On-chip integrated arsenic sulfide microdisk cavity and manufacturing method thereof

A technology for integrating arsenic sulfide microdisk cavity and arsenic sulfide, which is applied in the optical field, can solve the problems of low quality factor of integrated arsenic sulfide microdisk cavity, and achieve the effect of improving quality factor and performance
CN105731352BActive Publication Date: 2018-03-16NANJING UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NANJING UNIV
Publication Date
2018-03-16

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Abstract

An embodiment of the present invention discloses an on-chip integrated arsenic sulfide microdisk cavity and a method for manufacturing the same. The microdisk cavity includes: a microdisk and a supporting structure stacked from top to bottom; wherein the size of the microdisk is greater than that of the supporting structure. According to the on-chip integrated arsenic sulfide microdisk cavity and the method for manufacturing the same provided in the embodiment of the present invention, the quality factors of the on-chip integrated arsenic sulfide microdisk cavity can be increased.
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Description

technical field

[0001] The embodiments of the present invention relate to the field of optical technology, in particular to an on-chip integrated arsenic sulfide microdisk cavity and a manufacturing method thereof. Background technique

[0002] Whispering gallery mode microdisk cavity is an important micro-nanophotonic device, which has a wide range of applications in low-threshold lasers, cavity optomechanics, and biosensing. Especially in the field of integrated optics, due to the huge potential application value of mid-infrared optics and nonlinear optics, the research on integrated optics based on materials with high nonlinear coefficient of mid-infrared light transmission will be of great help to this direction.

[0003] At present, the mainstream of research on mid-infrared light-transmitting materials in integrated optics is chalcogenide glass, among which arsenic sulfide and arsenic selenide are the main ones. The existing techniques for preparing arsenic sulfide mi...

Claims

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