Fresnel-Dammann zone plate

A zone plate and zone plate technology, which is applied in the field of diffractive optical elements, can solve the problems that cannot be used directly, the light intensity decays rapidly, and it is difficult to produce array focal spots, etc., and achieve the effect of easy processing and replication

Active Publication Date: 2016-10-26
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

However, on the one hand, due to its own diffraction limitation, this kind of grating cannot produce the above-mentioned diffraction effect in the near field, which limits its application to a certain extent; on the other hand, it is a pure phase optical diffraction element, and Cannot be used directly in the X-ray and EUV

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  • Fresnel-Dammann zone plate
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Embodiment Construction

[0018] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in combination with specific examples and with reference to the accompanying drawings.

[0019] The side view of the structure of the Fresnel-Daman zone plate embodiment of the present invention is as figure 1 As shown, the Fresnel-Daman zone plate includes a transparent medium 1, an opaque metal film 2 and an annular zone plate structure 3 etched on the metal film. Divide a series of concentric rings on the metal film, and the radius of the mth ring of the zone plate is r m =[(mλ / 2) 2 +mλf] 1 / 2 , λ is the design wavelength, and f is the reference focal length. The places etched between the concentric rings are transparent bands, and other places are opaque. In the embodiment, the design wavelength λ is 4.2 nm, the reference focal length f is 250 μm, and the total number of rings is 300.

[0020] The schema...

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Abstract

The invention provides a Fresnel-Dammann zone plate which is composed of a transparent medium, an opaque metal thin-film and an annular zone structure. The Dammann modulation technology is introduced in the conventional Fresnel zone plate structure. The Fresnel-Dammann zone plate has a series of concentric ring structures so that axial distribution of multiple equal-intensity annular array focal spots can be realized under plane wave illumination without additional focusing lens. The Fresnel-Dammann zone plate is easy to process and reproduce and can be applied to the field of water window wave band, optical imaging and biomedicine.

Description

technical field [0001] The invention relates to a diffractive optical element, in particular to a Fresnel-Daman zone plate, which can realize the distribution of a plurality of annular array focal spots of equal intensity in the axial direction without an additional focusing lens under plane wave illumination. Background technique [0002] The Damman grating is a phase grating modulated by the spatial coordinate position, and a diffraction grating with a special aperture function is used to generate a one-dimensional or two-dimensional rectangular array beam of equal intensity. The traditional Damman grating produces a square diffraction field distribution. The annular Damman grating proposed by Zhou Changhe et al. [Opt.Lett.28, 2174-2176 (2003)] can achieve the peak light intensity of each diffraction spectrum in the far field. Distributed toroidal diffraction field. However, on the one hand, due to its own diffraction limitation, this kind of grating cannot produce the ab...

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Application Information

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IPC IPC(8): G02B5/18
CPCG02B5/1876
Inventor 张军勇叶超超马雅尧柯杰孙美智朱健强
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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