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A wide field of view high resolution projection objective lens

A projection objective lens, high-resolution technology, applied in the field of projection objective lens, can solve the problems of few precedents, difficulty in design and manufacture of projection objective lens, and achieve the effect of reducing processing, manufacturing difficulty, and small lens aperture

Active Publication Date: 2017-05-17
ZHANGJIAGANG ZHONGHE AUTOMATION TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It is very difficult to design and manufacture a projection objective lens with three properties of wide spectrum, high resolution and large field of view at the same time, and there are few precedents at present

Method used

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  • A wide field of view high resolution projection objective lens
  • A wide field of view high resolution projection objective lens
  • A wide field of view high resolution projection objective lens

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] see figure 1 , which is a schematic structural diagram of the wide-field-of-view high-resolution projection objective lens provided in Embodiment 1 of the present invention. From the object side P1 to the image side P2, the wide-field-of-view high-resolution projection objective lens includes a first mirror group G1, an equivalent parallel plate PLATE, a second mirror group G2, and a third mirror group G3. An aperture AS is provided in the second mirror group G2, and the aperture size of the aperture AS can be adjusted, and an aperture aperture with an adjustable aperture size can be used. The equivalent parallel plate PLATE is located between the object side P1 and the image side P2.

[0037] From the object side P1 to the image side P2, the first lens group G1 may sequentially include a first lens L1, a second lens L2, a third lens L3, and a fourth lens L4. The second lens group G2 may include at least two lenses with negative power and at least one of them is a bic...

Embodiment 2

[0059] see Figure 5 , which is a schematic structural diagram of the wide-field-of-view high-resolution projection objective lens provided by Embodiment 2 of the present invention. The wide-field-of-view high-resolution projection objective lens includes a first mirror group G1 , a second mirror group G2 , and a third mirror group G3 sequentially from the object side P1 to the image side P2 . An aperture AS is provided in the second mirror group G2, and the aperture size of the aperture AS can be adjusted, and an aperture aperture with an adjustable aperture size can be used.

[0060] From the object side P1 to the image side P2, the first lens group G1 may sequentially include the first lens L1, the second lens L2, the third lens L3, and the fourth lens L4; the second lens group G2 may sequentially include the fifth lens L5, The sixth lens L6, the seventh lens L7, the eighth lens L8, the ninth lens L9, the tenth lens L10, and the eleventh lens L11; the third lens group G3 m...

Embodiment 3

[0082] see Figure 8 , which is a schematic structural diagram of the wide-field-of-view high-resolution projection objective lens provided by Embodiment 3 of the present invention. The wide-field-of-view high-resolution projection objective lens includes a first mirror group G1 , a second mirror group G2 , and a third mirror group G3 sequentially from the object side P1 to the image side P2 . An aperture AS is provided in the second mirror group G2, and the aperture size of the aperture AS can be adjusted, and an aperture aperture with an adjustable aperture size can be used.

[0083] From the object side P1 to the image side P2, the first lens group G1 may sequentially include a first lens L1, a second lens L2, a third lens L3, and a fourth lens L4. The second lens group G2 may include at least two lenses with negative power and at least one of them is a biconcave lens; it may also include at least three lenses with positive power and at least two of them are biconvex lense...

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PUM

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Abstract

The invention discloses a wide-visual-field and high-resolution projection lens. The projection objective lens sequentially comprises a first lens group, a second lens group and a third lens group from an object side to an image side. A diaphragm is disposed between the first lens group and the third lens group. The second lens group at least comprises two air lenses satisfying |(r21-r22) / (r21+r22)|<0.6, |(Vd21-Vd22)|>28 and |(nd21-nd22)|>0.09, wherein the curvature radius, dispersion coefficient and d line refraction index of lens surfaces on two sides of the air lenses are respectively r21, r22, Vd21, Vd22, nd21 and nd22. The second lens group further at least comprises two positive lenses satisfying dn / dt<0 under room temperature, wherein n is refraction index, and t is temperature. The image side is provided with a concave spherical surface facing the object side, and the concave spherical surface satisfies alpha in<NA / beta, and 0.8<Lpout / Rim<1.2.

Description

technical field [0001] The invention relates to a projection objective lens, in particular to a wide-field-of-view high-resolution projection objective lens for high-precision large-field optical detection, which is applied to the research and detection of high-resolution large-field of view in the fields of biology, genetics, medical treatment, and medicine. . Background technique [0002] With the development of biological, genetic, medical and pharmaceutical research and detection technologies, the demand for projection objective lenses required for high-precision and large-field optical detection is increasing. It is very difficult to design and manufacture a projection objective lens with three properties of wide spectrum, high resolution and large field of view at the same time, and there are few precedents at present. Contents of the invention [0003] Aiming at the deficiencies in the prior art, the object of the present invention is to provide a wide-field-of-vie...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B13/22
CPCG02B13/005G02B13/06G02B13/22
Inventor 刘鹏
Owner ZHANGJIAGANG ZHONGHE AUTOMATION TECH