Coplanarity detector for pins of IC chip
A coplanarity, detector technology, applied in instruments, measuring devices, optical devices, etc., can solve the problems of complex objective lens structure, high processing cost, slow detection speed, etc. Small area effect
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[0024] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0025] refer to figure 1 , figure 2 , the present invention is composed of an electromechanical control system, an optical image acquisition system and an automatic identification system, the electromechanical control system is respectively connected with the optical image acquisition system and the automatic identification system, and the optical image acquisition system is a symmetrical dual optical path transfer structure.
[0026] Such as figure 1 As shown, the optical image acquisition system includes an illumination light source box 6, three condenser mirrors 7, a light beam 8, a half mirror 9 and two rectangular prisms 17 arranged on the inner surface of the top of the main support frame 10 opposite to the half mirror 9. During detection, the light emitted by the tungsten lamp of the illuminating light source box 6 passes through thre...
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