Method for protecting carbonaceous crucible and single crystal pulling apparatus

A crucible and carbonaceous technology is applied in the protection field of carbonaceous crucibles, which can solve the problems of poor workability, long working time, damage to the expanded graphite film, etc., and achieve the effects of good shape followability, shortened working time and easy operation.

Active Publication Date: 2010-02-17
TOYO TANSO KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, if a piece of expanded graphite film is placed along the inner surface of the crucible, damage and bending will occur.
On the other hand, if such a piece of expanded graphite film is not damaged to cover the inner surface of the graphite crucible, it takes a long time to work.
[0007] (3) Furthermore, as the size of the crucible has increased in recent years, the size of a single graphite film has also become larger, so the above-mentioned problems such as breakage of the expanded graphite film, poor workability, and long working time have become more significant.
[0008] In addition, Patent Document 1 discloses a technology for setting cracks on the lower surface of a sheet of expanded graphite film (see Figure 6 and Figure 7 of Patent Document 1), but there is no difference between the actual film and a protective film, and the same Same problem as above (1)~(3)

Method used

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  • Method for protecting carbonaceous crucible and single crystal pulling apparatus
  • Method for protecting carbonaceous crucible and single crystal pulling apparatus
  • Method for protecting carbonaceous crucible and single crystal pulling apparatus

Examples

Experimental program
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Effect test

Embodiment 1

[0048] The same graphite crucible (graphite crucible divided in two) as the above-described embodiment has a size of 22 inches, and the protective film sheet (hereinafter referred to as the present invention) divided into two by the same method as the above-mentioned embodiment is made. The diaphragm A1) was laid along the butt joint of the graphite crucible, and 50 real machine tests of the CZ device were carried out. At this time, the time (working time) for laying the protective film on the graphite crucible, the ratio (failure rate) and the durability of the graphite crucible caused by the damage of the protective film were measured, and the results are shown in Table 1. Show.

[0049] [Table 1]

[0050] Types of membrane (diaphragm)

Embodiment 2

[0052] The size of the graphite crucible is 40 inches, and a protective film (hereinafter referred to as the film A2 of the present invention) divided into two of the corresponding size is used. In addition, under the same conditions as in Example 1 A real machine test was carried out to measure the operating time, failure rate and durability, and the results are shown in Table 1.

Embodiment 3

[0058] The same C / C crucible as in the above-described embodiment has a size of 22 inches, and the protective film (hereinafter referred to as the film B1 of the present invention) divided in the same manner as in the above-mentioned embodiment is used to cover the C / C crucible entirely. 50 real machine tests of the CZ device were carried out. At this time, the time for laying the protective film on the C / C crucible (working time), the ratio of the protective film damaged and unable to be used (failure rate), and the durability of the C / C crucible were measured, and the results As shown in table 2.

[0059] [Table 2]

[0060] Types of membrane (diaphragm)

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Abstract

This invention provides a method for protecting a carbonaceous crucible, which is easy to handle, can significantly reduce a working time, and can realize the covering of a sheet on the internal surface of a crucible without any space and breaking, and a single crystal pulling apparatus. The method for protecting a carbonaceous crucible comprises interposing a protective sheet formed of an expanded graphite material between a quartz crucible and a carbonaceous crucible in which the quartz crucible is placed. In the protective sheet, two or more protective sheet pieces, which are combined integrally in laying between the crucibles, are layed on the inner surface of the carbonaceous crucible.

Description

technical field [0001] The present invention relates to a method for protecting a carbonaceous crucible and a device for pulling a single crystal, more specifically, to a crucible device having a quartz crucible and a carbonaceous crucible inserted into the quartz crucible, and in particular to protecting a single crystal for pulling A method for melting a carbonaceous crucible of a crucible device and a single crystal pulling device using the protecting method. Background technique [0002] Conventionally, a crucible device having a graphite crucible and a quartz crucible is typically used as a single crystal pulling melting crucible device. In this semiconductor manufacturing process, as a representative single crystal pulling device, there is known a single crystal pulling device produced by the Czochralski single crystal growth method (hereinafter referred to as "CZ method") ( Hereinafter, referred to as "CZ device"). In the single crystal pulling device manufactured a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/10
CPCC30B15/10Y10T117/1032
Inventor 广濑芳明幸哲也
Owner TOYO TANSO KK
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