Method for detecting vibration characteristics of resonator of nano electromechanical system

A technology of vibration characteristics and resonators, applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems of lack of experimental research and achieve the effect of intuitive detection

Active Publication Date: 2019-09-27
ARMY ENG UNIV OF PLA
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  • Abstract
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However, these studies are still theoretical simulations, lacking experimental studies

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  • Method for detecting vibration characteristics of resonator of nano electromechanical system
  • Method for detecting vibration characteristics of resonator of nano electromechanical system
  • Method for detecting vibration characteristics of resonator of nano electromechanical system

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[0021] In order to facilitate those of ordinary skill in the art to understand and implement the present invention, the present invention will be described in further detail below in conjunction with the examples. It should be understood that the implementation examples described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.

[0022] A device for detecting the vibration characteristics of a resonator in a nanoelectromechanical system includes a femtosecond laser system, a vacuum chamber, an electron gun, an imaging detection system, and an optical path delay platform.

[0023] The femtosecond laser system generates femtosecond laser. The femtosecond laser is divided into two beams by a spectroscope, namely the first femtosecond laser and the second femtosecond laser. The first femtosecond laser passes through the frequency doubler and enters the electron gun. The electron gun outputs converging electron ...

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Abstract

The invention discloses a method for detecting the vibration characteristic of a resonator of a nano electromechanical system, and the method comprises the following steps of fixing and placing a single crystal two-dimensional material into a vacuum chamber, and vacuumizing the vacuum chamber; and by adjusting the delay time of the pump light and the convergent electron probe pulse incident on the single crystal two-dimensional material, an imaging detection system monitors a Kikuchi diffraction image generated after the single crystal two-dimensional material is excited, and the vibration frequency and the quality factor of linear longitudinal vibration and nonlinear transverse vibration of the single crystal two-dimensional material are obtained through data processing. The method for detecting the vibration characteristic of the resonator of the nano electromechanical system can obtain the vibration frequency and the quality factor of linear longitudinal vibration and nonlinear transverse vibration of the single crystal two-dimensional material.

Description

technical field [0001] The invention belongs to the technical field of vibration characteristics of two-dimensional materials, and in particular relates to a method for detecting the vibration characteristics of a resonator of a nanoelectromechanical system. Background technique [0002] Compared with microelectromechanical system resonators, nanoelectromechanical system resonators have lighter weight, lower power consumption, and higher sensitivity due to their unique effects at the nanometer scale, such as surface effects, small size effects, and macroscopic quantum tunneling effects. High, so it is used in radio frequency communication, information storage and sensors and other fields. The basic principle of the nanoelectromechanical system resonator is that the beam structure exhibits periodic vibration under external excitation. Two-dimensional materials have become excellent beam structures for nanoelectromechanical system resonators due to their ultra-light weight, l...

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Application Information

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IPC IPC(8): G01N23/2055G01N23/04
CPCG01N23/2055G01N23/04G01N2223/0566G01N2223/604
Inventor 刘云苏继杰成坚郑幸许罗婷赵星龙卓家靖赵京山易哲菁肖青春
Owner ARMY ENG UNIV OF PLA
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