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A surface acoustic wave resonator, filter and electronic device

ActiveCN224459762UReduce strong couplingImprove passband performanceSemiconductor structureBusbar
This invention relates to the field of semiconductor structure technology and discloses a surface acoustic wave (SAW) resonator, filter, and electronic device. The SAW resonator includes a piezoelectric layer and an interdigital transducer. The interdigital transducer includes multiple electrode strips and a first busbar and a second busbar arranged opposite each other along a first direction. The first and second strips are alternately arranged along a second direction, and the first and second directions intersect. The interdigital transducer includes a central region and edge regions located on both sides of the central region along the second direction. A first metal duty cycle is smaller than a second metal duty cycle, and the difference between the second and first metal duty cycles ranges from 0.05 to 0.3. The first metal duty cycle is the metal duty cycle of the electrode strips in the edge regions, and the second metal duty cycle is the metal duty cycle of the electrode strips in the central region. This invention weakens the strong coupling between the incident wave and the reflected wave, thereby reducing the ripple on the low-frequency side of the resonant frequency.
Owner:ZHEJIANG STARSHINE SEMICON CO LTD