Electrical Switching Devices
An electrical device and device technology, applied in electrical switching devices, embedding catalytic materials into the field of diamond substrates, can solve the problem of the device switching frequency being discounted, etc.
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[0067] refer to Figure 1A , the diamond substrate 2 is polished to a high degree of planarity and may be processed to form an oxidized, hydrogenated, halogenated or hydroxyl supporting surface on the substrate 2 using techniques well known to those skilled in the art. The process may include high frequency glow discharge (not shown). Then, a catalytic metal 8 (such as iron, cobalt, nickel, or platinum, etc.) is deposited as a uniform layer to a thickness of 2 nm to 50 nm on the treated surface of the substrate 2 by evaporation or sputtering, and then deposited on the catalytic metal 8 A mask 3 of a suitable material is deposited on it. refer to Figure 1B , the mask 3 may be selectively removed using a photolithography process to leave a desired pattern 31 and expose the catalytic metal 8 in the remaining area.
[0068] Then, the catalytic metal 8 not covered by the mask 3 is removed by a chemical etching process to provide Figure 1C Region 81 of isolated catalytic metal...
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