Dynamic two-dimensional photoelectric microscope

Abstract

A dynamic two-dimensional photoelectric microscope comprises an illuminating light source used for irradiating a measured two-dimensional line grain sample plate, a photoelectric microscope objective lens used for leading the real image of the measured two-dimensional line grain sample plate into a measuring system, a first light splitting flat sheet, an imaging CCD camera and a measuring unit, the first light splitting flat sheet is arranged on an output light path of the photoelectric microscope objective lens and used for splitting the light path into two light paths used for observation and measurement, the imaging CCD camera is arranged on the light path which is used for observation and split by the first light splitting flat sheet, the imaging CCD camera receives the light of the path and used for observing and adjusting the measured two-dimensional line grain sample plate in the measuring process, and the measuring unit is arranged on the light path which is used for measurement and split by the first light splitting flat sheet and is used for splitting the light of the path into light of two paths with the axis X as the measurement direction and light of two paths with the axis Y as the measurement direction, wherein the light is used for obtaining photoelectric collimation signals. The dynamic two-dimensional photoelectric microscope is simple in structure and easy to operate, can achieve the measurement function of two-dimensional line grain collimation, and is good in adaptability to measuring objects and measurement precision.

Description

technical field [0001] The present invention relates to a microscope. In particular, it relates to a dynamic two-dimensional photoelectric microscope capable of realizing dynamic photoelectric aiming in two-dimensional line measurement. Background technique [0002] Optical microscopes are widely used in precise aiming, positioning and measurement of geometric dimensions. Especially in the measurement of line lines, photoelectric microscopes are widely used for their high accuracy and simple measurement methods. The dynamic photoelectric microscope has the function of aiming at the measurement object in motion, so it has a significant effect in improving the corresponding measurement efficiency and has wider applicability. In two-dimensional line measurement, since the measurement points show a geometric progression, the efficiency of photoelectric aiming is of great significance. At present, the two-dimensional line measurement is realized by the optical microscope with ...

AI Technical Summary

Problems solved by technology

At present, the two-dimensional line measurement is realized by the optical microscope with the principle of image measurement. Due to the limitation of the resolution of the optical microscope, the measurement results are affected by the measurement material, the measurement efficiency is low, and the cost is high, the technology of two-dimensional line measurement and calibration is restricted. Development, unable to meet the needs of two-dimensional line measurement and calibration in the national industrial development

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