The invention discloses a tunable surface emitting
laser array and a manufacturing method, comprising an N-
surface electrode layer; an active epitaxial component is arranged on the N-
surface electrode layer, two opposite sides of the top of the active epitaxial component are etched to form a
ridge waveguide, the
ridge waveguide comprises a convex portion located in the middle of the active epitaxial component and a concave portion located on both sides of the convex portion; an
electrical isolation layer is grown on the upper surface of the concave portion and on both sides of the convex portion; and a P-
surface electrode layer is grown on the active epitaxial component and the
electrical isolation layer, the P-surface
electrode layer is provided with a light-emitting hole, a plurality of
photonic crystal holes are arranged in the light-emitting hole, and the plurality of
photonic crystal holes are distributed in an array and penetrate the
ridge waveguide; wherein the N-surface
electrode layer, the active epitaxial component, the
electrical isolation layer and the P-surface
electrode layer form a plurality of array-distributed
crystal units, the P-surface electrode layer at adjacent positions of two
crystal units is etched to form an electrical isolation region, the spacings of the
photonic crystal holes of different
crystal units are different, so as to realize tunable
wavelength output and provide a large-scale high-efficiency
light source.