Novel high-precision hybrid vibration isolation device

Abstract

The invention provides a novel high-precision hybrid vibration isolation device. The novel high-precision hybrid vibration isolation device comprises an assembly plate, an intermediate separation plate, a bottom plate, an air spring and magnetorheological dampers, wherein the assembly plate and the intermediate separation plate are connected through the magnetorheological dampers; the intermediate separation plate is fixedly connected with the air spring through bolts; and the bottom plate is fixedly connected with the air spring. The magnetorheological dampers are used for isolating low-frequency vibration signals coming from the ground; and since practical ground signal sources can be transferred along multi-dimensional directions, the four magnetorheological dampers have vibration isolation capability of six DOF (Degree of Freedom) directions. The air spring and the magnetorheological dampers are reasonably connected with the intermediate separation plate, so that high-precision active and passive hybrid vibration isolation capability can be realized. According to the novel high-precision hybrid vibration isolation device disclosed by the invention, a stackable structure is adopted, so that the structure is compact; the vibration isolation capability of multi-DOF can be realized, so that the novel high-precision hybrid vibration isolation device has the advantages of high practicability, high reliability and the like; and an advanced vibration isolation means is provided for a high-precision equipment platform.

Description

technical field [0001] The invention relates to a novel high-precision hybrid vibration isolation device, in particular to provide advanced vibration isolation means for high-precision equipment platforms, and in particular to a novel high-precision hybrid vibration isolation device. Background technique [0002] With the development of high-speed, high-efficiency, high-precision and automation of production and transportation machinery, the intensity of vibration sources in engineering is continuously increasing, and the hazards of vibration and noise are becoming increasingly prominent. Vibration not only brings serious harm to operators, precision instruments and meters, machinery and equipment, and building structures, but also brings harm and influence to people's living environment and physical and mental health due to vibration and noise. [0003] The most widely used vibration control method is vibration isolation technology. From the energy point of view, vibration ...

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Problems solved by technology

[0006] Because passive vibration isolation cannot effectively isolate low-frequency or ultra-low-frequency interference components, most foreign countries adopt active vibration isolation technology or hybrid vibration isolation technology combining passive vibration isolation and active vibration isolation, especially to meet the requirements of inertial instrument calibration technology. A series of pneumatic and hydraulic servo vibration isolation systems developed according to the requirements of the country have also been researched on vibration isolation, but they are mainly concentrated on passive vibration isolation. The research on active vibration isolation technology is carried out late, and there are not many research results. , relevant theories, technologies and vibration isolation devices need to be further studied and discussed, especially in the research of high-precision vibration isolation technology and related basic theoretical issues, there is still a large gap compared with the international advanced level. This situation has seriously limited The development of my country's precision equipment system, precision measurement and precision machining technology

So far, there is no hybrid vibration isolation device using this structure

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