The invention discloses a temperature adjusting device,
semiconductor process equipment and a temperature adjusting method, and belongs to the technical field of
semiconductor processing. The temperature adjusting device is used for adjusting the temperature of the
wafer, the temperature adjusting device comprises a shading
assembly, a temperature detection
assembly and a driving
assembly, and the shading assembly is movably arranged between the heating source and the
wafer and is used for shielding the
wafer; the temperature detection element is used for detecting the temperature of the central area and the edge area of the wafer; the driving assembly is connected with the shading assembly and used for driving the shading assembly to act according to a detection
signal of the temperature detection assembly so as to adjust the shading area of the shading assembly on at least one of the center area and the edge area. In the scheme, the shielding area of the shading assembly on at least one of the central area and the edge area is adjusted according to the
temperature difference, detected by the temperature detection assembly, of the central area and the edge area of the wafer, it can be guaranteed that the temperatures of the central area and the edge area are the same, and therefore the wafer is prevented from deforming or
jumping up from the supporting ring.