Optical waveguide module, optical waveguide film and manufacturing method thereof
a technology of optical waveguide and manufacturing method, which is applied in the direction of optical waveguide light guide, instruments, applications, etc., can solve the problems of (4) being costly, (2) not easy to achieve the refractive index of (3) not easy to achieve the refractive index sufficient between the core layer and the clad layer
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first embodiment
[0122] A thick film resist (product of MicroChem Corp., SU-8) is applied to a Si substrate by a spin coating method, is then pre-baked at a temperature of 80° C., is exposed through a photo mask, and is developed thus forming four optical waveguide convex portions having a square cross section (width: 50 μm, height: 50 μm, length: 50 mm, pitch: 250 μm). Next, the optical waveguide convex portions are post-baked at 120° C. to form the optical waveguide core manufacturing original discs.
[0123] Next, after applying a mold removing agent to the original disc, thermosetting dimethylcyclic resin (product of Dow Coning Asia Corporation, SYLGARD184) is made to flow into the original discs, is solidified by being heated at a temperature of 120° C. for 30 minutes and is peeled off thus manufacturing molds having recessed portions corresponding to optical waveguides convex portions having the square cross section and the alignment mark convex portions (thickness of mold: 5 mm).
[0124] Further...
second embodiment
[0132] A thick film resist (product of MicroChem Corp., SU-8) is applied to a Si substrate by a spin coating method, is then pre-baked at a temperature of 80° C., is exposed through a photo mask, is developed thus forming eight optical waveguide convex portions having a square cross section (width: 50 μm, height: 50 μm, length: 50 mm, pitch: 250 μm). Next, the optical waveguide convex portions are post-baked at a temperature of 120° C.
[0133] Thereafter, using a dicing saw which mounts a 45° blade, a notch having a depth of 10 μm is formed from an upper surface of each convex portion thus forming an original disc for manufacturing the optical waveguide core (see the core shown in FIG. 1C).
[0134] Next, after applying a mold removing agent to the original disc, thermosetting dimethylcyclic resin (product of Dow Coning Asia Corporation, SYLGARD184) is made to flow into the original discs, is solidified by being heated at a temperature of 120° C. for 30 minutes, and is peeled off thus ...
third embodiment
[0141] A thick film resist (product of MicroChem Corp., SU-8) is applied to a Si substrate by a spin coating method, is then pre-baked at a temperature of 80° C., is exposed through a photo mask, is developed thus forming eight optical waveguide convex portions having a square cross section (width: 50 μm, height: 50 μm, length: 50 mm, pitch of neighboring portions: 250 μm). Next, the optical waveguide convex portions are post-baked at a temperature of 120° C.
[0142] Thereafter, the original disc is formed by forming notches in the convex portions. As a dicing saw for forming the notches, a dicing saw on which a vertical cutting blade having a thickness of 20 μm is mounted is used. In a state that the Si substrate on which eight convex portions are formed as described above is fixed at an angle of 45° with respect to the blade of the dicing saw using a retaining jig, the notches are formed to a depth of 28 μm from upper surfaces of the convex portions. Here, width of the notches is s...
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