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Vacuum storing and testing device for transmission electron microscope sample rods

A technology for transmission electron microscope samples and sample rods, which is applied to measuring devices, vacuum gauges, circuits, etc., and can solve problems such as damage to the vacuum system of the transmission electron microscope, contamination of transmission electron microscope components, and pollution

Active Publication Date: 2017-05-31
BEIJING UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Whether the sample rod is clean or not and the state of its own gas storage will directly affect the cleanliness of the TEM vacuum system and the pre-vacuum time. Boots, goniometer, etc. will be polluted to varying degrees, affecting the normal use of the transmission electron microscope
[0011] If the sample rod / is exposed to the atmosphere, its surface will generally be polluted, which will not only affect the life of the sample rod itself, but also cause damage to the vacuum system of the transmission electron microscope and pollute the components of the transmission electron microscope; at the same time, if it is exposed to the atmosphere for a long time, it will also make the sample The rod stores a certain amount of gas, which affects the pre-evacuation of the TEM

Method used

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  • Vacuum storing and testing device for transmission electron microscope sample rods
  • Vacuum storing and testing device for transmission electron microscope sample rods
  • Vacuum storing and testing device for transmission electron microscope sample rods

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Embodiment Construction

[0045] In the following, the present invention will be further described with reference to the accompanying drawings, in which exemplary embodiments of the present invention are shown. However, the present invention can be embodied in many different forms, and the function of the device can also be realized by changing the structural form of the device or the shape of the sample rod storage component, and is not limited to the examples described herein.

[0046] When using for the first time, the sample rod 19 is inserted into the corresponding station successively. If the number of sample rods 1 is not enough, the sample rod 19 can be replaced by a plug 7, so that the device of the present invention is guaranteed to be a closed container. Turn on the vortex dry pump 4 and the backing valve 3, pump the molecular pump 2 to a low vacuum, turn on the molecular pump 2, and after the molecular pump 2 works, close the backing valve 3 and open the pre-pumping valve 5, when the sample ...

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Abstract

A vacuum storing and testing device for transmission electron microscope sample rods belongs to the field of transmission electron microscope vacuum fittings. In storage of the sample rods, energizing testing and heating testing can be performed on the sample rods. The device comprises the components of a movable frame, a vacuum pump system, a vacuum measuring-and-displaying system, a vacuum cap, a valve system, a sample rod storing assembly and a plug. The device realizes simultaneous storage of multiple sample rods and is provided with an adding window which is reserved. The device can pump the air pressure in a chamber from atmosphere pressure to 4*10<-4> Pa within five minutes, and a limit vacuum pressure can reach 5*10<-5> Pa. The vacuum storing and testing device has advantages of effectively preventing electron microscope pollution caused by pollution or erosion by the sample rods in placement at outside, greatly reducing pre-pumping time of the sample rods in the electron microscope, realizing higher speed in reaching a stable vacuum degree of the electron microscope and prolonging service life of the sample rods. The vacuum storing and testing device further realizes benefits of convenient operation, high vacuum degree, easy adding of sample rod storing stations, and high suitability for different types of transmission electron microscope sample rods.

Description

[0001] Technical field: [0002] The invention relates to a vacuum storage and testing device for a transmission electron microscope sample rod, which is used for pre-vacuumizing and storing the transmission electron microscope sample rod, and performing pretreatment on the transmission electron microscope sample before entering the electron microscope, so as to ensure that the sample rod and the sample are dry and clean, shorten the The pre-extraction time of the transmission electron microscope reduces the pollution of the sample rod to the transmission electron microscope and improves the service life of the sample rod. In this device, the sample rod of the transmission electron microscope can also be energized, heated and other debugging tests in a working vacuum environment. The invention belongs to the field of transmission electron microscope vacuum accessories. [0003] Background technique: [0004] Since the invention of the transmission electron microscope in the 193...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20H01J37/26G01L21/00
CPCG01L21/00H01J37/20H01J37/261
Inventor 韩晓东翟亚迪毛圣成
Owner BEIJING UNIV OF TECH
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