Gas-sensitive sensor calibration and reliability testing system
A technology of gas sensor and test system, applied in instruments, measuring devices, scientific instruments, etc., to achieve the effect of precise control
Inactive Publication Date: 2011-01-05
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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In view of this, the main purpose of the present invention is to provide a gas sensor calibration and reliability testing system to solve the shortcomings of the existing dynamic gas sensor performance testing device, to achieve precise control of the gas concentration to be measured, Test of different gases, and precise control of device temperature
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Abstract
The invention relates to the field of testing technique of gas sensor and discloses a system for testing calibration and reliability of gas sensor. The system comprises of inlet unit, gas flow monitor, components control unit, gas mixed cavity, vacuum testing cavity and sensor electric parameter measuring device. Gas in said inlet unit is entered in gas mixed cavity to premix under the control ofgas flow monitor and components control unit, and then to vacuum testing cavity which has gas sensor to be determined, the said sensor electric parameter measuring device is connected with vacuum testing cavity to detect capacity of gas sensor to be determined in vacuum testing cavity. The present invention avoids the disadvantages of dynamic gas elements capacity testing device in existence, realizes controlling exactly consistence of gas to be measured, testing different gas and controlling exactly temperature of elements.
Description
A Gas Sensor Calibration and Reliability Test System technical field The invention relates to the technical field of gas sensor testing, in particular to a gas sensor calibration and reliability testing system with fast response speed and precise and controllable gas concentration to be measured. Background technique The early gas sensor test system used a closed air intake system, and its main feature was that the target test gas was directly injected into the closed sensor chamber. This type of test system can only be used to measure the steady-state response of the sensor. Moreover, due to the limitation of the diffusion rate of the gas to be measured in the carrier gas, the time for the sensor to reach a steady state response becomes longer, and after the sensor absorbs the gas, the desorption rate is relatively slow, which is not suitable for collecting a large number of sample data. In order to obtain the dynamic response characteristics of the gas sensor, a gas fl...
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IPC IPC(8): G01N27/00
Inventor 黄钦文陈大鹏景玉鹏欧毅叶甜春
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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