold shield for perovskite material evaporation equipment, the evaporation equipment includes an evaporation source 9, the perovskite material 10 molecules evaporated from the evaporation source 9 are splashed onto the substrate material, and the anti-corrosion cold shield includes a vacuum cavity 1, a cold shield plate 2, a cold shield plate fixing column 3, a heat plate 4, a cryogenic pump 5, a refrigerant pipe 6, a heat plate fixing column 7 and a cold trap 8;

[0021] The evaporation source is arranged in the vacuum chamber 1, and the vacuum chamber 1 is connected to the cryopump 5. The cryopump 5 is used to provide a vacuum environment for the vacuum chamber 1. The cold shield plate 2 is arranged at the connection between the cryopump 5 and the vacuum chamber 1. The cold shield plate 2 is mounted inside the vacuum chamber 1 through the cold shield plate fixing column 3. The heat spreader 4 is mounted inside the vacuum chamber 1 through the heat spreader fixing column 7. The heat spreader 4 is located on the side of the cold shield plate 2 facing the cryopump 5. The refrigerant pipe 6 is arranged on the heat spreader 4, and the refrigerant pipe 6 is connected to the cold trap 8.

[0022] The cold shield plate comprises a plate body, an edge of which is provided with a bending portion, and the bending portion is bent toward the cryopump.

[0023] The working principle of the present invention is to deposit the perovskite material onto the cold shield cover plate through the cooperation of components such as the refrigerant pipe, the heat spreader and the cold shield plate under the condition of continuous production, so as to prevent the perovskite material from entering the cryopump, so as to achieve the ultimate goal of protecting the cryopump from being corroded by the perovskite material.

[0024] In the present invention, the temperature of the cold trap should be reduced to -20 to -25°C from the start of pre-evacuation of the vacuum chamber to before reaching the evaporation vacuum degree; during continuous evaporation, it should maintain normal operation at -20 to -25°C. The cold trap transports the refrigerant to the top of the cryopump through the refrigerant pipe, and the cold energy is evenly distributed on the heat spreader through the heat spreader. The cold energy on the heat spreader transfers the cold energy to the cold shield plate through radiation, and its temperature is reduced, forming a low-temperature environment around it. When the perovskite material is evaporated, the perovskite material evaporated from the evaporation source will be captured by the cold shield plate when passing through the cold shield plate above the cryopump, and will be deposited on the upper surface of the cold shield plate and will not enter the cryopump, thereby protecting the cryopump from corrosion.

[0025] The innovation of the present invention is mainly reflected in the use of a cold shield structure, which ensures that the perovskite material will not be deposited in the cryopump and corrode the cryopump without affecting the vacuum efficiency of the cryopump. Therefore, this design of the present invention solves the problem of corrosion of the cryopump by the material in the existing all-dry method for preparing perovskite evaporation equipment.

[0026] The anti-corrosion cold shield plate can protect the cryogenic pump, reduce the maintenance of the cryogenic pump, save costs and improve efficiency.

[0027] The advantages of the anti-corrosion cold screen design of the all-dry method for preparing perovskite material evaporation equipment: It prevents the perovskite material from entering the cryopump and corroding the cryopump, thus protecting the cryopump. It reduces the maintenance cost, improves the equipment operation efficiency, and ensures the uniformity of the coating.

Claims

1. A fully dry method for preparing a corrosion-resistant cold shield for a perovskite material evaporation device, wherein the evaporation device comprises an evaporation source, and the evaporation source evaporates perovskite material molecules, characterized in that: The anti-corrosion cold shield includes a vacuum chamber, a cold shield plate, a cold shield plate fixing column, a heat sink, a cryogenic pump, a refrigerant pipe, a heat sink fixing column and a cold trap; The evaporation source is arranged in the vacuum chamber, the vacuum chamber is connected to the cryopump, the cryopump is used to provide a vacuum environment for the vacuum chamber, the cold shield plate is arranged at the connection between the cryopump and the vacuum chamber, the cold shield plate is mounted inside the vacuum chamber through the cold shield plate fixing column, the heat spreader is mounted inside the vacuum chamber through the heat spreader fixing column, the heat spreader is located on the side of the cold shield plate facing the cryopump, the refrigerant pipe is arranged on the heat spreader, and the refrigerant pipe is connected to the cold trap.

2. The anti-corrosion cold shield for preparing perovskite material evaporation equipment by the all-dry method according to claim 1, characterized in that: The cold shield plate comprises a plate body, an edge of which is provided with a bending portion, and the bending portion is bent toward the cryopump.

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