Low work-function, mechanically and thermally robust emitter for thermionic energy converters
a thermionic energy converter and low work function technology, applied in the direction of thermal electric motors, electrical devices, electrical discharge tubes, etc., can solve the problems of inability to reduce the work function of silicon carbide, inability to achieve the work function of tec electrodes, and inability to achieve the work function of sic, etc., to achieve the effect of stable operation
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[0028]In this description, several experiments relating to the above-described principles are described. Section I relates to fabrication, section II provides the experimental results, and section III give the conclusions.
I. Fabrication
A. Mechanically Robust Suspended Micro-Emitters
[0029]The emitter was configured as a silicon carbide (SiC) center pad 304 suspended above the substrate using four SiC crab-leg beams 306 as shown on FIGS. 3A-B. Here 302 are the support posts and 308 are holes in the center pad 304 to facilitate the undercut etch to form the suspended structure. This design accommodates thermal expansion of the order of 1% that occurs at the typical operating temperatures of 1000° C.-2500° C. It also provides a high thermal resistance between center pad 304 and support posts 302, which is important. We used a conformal sidewall deposition of poly-SiC to form stiff suspension legs with U-shaped cross sections, which increases the out-of-plane rigidity and avoids contact ...
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