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Electrical Switching Devices

An electrical device and device technology, applied in electrical switching devices, embedding catalytic materials into the field of diamond substrates, can solve the problem of the device switching frequency being discounted, etc.

Active Publication Date: 2016-01-20
EVINCE TECH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As the size of the junction is physically increased in order to increase the switching voltage of the device, the amount of charge that needs to be neutralized to turn off the device also increases, which in turn compromises the switching frequency of the device

Method used

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Embodiment Construction

[0067] refer to Figure 1A , the diamond substrate 2 is polished to a high degree of planarity and may be processed to form an oxidized, hydrogenated, halogenated or hydroxyl supporting surface on the substrate 2 using techniques well known to those skilled in the art. The process may include high frequency glow discharge (not shown). Then, a catalytic metal 8 (such as iron, cobalt, nickel, or platinum, etc.) is deposited as a uniform layer to a thickness of 2 nm to 50 nm on the treated surface of the substrate 2 by evaporation or sputtering, and then deposited on the catalytic metal 8 A mask 3 of a suitable material is deposited on it. refer to Figure 1B , the mask 3 may be selectively removed using a photolithography process to leave a desired pattern 31 and expose the catalytic metal 8 in the remaining area.

[0068] Then, the catalytic metal 8 not covered by the mask 3 is removed by a chemical etching process to provide Figure 1C Region 81 of isolated catalytic metal...

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PUM

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Abstract

An electrical switching device is disclosed, the device comprising: a substrate including at least one diamond layer; at least one first electrode in contact with the substrate, wherein at least one of the first electrodes includes a at least one conductive protrusion in the substrate; and at least one second electrode in contact with the substrate and spaced from the or each first electrode.

Description

[0001] This application is a divisional application of the Chinese patent application with application number 200780021758.1 and the title of the invention is "Electrical Switching Device and Method for Embedding Catalytic Material in Diamond Substrate". The international filing date of the patent application with application number 200780021758.1 is 2007 International Application No. PCT / GB2007 / 001808 dated May 16, 2006 and claims priority to Patent Application No. 0611594.3 filed with the UK Patent Office on June 13, 2006. technical field [0002] The present invention relates to electrical switching and amplifying devices, and particularly, but not exclusively, to electrical switching devices for use in high power applications. The invention also relates to a method of embedding catalytic material in a diamond substrate. Background technique [0003] As is known to those skilled in the art, silicon has limitations when used as a fundamental electronic material for switchi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/16H01L29/417H01L29/861H01L21/04
CPCH01L21/0405H01L21/0425H01L29/1602H01L29/417H01L29/861H01L29/6603H01L29/66037H01L29/66356H01L29/7391H01L29/16
Inventor 格丽斯·安德鲁·泰勒
Owner EVINCE TECH LTD